光电工程

飞秒激光直写低串扰三维集成90°光混频器

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孙琦开 , 昝乙浩 , 吴雨桐 , 郭子童 , 于萌萌 , 魏伟华 ^*^,^* , 田振男

光电工程 | 科研论文 2026,53(7): 260117-1

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光电工程 |科研论文 2026 , 53 (7) : 260117 -1

飞秒激光直写低串扰三维集成90°光混频器

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魏伟华 (1991-)，男，硕士，高级工程师，从事飞秒激光精密制造与光纤光栅极端传感器件。E-mail：weiwh@jlu.edu.cn weiwh@jlu.edu.cn

"}, bioImg=QG4NOlc7ZundXa+JvcSL9g==, bioContent=

魏伟华 (1991-)，男，硕士，高级工程师，从事飞秒激光精密制造与光纤光栅极端传感器件。E-mail：weiwh@jlu.edu.cn weiwh@jlu.edu.cn

孙琦开, 昝乙浩, 吴雨桐, 郭子童, 于萌萌, 魏伟华^*^,^*, 田振男

作者信息

吉林大学电子科学与工程学院，吉林长春 130012

通讯作者:

魏伟华，weiwh@jlu.edu.cn

作者简介:

作者贡献

孙琦开：背景调研、实验的设计与完成、论文写作；昝乙浩：背景调研、参与实验的设计与完成；吴雨桐：参与实验数据处理；郭子童：参与数据处理与论文初稿写作；于萌萌：参与论文校对；魏伟华，田振男：指导论文选题与论文修改。

孙琦开 (2001-)，男，硕士研究生，从事飞秒激光直写三维集成波导技术研究。E-mail：2206171993@qq.com 2206171993@qq.com

魏伟华 (1991-)，男，硕士，高级工程师，从事飞秒激光精密制造与光纤光栅极端传感器件。E-mail：weiwh@jlu.edu.cn weiwh@jlu.edu.cn

Femtosecond laser direct writing of a low-crosstalk three-dimensional integrated 90°optical hybrid

Qikai Sun, Yihao Zan, Yutong Wu, Zitong Guo, Mengmeng Yu, Weihua Wei, Zhennan Tian

Affiliations

College of Electronic Science and Engineering, Jilin University, Jilin, Changchun 130012, China

Corresponding Author:

weiwh@jlu.edu.cn

出版时间: 2026-07-25 doi: 10.12086/oee.2026.260117

文章导航

摘要

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针对高速相干光通信对集成90°光混频器的核心需求，本文设计并制备了一种基于三维空间正交排布波导结构的1550 nm波段低串扰90°光混频器。器件采用定向耦合器作为核心分束与相移单元，利用耦合过程固有的正交相移实现90°相位匹配，通过I、Q干涉臂的全对称排布大幅提升了偏振相关相位稳定性，通过不同写入深度的三维正交空间排布显著抑制了相邻IQ两臂的倏逝波耦合串扰。本文基于耦合模理论，系统推导了定向耦合器的固有相移特性与对称干涉臂结构的偏振相位稳定性机理，为器件设计提供了关键理论支撑。测试结果表明， IQ两臂串扰低于−72 dB，器件整体尺寸为25 mm × 90 μm；在垂直偏振 (V光)下，相位误差低至−0.35°，水平偏振 (H光)下相位误差仅−3.37°。该器件兼具紧凑结构、超低串扰与低偏振相关相位误差特性，为飞秒激光直写三维集成光子器件在相干光通信及量子光学等领域的应用提供了新的方案。

关键词

飞秒激光直写 / 三维光子集成 / 90°光混频器 / 相干光通信

Abstract

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Objective

High-speed coherent optical communication, driven by 5G/6G, data-center interconnects, and ultra-high-definition video transmission, requires advanced modulation formats such as QPSK and high-order QAM, which impose stringent demands on integrated 90° optical hybrids. These devices perform coherent mixing of signal and local oscillator (LO) light, converting the in-phase (I) and quadrature (Q) components into optical intensity signals. Their insertion loss, channel crosstalk, phase error, and splitting uniformity directly determine receiver sensitivity and error vector magnitude (EVM). Currently, most integrated 90° optical hybrids are fabricated on planar platforms such as silica-based PLC and SOI. Restricted by two-dimensional geometry, the I and Q arms must be arranged within the same plane, leading to severe crosstalk from waveguide crossings and large device footprints—the overall chip area far exceeds that of the core functional units. In contrast, femtosecond laser direct writing offers true three-dimensional (3D) fabrication capability, enabling arbitrary waveguide geometries inside transparent materials and overcoming planar layout limitations. This work exploits this 3D capability to propose a compact, high-performance 90° optical hybrid with ultra-low crosstalk and low polarization-dependent phase error.

