光电工程

Ref.	Variable	Optical parameter controlled	Mechanism	Function
[40]	L	φ_xLP	Resonant	One-dimension beam deflection and focusing, orbital angular momentum lasing
[49]	L, W	φ_xLP	Resonant	Two-dimension focusing and hologram generation
[50]	θ	φ_xLCP or φ_xRCP	Geometric	Fousing, vortex beams, and hologram generation
[59]	L, d, θ	φ_xLCP and φ_xRCP	Topological, geometric	Decoupling of orthogonally circularly polarized radiation field and hologram generation
[31]	δ_x, δ_y	φ_xLP, φ_yLP, φ_-xLP, φ_-yLP	Detour	Four holograms generation, including 3D holography and dynamical holography
[53]	δ_x	A_xLP, A_yLP	Detour	High-resolution grayscale image display

Ref.	Variable	Optical parameter controlled	Mechanism	Function
[40]	L	φ_xLP	Resonant	One-dimension beam deflection and focusing, orbital angular momentum lasing
[49]	L, W	φ_xLP	Resonant	Two-dimension focusing and hologram generation
[50]	θ	φ_xLCP or φ_xRCP	Geometric	Fousing, vortex beams, and hologram generation
[59]	L, d, θ	φ_xLCP and φ_xRCP	Topological, geometric	Decoupling of orthogonally circularly polarized radiation field and hologram generation
[31]	δ_x, δ_y	φ_xLP, φ_yLP, φ_-xLP, φ_-yLP	Detour	Four holograms generation, including 3D holography and dynamical holography
[53]	δ_x	A_xLP, A_yLP	Detour	High-resolution grayscale image display

Ref.	Variable	Optical parameter controlled	Optical degrees of freedom	Function
[54]	δ_x, δ_y	A, φ	2	Semi-transparent screen display and AR holographic display
[55]	δ_x, θ	φ, ψ, χ	3	Nine hologram generation and dynamical holography
[30]	θ	l, φ, ψ, χ	4	Higher-order Poincaré sphere beam generation
[41]	L, W, θ	A, φ, ψ, χ	4	Vortex beams and Poincaré sphere beam generation, also including a four-image hologram display

Ref.	Variable	Optical parameter controlled	Optical degrees of freedom	Function
[54]	δ_x, δ_y	A, φ	2	Semi-transparent screen display and AR holographic display
[55]	δ_x, θ	φ, ψ, χ	3	Nine hologram generation and dynamical holography
[30]	θ	l, φ, ψ, χ	4	Higher-order Poincaré sphere beam generation
[41]	L, W, θ	A, φ, ψ, χ	4	Vortex beams and Poincaré sphere beam generation, also including a four-image hologram display

Ref.	Variable	Multiplexing dimension	Function channel number	Function
[57]	r	Direction	2	Two focal points (two dimension)
[59]	L, W	Mode	2	Two focal points (one dimension)
[61]	L, H	Wavelength	3	Full-color holography and dynamic holography
[60]	θ	Direction	4	Fousing and vortex beam generation
[58]	δ_x, δ_y	Direction	6	Six holographic images display
[45]	L, W, θ, δ_x, δ_y	Direction	8	Four nano-printing and four holographic images

Ref.	Variable	Multiplexing dimension	Function channel number	Function
[57]	r	Direction	2	Two focal points (two dimension)
[59]	L, W	Mode	2	Two focal points (one dimension)
[61]	L, H	Wavelength	3	Full-color holography and dynamic holography
[60]	θ	Direction	4	Fousing and vortex beam generation
[58]	δ_x, δ_y	Direction	6	Six holographic images display
[45]	L, W, θ, δ_x, δ_y	Direction	8	Four nano-printing and four holographic images

Ref.	Variable	Multiplexing dimension	Function channel number	Function
[66]	θ, δ_x, δ_y	Wavelength, direction, polarization	3	Three RGB-coloring AR holograms
[63]	L, W, δ_x, δ_y	Direction, mode	4	Four holographic images display, including 3D holography
[67]	θ, δ_x, δ_y	Wavelength, direction, polarization	8	Eight-channel multidimensional encrypted holograms
[32]	θ, δ_x, δ_y	Wavelength, direction, polarization, diffraction order	16	Sixteen-channel multidimensional encrypted holograms
[65]	δ_x, δ_y	Wavelength, direction	36	Thirty-six distinct holograms generation
[68]	δ_x, δ_y	Spatial coordinate	160	One hundred and sixty-channel multidimensional encrypted holograms