Methods

A fully symmetric 3D orthogonal architecture is proposed based exclusively on 2×2 directional couplers for both splitting and phase shifting. The theoretical analysis is grounded in coupled-mode theory. For a lossless 2×2 directional coupler, the through and cross port outputs satisfy E_through = E_incos(κL) and E_cross = E_injsin(κL), where κ is the coupling coefficient, L is the coupling length, and j is the imaginary unit corresponding to the intrinsic 90° phase shift. This phase difference is determined solely by coupled-mode theory and has no direct dependence on κ or L, making it highly robust against process fluctuations. Even when input polarization varies and causes κ to fluctuate, the 90° phase difference remains stable. Moreover, the I and Q interferometric arms adopt completely symmetric spatial layouts and identical fabrication parameters, ensuring that for any polarization state, the propagation phase difference remains zero. Based on this theory, the I and Q arms are inscribed at depths of 250 µm and 300 µm, respectively, with a 50 µm vertical separation to virtually eliminate evanescent-wave crosstalk. Identical writing parameters and symmetric paths maintain amplitude balance and phase orthogonality, while a waveguide trimming structure (ΔL) provides precise optical-path-length matching. Fabrication uses a Yb:KGW femtosecond laser system (1030 nm, 100 kHz, 197 fs) with second-harmonic generation at 515 nm through a BBO crystal. The 515 nm pulses are focused by a 20× objective (NA = 0.75), and the process is monitored in real time by a CCD camera.

Results and Discussion

Systematic optimization of fabrication parameters is performed. Under optimized conditions (56 mW, 0.1 mm/s), waveguides achieve stable single-mode transmission at 1550 nm with a minimum propagation loss of 0.16 dB/cm. Performance at different depths (250 µm and 300 µm) shows excellent consistency, with a loss difference below 0.02 dB/cm and a mode-field overlap integral of 0.986, demonstrating outstanding process stability across depths. The directional coupler splitting characteristics are systematically characterized. With a coupling gap of 12 µm, a coupling length of 1.712 mm achieves 1∶1 uniform splitting at 1550 nm. The coupling coefficient κ deviation between the two depths is less than 0.5%, confirming that core functional units do not require separate design adjustments for different depths, significantly simplifying fabrication. The crosstalk between the I and Q arms, measured by the end-face injection method, is below −72 dB—far superior to the −20 to −40 dB levels of most reported devices. This fully verifies that the 3D orthogonal layout effectively suppresses evanescent-wave crosstalk. In practice, due to measurement system limitations, the actual crosstalk does not exceed −72 dB. The fabricated device exhibits a compact footprint of 25 mm × 90 µm and an insertion loss of 2.3 dB. The splitting amplitude imbalance is maintained within 0.95–1.05, achieving near-ideal 1:1 uniformity. Phase demodulation performance is evaluated using Lissajous ellipse fitting. Under vertical polarization (V-light), the phase error is −0.35° with an amplitude imbalance of 1.04; under 30° polarization, −0.83° and 1.10; under 60° polarization, −3.53° and 1.26; and under horizontal polarization (H-light), −3.37° and 1.26. Across the full polarization range, the phase error remains within ±5°, demonstrating significant suppression of polarization-dependent phase errors by the symmetric interferometric arm structure. A digital calibration matrix is derived from the measured transmission matrix. After applying a single fixed calibration matrix, the residual phase error across the full polarization range is reduced to within 2°, and the amplitude imbalance is controlled within 1 ± 10%. The calibrated Lissajous ellipses converge to nearly perfect circles that almost completely overlap with the ideal unit circle, with no observable rotation or axis deviation. This intuitively verifies that the digital calibration method effectively compensates for amplitude imbalance and phase errors, requiring only a single calibration to achieve near-ideal quadrature demodulation across the full polarization range.

Conclusions

This work demonstrates a novel paradigm for high-performance 90° optical hybrids using femtosecond-laser 3D photonic integration. By synergistically combining a 3D orthogonal waveguide layout with a fully symmetric directional-coupler-based architecture, the device simultaneously achieves ultra-low crosstalk (<−72 dB), minimal polarization-dependent phase error (<±5° across the full polarization range, and <2° after calibration), and an extremely compact form factor (25 mm × 90 μm). The device offers a high-performance, rapidly prototypal 3D integration solution for high-speed coherent optical communication systems, and also provides new design concepts for the application of femtosecond laser direct writing technology in 3D integrated photonic signal processing and quantum optics.

Key words

femtosecond laser direct writing / 3D photonic integration / optical 90° hybrid / coherent optical communication.

引用本文

孙琦开, 昝乙浩, 吴雨桐, 郭子童, 于萌萌, 魏伟华, 田振男. 飞秒激光直写低串扰三维集成90°光混频器. 光电工程, 2026 , 53 (7) : 260117 -1 . DOI: 10.12086/oee.2026.260117

Qikai Sun, Yihao Zan, Yutong Wu, Zitong Guo, Mengmeng Yu, Weihua Wei, Zhennan Tian. Femtosecond laser direct writing of a low-crosstalk three-dimensional integrated 90°optical hybrid[J]. Opto-Electronic Engineering, 2026 , 53 (7) : 260117 -1 . DOI: 10.12086/oee.2026.260117

正文

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1　引　言

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随着5G/6G通信、数据中心互联与超高清视频传输的快速发展，高速相干光通信已成为长距离、大容量光纤传输系统的核心技术^[1-2]。正交相移键控(Quadrature phase shift keying‌‌‌, QPSK)^[3]、高阶正交幅度调制(quadrature amplitude modulation, QAM)^[4]等先进调制格式的广泛应用，对集成化90°光混频器 (亦称IQ解调器)的性能提出了严苛要求。该器件是相干接收系统的核心光学单元^[3,5]，负责完成信号光与本振光的相干混频，将复信号的同相 (in-phase，I)与正交 (quadrature，Q)分量转换为光强信号。其插入损耗、通道串扰、相位误差与分光均匀性直接决定了相干接收系统的灵敏度与误差矢量幅度 (error vector magnitude，EVM)^[6-7]。

目前的集成 90°光混频器多基于二氧化硅平面光波导 (planar lightwave circuit, PLC)^[8]、绝缘体上硅 (silicon-on-insulator, SOI)^[9]等平面工艺制备。受限于二维平面结构，IQ 两臂波导需在同一平面内排布^[5,10-11]。平面结构中波导交叉导致的串扰难以抑制到较低水平^[12]、器件平面尺寸大^[11]等问题。平面光波导器件的二维布局面临本质性的尺寸约束，导致整体器件面积远大于核心功能单元的物理尺寸。如2023年，重庆光电技术研究所陈伟等团队在InP平台开发的90°混频器横向尺寸为220 µm，而干涉单元的尺寸20 µm，横向尺寸是干涉单元的11倍^[11]。

相比之下，飞秒激光直写技术^[13-15]的真三维微纳加工能力^[16]可在透明材料内部直接写入任意三维波导几何形状的波导结构，有效突破了二维平面布局的限制。飞秒激光直写技术作为一种无掩膜、一步成型的三维微纳加工技术^[17]，可通过飞秒激光脉冲诱导透明介质的非线性折射率变化^[18-19]，在材料内部直接写入任意三维构型的光波导结构，具备三维集成^[20-21]、工艺快速灵活^[22]、材料兼容性强^[23-26]的独特优势，为突破平面光子集成的结构限制提供了新的技术方案^[27-29]。

针对上述问题，本文结合飞秒激光直写的工艺特性，提出了一种基于定向耦合器分束与相移的立体90°光混频器。首先，基于耦合模理论推导三维正交结构的串扰抑制机理，明确了定向耦合器固有正交相移的偏振不敏感性，以及全对称干涉臂结构对偏振相关相位误差的抑制机理，为器件设计提供了完整的理论框架；其次，采用定向耦合器作为核心分束与相移单元，大幅提升了分光均匀性与相位稳定性；最后，通过不同写入深度的三维正交空间波导排布，使IQ两臂模式重叠积分趋近于零，实现了超低串扰特性。本文详细阐述了器件的结构设计、制备工艺与测试方法，系统分析了波导基础特性、定向耦合器分束与相移特性、三维结构串扰特性与器件相位解调性能，验证了该器件在1550 nm通信波段的优异性能。

2　器件结构与理论分析

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2.1　90°光混频器基本原理

90° 光混频器的核心作用是通过光场相干干涉，将调制在光载波上复信号的 I、Q 分量完整分离。输入解调器的信号光与本振光的复包络可分别表示为

$ \tilde{E}_{\mathrm{S}}=A_{\mathrm{S}}\mathrm{e}^{\mathrm{j}\varphi_{\mathrm{S}}\left(t\right)} $

与

$ \tilde{E}_{\mathrm{LO}}=A_{\mathrm{LO}}\mathrm{e}^{\mathrm{j}\varphi_{\mathrm{LO}}} $

。本文设计的90°光混频器采用2×2定向耦合器作为分束与合束核心单元。无损耗对称定向耦合器的琼斯传输矩阵为

$ \boldsymbol{M}_{\mathrm{DC}}=\left[\begin{array}{cc}\cos(\kappa L) & \mathrm{j}\sin(\kappa L\mathrm{_c}) \\ \mathrm{j}\sin(\kappa L) & \cos(\kappa L_{\mathrm{c\mathrm{ }}})\end{array}\right]\; , $

(1)