Ref.	Variable	Multiplexing dimension	Function channel number	Function
[66]	θ, δ_x, δ_y	Wavelength, direction, polarization	3	Three RGB-coloring AR holograms
[63]	L, W, δ_x, δ_y	Direction, mode	4	Four holographic images display, including 3D holography
[67]	θ, δ_x, δ_y	Wavelength, direction, polarization	8	Eight-channel multidimensional encrypted holograms
[32]	θ, δ_x, δ_y	Wavelength, direction, polarization, diffraction order	16	Sixteen-channel multidimensional encrypted holograms
[65]	δ_x, δ_y	Wavelength, direction	36	Thirty-six distinct holograms generation
[68]	δ_x, δ_y	Spatial coordinate	160	One hundred and sixty-channel multidimensional encrypted holograms

Ref.	Combination method	Advantages	Disadvantages	Optical parameter controlled (optimum)
[44]	Metasurface integrated above the grating coupler	Simple design	Narrow bandwidth, single polarization, and low SEM	φ
[47]	Joint design of metasurface and grating coupler	Large surface emission aperture, compact form	Low radiation efficiency	φ
[55]	Metasurface integrated above the waveguide	Flexible control	Low radiation efficiency and low SEM	φ, ψ, χ
[41]	Joint design of metasurface and waveguide	Flexible control, compact form, and large surface emission aperture	Difficult design	A, φ, ψ, χ

Ref.	Combination method	Advantages	Disadvantages	Optical parameter controlled (optimum)
[44]	Metasurface integrated above the grating coupler	Simple design	Narrow bandwidth, single polarization, and low SEM	φ
[47]	Joint design of metasurface and grating coupler	Large surface emission aperture, compact form	Low radiation efficiency	φ
[55]	Metasurface integrated above the waveguide	Flexible control	Low radiation efficiency and low SEM	φ, ψ, χ
[41]	Joint design of metasurface and waveguide	Flexible control, compact form, and large surface emission aperture	Difficult design	A, φ, ψ, χ

导模辐射调控的片上超表面：进展与挑战

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杨璐 , 邹毅 ^*^,^*

光电工程 | 综述 2026,53(2): 250230-1

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光电工程 |综述 2026 , 53 (2) : 250230 -1

导模辐射调控的片上超表面：进展与挑战

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杨璐, 邹毅^*^,^*

作者信息

上海科技大学信息科学与技术学院，上海 201210

通讯作者:

邹毅，zouyi@shanghaitech.edu.cn

作者简介:

作者贡献

杨璐：文献调研、整理、归纳，论文写作；邹毅：指导论文选题、论文修改。

杨璐，女，硕士研究生，主要从事超表面、集成光子学领域的研究。E-mail：yanglu2024@shanghaitech.edu.cn yanglu2024@shanghaitech.edu.cn

邹毅，男，博士，研究员，研究领域为集成光子学、纳米光子学。E-mail：zouyi@shanghaitech.edu.cn zouyi@shanghaitech.edu.cn

On-chip metasurfaces based on guided-mode radiation control: progress and challenges

Lu Yang, Yi Zou

Affiliations

School of Information Science and Technology, Shanghai Tech University, Shanghai 201210, China

Corresponding Author:

zouyi@shanghaitech.edu.cn

出版时间: 2026-02-25 doi: 10.12086/oee.2026.250230

文章导航

摘要

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片上集成光子学通过将复杂光学功能高度集成于微纳芯片，为高速、大容量、低损耗的光信息传输与处理提供了革新性平台。作为片上系统的核心单元，波导结构虽能有效实现光信号的片内传输与操控，但如何高效地将导波转化为可传递至远场的自由空间光场，并精准调控该空间光场的光学特性，仍是该领域亟待解决的关键难题。本文从导模辐射机理出发，系统综述了基于该原理的多种片上超表面实现方案，重点探讨了此类片上超表面在辐射光场的多自由度调控(包括导模辐射的振幅、相位、偏振态)，以及面向空间、模式、偏振与频率等多维度的多通道复杂波前独立操控方面的研究进展。最后，总结了该领域当前面临的挑战并对未来发展方向进行了展望。

关键词

集成光学 / 导模辐射 / 超表面 / 光场调控

Abstract

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Significance

Photonics integrated circuits (PICs) have emerged as a foundational platform for next-generation optical information transmission and processing, owing to their high speed, broad bandwidth, excellent scalability, and low propagation loss. These advantages stem from the unique capability of PICs to densely integrate diverse and complex optical functionalities onto micro- and nanoscale chips. However, the efficient conversion of guided optical modes into free-space radiation propagating into the far field, together with precise and flexible manipulation of multiple optical degrees of freedom (DoFs)—including amplitude, phase, state of polarization (SoP), and orbital angular momentum (OAM)—remains a critical challenge in the field. Addressing this challenge is essential for unlocking the full potential of integrated photonic systems. In this context, the present review provides significant academic and technological value by systematically summarizing recent advances in on-chip metasurfaces for guided-mode radiation control. It fills an important gap in the existing literature by consolidating both theoretical frameworks and experimental demonstrations, while offering a comprehensive roadmap for overcoming key technical bottlenecks. By doing so, this review accelerates the translation of innovative metasurface concepts into practical PIC applications and supports the development of intelligent, high-performance optical systems.

Progress

Over the past decade, integration strategies for metasurface–waveguide architectures have evolved substantially. Early implementations typically involved placing a metasurface layer atop a conventional grating coupler. As demands for miniaturization and functional density increased, more advanced approaches emerged, most notably the direct patterning of high-aspect-ratio, high-refractive-index artificial nanostructures (meta-atoms) on waveguide surfaces. This strategy enables direct modulation of the evanescent field of guided modes, thereby facilitating comprehensive control over multiple DoFs of the radiated optical field. Recent progress in PICs and nanophotonics has further inspired innovative design paradigms, among which two representative approaches have attracted particular attention: co-designed metasurface–grating coupler hybrids and leaky-wave metasurfaces. The former offers a compact and fabrication-friendly solution, often realizable via a single etching step, in which the metasurface–grating coupler simultaneously enables efficient radiation and wavefront shaping. The latter exploits intentional symmetry breaking in photonic crystal slab waveguides to induce controlled leaky-wave radiation. Notably, both strategies can realize large surface-emitting apertures without requiring the integration of high-aspect-ratio, high-index nanostructures, making them especially attractive for scalable implementations. As a result, these two approaches are expected to play a central role in advancing the field.

Substantial progress has been achieved in manipulating guided-mode radiation using on-chip metasurfaces. Several well-established mechanisms have been proposed to control the phase of radiated wavefronts, including: 1) detour phase, determined by the lateral displacement of a meta-atom within a unit cell; 2) geometric (Pancharatnam–Berry) phase, governed by the in-plane rotation of anisotropic meta-atoms; 3) propagation phase, set by the geometric dimensions of the meta-atoms; and 4) resonant phase, arising from engineered resonances that provide strong and dispersive phase responses. Beyond phase-only modulation, interference among multiple artificial nanostructures within a unit cell enables simultaneous control of amplitude and SoP, thereby allowing full multidimensional manipulation of optical DoFs. By leveraging these mechanisms, on-chip metasurfaces have demonstrated a broad range of functionalities, including beam steering, focusing, vortex beam generation, and holographic projection. Furthermore, the inherent advantages of the on-chip platform—such as multi-port, multi-mode, and multi-wavelength excitation—enable decoupled and independent control of optical DoFs with minimal crosstalk, paving the way for advanced functional multiplexing in integrated photonic systems.