式中：

$ \kappa $

为模式耦合系数，L_c为耦合长度，虚数单位j代表交叉端口相对于直通端口的固有90°相位偏移，该相移为耦合过程的固有属性，仅由电磁场边界条件与能量守恒决定。当

$ \kappa L={\text{π}} /4 $

时，耦合器实现1:1均匀分束 (3 dB耦合器)，传输矩阵简化为

$ \begin{array}{c}{{\boldsymbol{M}}}_{\text{3dB}}\,=\,\dfrac{\sqrt{2}}{2}\,\left[\begin{array}{cc} 1 & \text{j} \\\text{j} & 1 \end{array}\right]\end{array}\;. $

(2)

器件的完整工作流程为：信号光与本振光经第一级3 dB耦合器实现1:1分束后，分别进入空间隔离的I、Q干涉臂， Q臂通过定向耦合器固有相移与波导长度匹配实现精准的90°正交相位偏移；分束后的光分量经第二级3 dB耦合器完成相干干涉，最终输出4路光信号

$ {I}_{+} $

、

$ {I}_{-} $

、

$ {Q}_{+} $

、

$ {Q}_{-} $

，其光强满足：

$ \left\{\begin{array}{l}I_+ \propto\left|\widetilde{E}_{\mathrm{S}}+\widetilde{E}_{\mathrm{LO}}\right|^2 \\I_- \propto\left|\widetilde{E}_{\mathrm{S}}-\widetilde{E}_{\mathrm{LO}}\right|^2 \\Q_+ \propto\left|\widetilde{E}_{\mathrm{S}}+\mathrm{j} \widetilde{E}_{\mathrm{LO}}\right|^2 \\Q_- \propto\left|\widetilde{E}_{\mathrm{S}}-\mathrm{j} \widetilde{E}_{\mathrm{LO}}\right|^2\end{array}\right.\;. $

(3)

后端通过平衡探测器对4路信号进行差分检测，可消除本振光强度噪声与共模干扰，线性恢复出调制信号的I、Q分量：

$ \left\{\begin{array}{l}I_+-I_- \propto \operatorname{Re}\left\{\widetilde{E}_{\mathrm{S}}^* \cdot \widetilde{E}_{\mathrm{LO}}\right\} \propto I (t) \\Q_--Q_+ \propto \operatorname{Im}\left\{\widetilde{E}_{\mathrm{S}}^* \cdot \widetilde{E}_{\mathrm{LO}}\right\} \propto Q (t)\end{array}\right. \;. $

(4)

2.2　器件三维结构设计

本文设计的三维90°光混频器整体结构如图1所示，沿光传输方向 (x 轴)分为三级核心功能单元，整体尺寸仅为 25 mm×90 μm，E_S和E_LO两输入臂通过耦合方式实现50∶50均匀分光，其中E_S向两侧波导分别耦合实现均匀分光并使两臂产生−90°相移，E_LO向一侧耦合使一臂产生−90°相移，至此，有三臂产生的−90°相移等效为一臂产生了+90°相移。Q、I 干涉臂分别写入衬底内部 250 μm 与 300 μm 深度处，竖直方向间隔 50 μm 形成三维空间隔离排布。

器件全程采用 2×2 定向耦合器作为分束与合束核心单元，有效降低了飞秒激光直写工艺下 Y 分支、MMI 分光均匀性差、工艺宽容度低的制备难题；对称干涉臂布局设计保障了I、Q两路的幅度平衡性与相位正交性。三维垂直堆叠正交布局，使两臂波导的模式场重叠积分降低至极低水平，从而抑制了平面结构中波导交叉所产生的串扰问题；通过调整标黄区域的波导长度 ΔL，可精准配平 I、Q 两臂由于弯曲和不同层深的传播常数差所产生的光程差。

2.3　对称耦合结构的偏振相关相位稳定性理论分析

本文通过采用定向耦合器的固有正交相移实现90°相位匹配，结合I、Q干涉臂的对称排布，实现了偏振不敏感的相位误差，同时解释了偏振变化下幅度失衡增大的内在机理，以下基于耦合模理论展开系统推导。

对于无损耗的2×2定向耦合器，当光从单一端口输入时，其直通端口与交叉端口的输出光场满足耦合模理论^[30]的标准解：

$ \left\{\begin{aligned} & E_{\text{through }}=E_{\text{in }}\cos(\kappa L\mathrm{_c}) \\ & E_{\text{cross }}=E_{\text{in }}\mathrm{j}\sin(\kappa L_{\mathrm{c}})\end{aligned}\right.\; , $

(5)

其中：

$ {E}_{\text{in}} $

为输入光场振幅。该式揭示了器件低偏振相位误差的理论基础：直通端口与交叉端口之间的90°相位差，仅由耦合模理论的基本方程决定。在理想无损耗对称耦合条件下，该相移与耦合系数