Conclusions and Prospects

Despite these advances, several key challenges remain. First, the radiation efficiency of guided modes must be further improved. Future studies are expected to explore novel radiation-enhancement mechanisms, such as resonant architectures and multilayer composite structures, to increase energy conversion efficiency. Second, modulation precision is still constrained by current micro- and nanofabrication limitations. Advances in stacked multilayer metasurfaces, three-dimensional (3D) nanostructures, and high-precision, multi-material co-fabrication could significantly expand the available design space and improve device fidelity. Third, dynamic modulation capabilities remain limited. Most existing on-chip metasurfaces are passive and rely on static geometries, preventing adaptive responses to external stimuli such as temperature, optical intensity, or applied voltage. Future efforts may enable non-volatile reconfigurability through phase-change materials, achieve ultrafast modulation using the optoelectronic properties of two-dimensional (2D) materials, or expand modulation dimensionality via photochromic effects. Finally, current on-chip metasurfaces often lack sufficient system-level integration. Future research should therefore focus on the co-integration of metasurfaces with multi-functional photonic modules to realize intelligent, system-level optical field manipulation.

In conclusion, pioneering work on on-chip metasurfaces has significantly advanced the understanding of guided-mode radiation control and driven innovation in PICs and nanophotonics. With continued progress in nanofabrication technologies and electromagnetic modeling, on-chip metasurfaces are expected to achieve further performance improvements. As a result, metasurface-enabled control of guided-mode radiation is poised to become a cornerstone technology for next-generation PICs, with far-reaching impact across high-capacity optical communications, imaging systems, optical security, and immersive AR/VR applications.

Key words

integtated photonics / guided-mode radiation / metasurface / optical field manipulation

引用本文

杨璐, 邹毅. 导模辐射调控的片上超表面：进展与挑战. 光电工程, 2026 , 53 (2) : 250230 -1 . DOI: 10.12086/oee.2026.250230

Lu Yang, Yi Zou. On-chip metasurfaces based on guided-mode radiation control: progress and challenges[J]. Opto-Electronic Engineering, 2026 , 53 (2) : 250230 -1 . DOI: 10.12086/oee.2026.250230

正文

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1　引　言

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光场调控作为光学和纳米光子学的核心研究方向，旨在通过主动操控光的振幅、相位、偏振态及轨道角动量等自由度，实现光场在时空特性、频谱特征及量子态的精确控制。传统光学器件受限于衍射极限与材料特性，存在体积大、质量重、功能单一和调控自由度有限等挑战，难以满足新一代光子器件对小型化和多功能化的迫切需求。相比之下，超表面作为一类由亚波长尺度人造微结构组成的光学界面，通过精细设计人造微结构的几何形状和空间排布，能够实现对光场振幅^[1-3]、相位^[4-5]、偏振^[6]、色散特性^[7-9]等多维参量的灵活调控。这种突破衍射极限的光场调控能力，克服了传统光学器件的局限，丰富和革新了光场调控的手段。2011年，哈佛大学Capasso团队开创性地提出了广义的斯涅尔定律，奠定了该领域的理论基础^[10]。近年来，超表面的器件类型层出不穷，包括传感器^[11-13]、完美吸收器^[14-16]、超构透镜^[17-20]、非线性超表面^[21-22]、紧凑型光谱仪^[23-24]等，这些器件在通信、成像、增强现实/虚拟现实(augmented reality, AR; virtual reality, VR)显示等领域展现出巨大的应用潜力。

与此同时，随着集成光子学的快速发展，片上系统凭借高速度、宽带宽、低损耗、可拓展性与可靠性展现出独特的优势，成为光信息处理和传输的关键平台。该技术可以将光源、光波导、调制器和探测器等器件集成于单一芯片，实现光信号的激发、传输、处理和探测^[25-27]。其中，光栅耦合器是实现片上系统与自由空间信息交互的关键环节。然而，传统的光栅耦合器^[28-29]通常仅能实现导模的定向辐射，其在自由空间与片上系统交互时调控能力有限，难以适配复杂场景的多功能需求。超表面与片上系统的深度融合为解决这一问题提供了突破性思路。通过将超表面结构集成到片上系统，可以精准调控辐射光场，有望实现高容量自由空间光通信^[30]、全息显示^[31]、光学信息加密^[32]等前沿应用，推动新一代集成光子技术的发展。目前，利用超表面实现片上系统近场-远场信息解耦的物理机理主要分为两类：其一是基于表面等离子体激元(surface plasmon polaritons, SPPs)的金属纳米结构路径；金属纳米结构中的自由电子气在光场作用下发生集体振荡，通过设计特定的相位梯度以满足相位匹配，可将局域表面等离子体共振模式转换为辐射模式^[33-39]。其二是基于光波导中导模(guided modes, GMs)的介质结构路径。通过超表面调控波导内传输的导模，借助倏逝波耦合、泄漏波辐射机制等，实现辐射光场的多功能重构^{[31-32,40-41]}。上述两种机理各具优劣：SPPs (金属)体系具有极强的局域能力和优异的亚波长特性，能实现高效的辐射。但是，金属在光学波段下的欧姆损耗，导致其传输距离受限。例如：在1550 nm波段下，基于Johnson和Christy光学常数计算的银膜表面等离子体传播距离约为400 µm，采用Palik数据时约为70 µm^[42]。而波导(介质)体系具有低损耗，长距离传输的特点，但却存在亚波长性不足、辐射能力偏弱的问题。对于片上集成系统，导波体系是主流和首选方案。原因主要有：1) 低损耗的导波特性是片上系统的核心需求；2) 基于波导体系的各种无源和有源器件已经发展十分成熟，能实现更加复杂的系统；3) 虽然波导体系无法像SPPs那样能将光场压缩到深亚波长尺度，但Si等高折射率材料能将光场束缚在核心区域内，并通过精细设计的亚波长结构实现高效的片上器件。因此，基于介质光波导中的导模激励构建片上超表面凭借低损耗、高集成度、成熟度的显著优势，已成为当前研究的主流方向。但仍值得一提的是，目前SPPs体系在微波和太赫兹波段取得了一系列进展。Li等^[37]提出了一种基于正交传播SPPs面内场干涉的偏振发生器，该器件通过在特定位置设计纳米孔阵列，可选择性辐射特定偏振态并实现相位调制，最终在实验中实现了8个聚焦光斑，其光斑分布对应着8种不同偏振态。此外，该团队还提出了对不同传播方向的SPPs的波前调控方案^[34]，能够在自由空间中实现多重全息图像的显示。同时，通过调整器件中纳米散射体的取向，可进一步对辐射光场的偏振态进行精准调整。Pan等^[33]提出了基于几何相位调控表面波的策略，将入射表面波解耦为振幅和相位均定制化的左旋圆或右旋圆极化传播波，并将其辐射至远场。该方案在微波段经实验验证，实现了单向辐射、聚焦、涡旋光束及全息图等功能。此外，Li等^[43]首次设计了一类由单向表面磁等离激元(unidirectional surface magnetoplasmons, USMPs)驱动的超表面，凭借USMPs独特的色散特性实现任意波前调控，该超表面最终展示出3D贝塞尔光束、可控涡旋光束、亚衍射聚焦等功能。不仅如此，该团队通过设计由两组特定取向的人工微结构，能生成特定自旋的圆偏振远场光束，并通过干涉效应形成目标矢量光束^[35]。实验证明该超表面能生成纵向偏振变化的贝塞尔光束，为微观粒子操控、超分辨等领域的应用奠定了基础。

而本文聚焦于导模辐射调控的片上超表面的研究，首先阐述了导模辐射的基本原理，继而介绍了多种片上超表面的实现方案，重点回顾多自由度调控及通道复用的技术突破，最后探讨该领域的挑战与未来发展趋势。

2　片上导模辐射的基本原理

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随着电磁技术的快速发展，超表面技术已经成为灵活操控波前的重要手段。如图1(a)所示，超表面不仅可以精准控制光束的偏转和聚焦^[44]，还能够灵活操控光场的相位分布，进而产生携带轨道角动量的涡旋光束^[45]等多维度光波操控。此外，超表面能高效编码和再现复杂的光场信息，为实现高分辨率全息显示^[46]等功能提供了新路径。