$\kappa $

、耦合长度 L 无直接关联；在实际器件中，其对工艺波动的敏感度远低于传统移相结构。即使输入偏振态发生变化导致

$ \kappa $

发生波动，直通与交叉端口之间的90°相位差仍能保持稳定。

2.4　全对称干涉臂结构的偏振相关相位误差的抑制机理

本文器件的I、Q路两根干涉臂均采用完全对称的空间排布与加工参数，该设计进一步从传输层面抑制了偏振相关相位误差。对于任意偏振态的输入光，波导的传输相位满足：

$ \phi=\frac{2\text{π}}{\lambda}n_{\text{eff}}L\; , $

(6)

其中：

$ n\mathrm{_{eff}} $

为该偏振态下波导的有效折射率，L为波导长度。对于I路的两根对称干涉臂，其波导长度

$ {L}_{1}={L}_{2} $

，且加工参数完全一致，因此对于任意偏振态，两根波导的有效折射率始终满足

$ n_{\mathrm{eff},1}=n_{\mathrm{eff},2} $

，则两根波导的传输相位差为

$ \Delta\phi\mathrm{_I}=\frac{2\text{π}}{\lambda}L\left(n_{\text{eff,1}}-n_{\text{eff,2}}\right)=0\; . $

(7)

同理，Q路的两根对称干涉臂的传输相位差也始终为0，与输入偏振态无关。该结论表明，对称干涉臂结构可以显著减少传输过程中偏振变化引入的额外相位差，保证了I、Q两路的相对相位仅由定向耦合器的固有90°相移决定，对偏振态变化和波导截面不规则性具有较强的鲁棒性。

3　实验结果

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3.1　实验装置

本器件采用飞秒激光直写工艺在康宁7980熔融石英衬底上制备，衬底尺寸为25 mm×25 mm×0.7 mm，双面光学抛光。制备前依次使用丙酮、无水乙醇、去离子水对衬底进行清洗，去除表面杂质与污染物，空气吹干后备用。

采用立陶宛Light Conversion公司生产的Yb:KGW高重复频率飞秒激光器 (CARBIDE CB3-20W)，激光器输出中心波长1030 nm、重复频率100 kHz、脉宽197 fs的基频飞秒脉冲；通过偏硼酸钡晶体 (BBO, β-BaB₂O₄)进行I类相位匹配倍频转换，获得515 nm的绿光飞秒脉冲。515 nm飞秒脉冲的功率通过Ophir 7Z01560 Vega功率计在物镜前实时校准，使用Olympus 20×平场复消色差物镜 (数值孔径NA=0.75)和0.75mm狭缝进行加工。样品搭载于Aerotech公司生产的三维气浮位移平台，激光扫描方向与波导传输方向 (图1中x轴)平行，样品起始加工位置定位及整个加工过程由高分辨率电荷耦合器件 (charge-coupled device‌‌, CCD)相机实时监控。

3.2　波导基础工艺特性优化

为获得1550 nm波段单模传输、低损耗、高一致性的光波导，制作并测试了不同激光功率、扫描速度、写入深度下的波导性能，测试结果如图2所示。

测试结果表明，传输损耗受加工功率和扫描速度的共同影响。在相同加工功率下，熔融石英波导存在扫描速度越低，损耗越低的趋势。在0.1 mm/s这一扫描速度下，存在一个损耗最低的功率即56 mW。经参数优化后，波导在加工功率56 mW，扫描速度0.1 mm/s的条件下可在 1550 nm 波段实现稳定单模传输，最低传输损耗低至 0.16 dB/cm，为器件低插入损耗特性提供了基础。当激光功率偏低或扫描速度过快时，单位体积内沉积的能量密度不足以诱导充分的折射率调制 (Δn过小)，导致波导对光场的约束能力减弱，损耗急剧增大。相反，当激光功率过高或扫描速度过慢时，局部能量沉积超过材料改性阈值，易引发微裂纹、空泡或折射率不均匀分布等结构性缺陷，致使波导截面折射率轮廓发生畸变，由侧壁粗糙度引起的散射损耗成为主导。因此，选定实测得到的最低传输损耗参数组合作为加工参数。

本文器件的 Q、I 两臂分别写入 250 μm 与 300 μm 深度，不同写入深度下波导的性能一致性直接决定了器件的分光平衡性与相位精度，为此本文对相同加工参数、不同写入深度下的波导性能进行了系统表征，结果如图3 所示。