不仅自由空间超表面能够实现上述功能，片上超表面同样具备操控复杂导模辐射波前的能力，见图1(b)。然而，片上导模的平面波矢远大于自由空间辐射场的波矢，二者因显著的波矢失配而难以直接耦合。所以，实现片上导模与辐射场的高效耦合，是基于导模辐射场的片上超表面的首要挑战。传统解决方案主要是依靠衍射光栅提供的倒格矢实现波矢补偿。此类器件的工作物理基础为布拉格衍射效应：通过设计周期性结构，使光栅的倒格矢与导波的传播常数满足矢量匹配条件，从而实现导模能量向自由空间辐射能量的高效耦合。波矢匹配方程表示为

$ {k}_{0}\mathrm{sin}\theta =\beta +m\frac{2{{\text{π}} }}{\varLambda } \;, $

(1)

式中：

$ {k}_{0} $

是光场在自由空间的总波矢大小；

$ \theta $

是导模辐射角度；

$ \beta $

是导波的本征波矢；m是衍射级次；

$ \varLambda $

是光栅周期。由式(1)可知，在指定导模辐射场的某一阶衍射级次的情况下，通过改变光栅周期

$ \varLambda $

就能调控导模辐射方向

$ \theta $

。值得注意的是，依据电磁互易性原理，式(1)同样适用于自由空间电磁波向片上导模的耦合过程，此过程中

$ \theta $

表示的是自由空间光的入射角。

但是，衍射光栅耦合器存在不少固有缺陷。其一，模式干扰与能量损耗问题突出。周期性结构容易激发多阶衍射模式，多余的衍射级次不仅会造成能量浪费，还会引入模式串扰。其二，角度和波长适配范围较窄。布拉格衍射的相位匹配条件对入射角度和波长有着严格要求，难以满足宽角度辐射和多波长兼容的需求。其三，波前调控能力单一。传统光栅的辐射角度由入射角和周期共同决定，一旦结构确定后，辐射方向便固定不变，无法实现光束偏转、聚焦等复杂的调控功能。

近年来，科研人员提出了一种调控导模辐射场的新策略：片上超表面。与衍射光栅方案不同，该方法在亚波长尺度设计周期性排列的人工微结构，从而构建出具有特定相位梯度的超表面。根据动量匹配原理，这种相位梯度能补偿上述提到的波矢失配。这种方案不仅能优化导模辐射的过程，同样在自由空间光到片上导模的耦合中展现出突破性优势。一些研究进展介绍如下：Zhang等^[47]设计并实现了自旋选择、波长解复用的片上超构表面耦合器。Meng等^[48]基于几何相位和传输相位实现了偏振、波长及模式选择的高效耦合器。此外，Wang等^[49]设计的太赫兹超表面，不仅能高效激发SPPs形成表面波，还能对波前进行调控。该团队还将这一工作拓展到近红外波段，实测结果显示其耦合效率最高可达51%^[50]。

如图2所示，片上超表面提取的导模辐射波相位由导波传播的相位积累，即迂回相位(假设波导沿x轴正向传输)和由每个人工微结构引起的空间相位突变

$ \Delta \varphi \left(x\right) $

(传播相位、几何相位或共振相位)两部分组成。因此，辐射波沿x方向的相位分布可以表示为式(2)，由式(2)可以推导出辐射光场沿x方向的动量表达式，可参见式(3)。

$ \varphi \left(x\right)=\beta x+\Delta \varphi \left(x\right) \;, $

(2)

$ {k}_{{x}}=\beta +\partial \Delta \varphi \left(x\right)/\partial x \;, $

(3)

式中：

$ k\mathit{_{\mathrm{\mathit{x}}}} $

表示辐射光场的水平方向(

$ {x} $

轴正向)波矢大小；

$ \xi =\partial \Delta \varphi \left(x\right)/\partial x $

，表示相位梯度。如果

$ \xi $

为常数，则辐射光束的出射夹角可定义为

$ \theta=\mathrm{arcsin}(k_{x}/k_0) $

。由此可知，改变超表面的相位梯度，可以实现导模以预设角度的定向辐射。这种基于超表面的片上导模提取技术，能有效克服传统衍射光栅存在的问题。此外，与自由空间超表面相比，片上超表面因需满足导模与辐射场之间的动量匹配条件，可有效抑制零级衍射，进而提升光场调控精度。因此，这一技术为集成光子器件的高性能光场调控提供了新范式。

3　片上超表面的方案

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实现导模向自由空间的高效辐射，是构建片上系统与自由空间光学互联的关键，对光通信、光探测及成像系统等领域的发展至关重要。在现有技术中，衍射光栅耦合器因其成熟的设计方案和可靠的性能表现，已成为广泛采用的耦合解决手段之一^[51]。正如第二节所介绍的，传统的光栅耦合器通常仅能实现导模的定向辐射，对辐射场的调控能力有限。为了弥补传统光栅耦合器的局限，人们提出了多种实现片上超表面的方案：1) 早期研究者提出将光栅耦合器与超表面相互对齐但是各自独立的集成方案^[52]。如图3(a)所示，通过该方法既能实现导模的高效辐射，还能灵活调控辐射场的波前。但该方案受限于采用的光栅耦合器的带宽和偏振相关性，难以实现宽带、偏振复用的辐射和调控。2) 目前大多数研究聚焦于利用超表面调控导模倏逝场的光学特性^{[31,40,53-54]}。如图3(b)所示，在波导结构中，尽管光波被限制在芯层中传输，但由于电磁波具有波动性，其场的分布会延伸到周围的介质中，形成倏逝场。因此可以通过在波导层上表面集成超表面结构实现对导模倏逝场的精准操控，其调控的强度可以通过控制超表面和波导芯层的距离来控制。3) 最近，一种集成度更高和更为简便的设计方案被提出。如图3(c)所示，该工作将光栅-超表面结构进行联合设计，为片上导模辐射场的调控提供新范式^[55]。需要指出的是，上述三种方式均属于局域态调控范畴，其人工微结构作为独立的工作单元发挥作用。4) 与前面提到的局域调控不同，图3(d)展示了基于连续体束缚态(bound states in the continuum, BIC)的非局域调控：通过精准打破光子晶体平板波导的空间对称性，可以实现导模实部或虚部的选择性耦合，从而在单一器件中同步调控泄漏模的振幅、相位、偏振椭圆率及取向角等多维光学参量^[41,56]。这种调控方式，打破了“单元结构-相位”一一对应的关联效应，能实现更灵活的波前整形。方案三和方案四不再需要集成高深宽的人工微结构，并且能够实现大的表面发射孔径。因此，后续工作将更多地依赖这两种方式，推动超表面与片上系统的结合。

4　多自由度调控

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片上超表面凭借超薄、易集成和高灵活性的特点，可以显著推动光子器件的小型化、多功能化与集成化，正在成为集成光子学和下一代光信息处理的重要技术。本小节将梳理近年来在调控导模辐射场振幅、相位及偏振态等方面的片上超表面的最新进展。值得注意的是，下文的参量调控指的是器件输出的参量，如相位、偏振态等。

4.1　基于导模辐射场单一参量调控的片上超表面

在光场调控体系中，相位调控决定光的波前形态，振幅调控丰富输出光强分布，偏振态调控则是实现多重信息处理与高阶应用的关键。三者相辅相成，共同构成了操控复杂光场的核心要素，为超分辨成像、光学信息加密、大容量光通信、微观粒子操控等前沿领域发展奠定了坚实基础。在相位调控领域中，如图4(a)所示，Guo等^[40]率先提出在Si基波导上集成金属-介质-金属(metal-insulator-metal, MIM)纳米天线阵列，通过调节纳米天线的几何参数，实现了0~2