图3(a)为写入深度 300 μm (上)与 250 μm (下)的波导截面显微镜照片，可见两个深度下的波导截面形貌高度一致，无明显的形貌畸变；图3(b)为对应波导在 1550 nm 波段的端面近场模场分布图，两个深度下的波导均实现了稳定的基模传输，模场分布重合度极高。测试结果表明：在 250~300 μm 的写入深度区间内，相同加工参数制备的波导传输损耗差异小于 0.02 dB/cm，模场重叠积分达 0.986，模场与传输特性高度一致。该结果验证了本文优化后的工艺在不同写入深度下的优异稳定性，无需为不同层深的波导单独优化加工参数，大幅减少了制造过程中的可调变量，有利于提升器件批量化制备的精度与良率。

3.3　定向耦合器分束与相移特性测试

定向耦合器是本文器件的核心分束与相移单元，本文使用优化后的飞秒激光直写光波导参数，制备了任意分束比的定向耦合器。系统测试了不同深度和不同耦合间距下，归一化输出光功率随耦合长度的变化规律，测试结果与耦合模式理论的拟合曲线如图4所示。定向耦合器的透射比与耦合系数κ、耦合长度L_c，以及光波导传播常数β 相关。当测试光从定向耦合器的输入端口入射时，其在耦合区域内的光场能量转移过程可描述为^[26]

$ Trans.=\frac{P\mathrm{_t}}{P_{\mathrm{t}}+P_{\mathrm{s}}}=\delta^2\sin^2\left(\frac{\kappa}{\delta}\cdot L_{\mathrm{c}}+\varphi_0\right)\; , $

(8)

$ \delta^2=\frac{4 \kappa^2}{4 \kappa^2+\Delta \beta^2}\;, $

(9)

式中：Δβ = |β₁ − β₂|表示两光波导传播常数差值；P_t、 P_s分别为两个端口的输出功率；β₁、β₂对应两光波导的传播常数；φ₀为弯曲结构引入的初始相位，δ为归一化耦合系数。

定向耦合器是器件的核心分束与相移单元，本文在优化后的波导参数基础上，制备了任意分束比的定向耦合器，系统测试了不同耦合间距下，归一化输出光功率随耦合长度的变化规律。当耦合间距为 12 μm 时，耦合长度 1.712 mm 即可实现 1550 nm 波段的 1∶1 均匀分光。

本文同时对比测试了 250 μm 与 300 μm 两个写入深度下定向耦合器的耦合特性，结果显示两个深度下的耦合系数κ偏差小于 0.5%，分光特性具有高度一致性。该结果表明核心功能单元无需为不同写入深度单独调整设计与加工参数，进一步简化了制造流程，减少了多参数协同优化带来的制造误差；配合光程差配平结构，既实现了三维正交结构中 I、Q 两臂的相位精准匹配，又有效降低了制造环节的多参数协同优化难度与变量波动。

3.4　三维结构串扰特性测试

通道串扰是90°光混频器的核心性能指标，直接决定了相干接收系统的解调信噪比^[31]，为验证本文三维正交结构对通道串扰的抑制效果，采用端面注入法对IQ两臂的串扰进行了测试。通过制造与器件相同参数的平行波导对，两波导深度分别为250 μm (白色框Q)，300 μm (红色框I)，水平方向完全重叠，传输长度均 25 mm。串扰测试方法为：仅向 Q 臂输入端口注入 1550 nm 单模激光，测试 I 臂输出端口的光功率并观测其端面模场，如图5所示，串扰^[32]定义为

$ CT=10 \cdot {\mathrm{lg}}\left ({P}_{{\mathrm{I}}}/{P}_{{\mathrm{Q}}}\right) \;. $

(10)

经测试，器件 IQ 两臂的实测串扰低至−72 dB，远优于多数已报道的 90° 光混频器−20~−40 dB 的串扰水平^[11,33-35]。该结果充分验证了三维正交排布结构可显著抑制 IQ 两臂的倏逝波耦合串扰，有效解决了平面集成结构中通道串扰的技术挑战。在实际测量中，由于测量系统本身的限制 (功率计精度、背景噪声、光纤耦合隔离度)等影响^[33]，当待测串扰功率低于系统噪声底限时，测量系统无法区分器件本征串扰与系统固有噪声，最终输出的测量值本质上是系统的噪声基底，无法完全反映器件的本征串扰水平，I、Q两臂的实际串扰不超过−72 dB。

3.5　器件整体解调性能测试

完成基础单元性能验证后，本文对制备的三维 90° 光混频器的整体形貌与输出特性进行了系统表征，如图6所示。器件整体宽度仅 90 μm，长度 25 mm，结构高度紧凑，相较于同类型飞秒激光直写90°光混频器，平面占用面积显著下降^[28]。四个端口的光强分布均匀，经测试，器件的分光幅度失衡控制在 0.95~1.05 区间，实现了接近理想的 1∶1 均匀分光。通过测试输出功率与输入功率的比值，得到插损为2.3 dB (E_S 输入)和2.32 dB (E_LO 输入)。本文通过调整 I 臂的波导配平长度 ΔL，补偿三维结构引入的微小光程差。

4　数据分析

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4.1　90°混频器相位解调性能测试

本文采用李萨如椭圆拟合法^[36-38]提取器件相位误差与幅度失衡，向器件输入具有不同相位差的相干光信号，采集 I、Q 两路的差分输出信号并进行拟合，器件I、Q两路的差分输出信号可表示为

$ \left\{\begin{array}{l}I(t)=A\cos(\omega t+\Delta\varphi) \\ Q(t)=B\sin(\omega t)\end{array}\right.\; , $

(11)

其中：A、B分别为I、Q两路的输出幅度，幅度失衡定义为

$ \alpha=|A/B| $

；

$ \text{Δ}\varphi $

为IQ两臂实际相位差与理想90°的偏差，即相位误差。将上式消去时间项

$ \omega t $

，可得到李萨如椭圆的通用方程：

$ \frac{I (t)^2}{A^2}+\frac{Q (t)^2}{B^2}-\frac{2 I (t) Q (t) \sin \Delta \varphi}{A B}=\cos ^2 \Delta \varphi\;. $

(12)

拟合后的结果如图7所示，图7(a)为拟合后得到的相位误差和幅度失衡，结果显示其在0~90°偏振下具有较好的偏振不敏感度。图7(b)圆拟合结果显示，圆心坐标 (−0.0337, −0.0423)、半径 0.89，轨迹接近标准正圆；李萨如曲线椭圆度优于 0.97，无明显的旋转与轴长偏差。基于拟合结果解算出的相位误差仅−0.35°，幅度失衡 1±4%，验证了器件在 V 光输入下具备接近理想的正交解调性能。针对 0° (V光)、30°、60°、90° (H光) 四个典型输入偏振态，采用相同的李萨如椭圆拟合方法提取器件的相位误差与幅度失衡，结果如图7(c-f)所示。结果表明，随着偏振角由垂直向水平偏转，波导弱双折射效应逐渐显现，幅度失衡呈增大趋势，但全偏振范围内相位误差始终控制在4°以内，体现了对称干涉臂结构对偏振相关相位误差的显著抑制效果。

图7(d-f)中的偏振角度表示测试光与V光夹角，90°时即为H光，通过依次在E_LO，E_s端口输入0° (V光)、30°、60°、90° (H光)偏振光，测试不同偏振下的器件相位误差，H光下相位误差−3.37°。针对直流偏置 (圆心偏移)与拟合圆半径小于 1 的现象，结合工艺特性分析可知：同一写入深度下，配对干涉臂受写入次序、相邻波导应力效应、扫描路径微小偏差影响，导致的差分输出端口分光比不对称性和传输损耗不对称性是引入直流偏置的核心来源。而耦合器分光比偏差、制造误差、相位误差以及测试过程中本振光与信号光的功率差，是导致拟合圆模长小于 1 的主要原因。

4.2　器件传输矩阵与标定补偿

90°光混频器的实际光学混频性能，由幅度失衡、相位误差、通道串扰共同决定，其输入输出关系可通过传输矩阵完整描述。传输矩阵对应的数字标定矩阵^[39-41]可实现非理想特性的全补偿，验证器件在实际相干接收系统中的可用性。对于实际制备的器件，需考虑三大非理想因素：1) I/Q两路的幅度失衡g (定义为

$ g={A}_{\text{Q}}/{A}_{\text{I}} $

，

$ {A}_{\text{I}} $

、

$ {A}_{\text{Q}} $

分别为I、Q两路的输出幅度)；2) I/Q两路的正交相位误差

$ \mathit{\mathrm{\Delta}}\varphi $

；3) I、Q两臂间的串扰

$ \varepsilon $

。对于本文制备的三维正交结构器件，实测I、Q两臂串扰低于−72 dB，对应串扰系数

$ \varepsilon \lt 2.5\times {10}^{-4} $

，对解调性能的影响在本文的测试条件下可忽略不计，传输矩阵可简化为仅包含幅度失衡与相位误差的形式：

$ \boldsymbol{M}_{\mathrm{IQ}}=\left[\begin{array}{cc}1 & 0 \\g \sin \Delta \phi & g \cos \Delta \phi\end{array}\right]\;. $

(13)

数字标定的核心逻辑是：找到一个标定矩阵

$ {\boldsymbol{M}}_{\text{calib}} $

，使其与实际传输矩阵

$ {\boldsymbol{M}}_{\text{IQ}} $

相乘后得到单位矩阵，从而将实际输出还原为理想的 I、Q 分量。因此标定矩阵为实际传输矩阵的逆矩阵。

基于0°、30°、60°、90°四组正交偏振输入下采集的IQ差分输出实测数据，先对每组数据完成独立最大幅值归一化与几何中心去直流预处理采用无梯度Nelder-Mead单纯形法^[42]进行全局非线性优化。最终求解得到器件全局统一的非理想传输矩阵

$ {\boldsymbol{M}}_{\text{IQ}} $

，经计算得到器件标定矩阵：

$ \boldsymbol{M}_{\text {calib }}=\left[\begin{array}{ll}1.230 & 0.000 \\0.034 & 1.081\end{array}\right] \;. $

(14)

为验证器件的工程应用潜力，本文基于该单一固定数字标定矩阵，对器件的全偏振非理想特性进行统一补偿。标定前后典型偏振态的核心性能指标对比如下：0° 偏振下残余相位误差为1.5°，幅度失衡为 0.90；30° 偏振下残余相位误差为0.87°，幅度失衡为 0.95；60° 偏振下残余相位误差为−1.99°，幅度失衡为 1.10；90° 偏振下残余相位误差为−1.67°，幅度失衡为 1.08。

经单一标定矩阵补偿后，全偏振范围内器件的残余相位误差均降至2°以内，幅度失衡控制在1±10%以内。典型偏振态下标定后的李萨如椭圆拟合结果如图8 所示，全偏振范围内的拟合椭圆均收敛为与理想单位圆几乎完全重合的正圆，无明显的旋转与轴长偏差，直观验证了该数字标定方法可有效补偿器件的幅度失衡与相位误差，仅需单次校准即可实现全偏振范围内接近理想的正交解调性能。

5　结　论

收起

本文针对飞秒激光直写技术的工艺特性，基于耦合模理论建立了三维正交90°光混频器的完整理论框架，推导了三维结构的串扰抑制机理，明确了定向耦合器固有正交相移的偏振不敏感性，以及全对称干涉臂结构对偏振相关相位误差的抑制机理，设计并制备了一种基于定向耦合器分束与相移的三维正交结构1550 nm波段90°光混频器。该器件采用不同写入深度的三维正交波导排布，从根本上抑制了IQ两臂的耦合串扰；采用定向耦合器作为核心分束与相移单元，实现了全偏振范围内的低相位误差。

测试结果表明，该器件芯片插入损耗仅2.3 dB，IQ两臂串扰低于−72 dB，器件整体尺寸仅为25 mm × 90 μm，结构高度紧凑；在V光输入下，分光幅度失衡控制在0.95~1.05区间，相位误差低至−0.35°，H光输入下相位误差−3.37°，综合性能处于飞秒激光直写90°光混频器的领先水平，其在高速相干光通信、三维集成光子系统以及量子光学等方向具有一定应用潜力。

在相干光通信领域，90°光混频器是QPSK、QAM等相干接收系统中的核心器件。低串扰有助于提高相干接收系统的解调精度与信噪比，降低误差矢量幅度 (error vector magnitude‌‌, EVM)，适用于高速光纤通信、数据中心互联，以及片上相干接收前端等应用场景。

此外，飞秒激光直写技术具备真三维加工能力，可在透明介质内部实现多层波导互连与复杂空间光路构建，该器件结构也适用于高密度三维光子集成系统。相比传统二维PLC或SOI 结构，三维正交排布在降低串扰和提高结构紧凑型方面具有明显优势，未来有望应用于大规模集成相干接收阵列、多通道光信号处理以及片上光互连系统。在量子光学领域，低串扰和稳定相位控制对于量子干涉与量子态保真度具有重要意义。本文器件采用对称干涉结构与三维空间隔离设计，可为片上量子干涉、量子态测量，以及连续变量量子探测等提供一种潜在实现方案。

综上所述，器件为高速相干光通信系统提供了一种高性能、可快速原型化的三维集成方案，同时也为飞秒激光直写技术在三维集成光子信号处理、量子光学等领域的应用提供了新的设计思路。

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doi: 10.12086/oee.2026.260117

接收时间：2026-04-30
首发时间：2026-10-22
出版时间：2026-07-25

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收稿日期：2026-04-30
修回日期：2026-07-09
录用日期：2026-07-09

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吉林大学电子科学与工程学院，吉林长春 130012

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魏伟华，weiwh@jlu.edu.cn

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科 Family	属数 Number of genus	种数 Number of species	占总种数比例 Percentage of total species (%)	属 Genus	种数 Number of species	占总种数比例 Percentage of total species (%)
鹅膏菌科Amanitaceae	2	11	5.26	鹅膏菌属 Amanita	10	4.78
小菇科 Mycenaceae	2	12	5.74	丝盖伞属 Inocybe	5	2.39
多孔菌科 Polyporaceae	8	14	6.70	蜡蘑属 Laccaria	5	2.39
红菇科 Russulaceae	3	23	11.00	小皮伞属 Marasmius	6	2.87
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