$ {\text{π}} $

的共振相位调控，并实验验证了导模辐射场的定向辐射和聚焦功能。值得一提的是，该团队将此结构集成至InGaAsP/InP微环谐振器系统，成功打破了回音壁模式 (whispering gallery modes, WGMs)中顺时针(clockwise, CW)和逆时针(counter-clockwise, CCW)模式的简并，从而可以选择性辐射携带不同拓扑荷数的涡旋光束。该工作为片上集成光子平台和自由空间平台实现对光的完全控制提供一条可行的途径，有望应用于光通信、遥感、显示等领域。在后续研究中，Ding等^[57]将这些人工微结构的排布从一维拓展到了二维平面，实现了导模辐射场的二维聚焦和全息投影。早期片上超表面的研究主要聚焦于金属纳米结构，旨在利用其对局域电磁场的增强效应。然而，金属材料在可见光及红外波段的固有欧姆损耗严重制约了器件性能。因此，低损耗介质超表面逐渐成为研究热点。如图4(b)所示，Yang等^[31]提出在Si₃N₄波导上集成多晶硅的人造微结构，通过改变人造微结构的位置实现迂回相位的调控，并采用改进的Gerchberg-Saxton (GS)算法优化设计，该工作首次将具有多层切片信息通道编码的3D全息图成功投影在芯片的上方空间。值得注意的是，该团队还提出水浸式调控方案，实现了双通道独立编码全息图的片上实时动态切换。此外，Fang等^[58]提出在LiNbO₃波导上集成多晶硅纳米柱，通过旋转纳米柱引入几何相位的调控，实现了圆偏振辐射波的聚焦、涡旋及全息功能。如图4(c)所示，Yi等^[59]创新地提出一种新型拓扑相位构建的策略，并且结合几何相位能实现正交圆偏振辐射光的解耦，为不同全息图像生成提供独立编码自由度。该工作首次在片上全介质平台构建拓扑奇异点，克服传统拓扑材料所面临的欧姆损耗问题，有望应用于可穿戴AR设备、先进光学显示及光学信息储存等领域。

在振幅调控领域中，早期工作限于二值化图像的近/远场显示^[60-61]。为突破这一限制，研究人员创新地提出基于双重人工微结构的干涉调控策略。如图4(d)所示，Shi等^[62]通过在纳米尺度下精准调控硅柱间的相对位移，利用其干涉效应实现了辐射光场振幅的连续调控，在可见光范围内展示了片上超表面实现高分辨率、高信噪比、大动态范围的连续灰度纳米印刷显示功能，有望应用于光学信息储存。相关片上超表面实现导模辐射场单一参量调控的工作如表1所示，其中： L, W, d为人工微结构的几何尺寸参数；θ为人工微结构的面内旋转角度；δ为人工微结构在一个周期内所处的位置；A为振幅，φ为相位。

4.2　基于导模辐射场多参量协同调控的片上超表面

片上超表面不仅能够对辐射光场的单一物理参量进行调控，还能实现对多个物理参量的联合调控，在光场调控和多功能器件集成等方面展现出巨大的应用潜力。

Shi等^[63]率先实现了对辐射场振幅与相位的协同调控。如图5(a)所示，研究人员通过精准设计集成于Si₃N₄波导上硅柱的空间排布，利用硅柱单元之间的近场干涉效应，实现了导模辐射场散射强度的局域调控，进而首次构建了多通道复用半透明屏幕显示与AR全息投影的同步工作系统，在新一代可穿戴式AR设备展现出巨大潜力。类似地，如图5(b)所示，Shi等^[64]还将9种偏振态的基本单元交错排布，通过独立编码每一种偏振态的相位信息，实现了偏振复用的多通道全息图像显示。进一步地，该团队通过在超表面上方集成电驱动的液晶层，可以动态调控输出偏振态，突破了传统静态全息的限制，实现了片上实时切换的全息投影系统。利用相同的原理，该团队进一步设计出一种片上超表面。该超表面能实现沿传播方向具备定制偏振态的任意光轨迹编码，有望应用于超分辨、光镊及光刻技术中^[65]。Ji等^[30]在LiNbO₃波导上集成双硅柱超表面结构，成功将导模提取到自由空间，同时生成两个正交圆偏振光学涡旋，经线性叠加可构造高阶庞加莱球光束。如图5(c)所示，该双硅柱结构通过干涉效应能有效抑制背景噪声，并显著提升辐射光束的信噪比。此外，该器件设计基于双端口波导交叉结构，通过调节两个输入导模的相对振幅和相位差，能够产生任意偏振的矢量涡旋光束。这项工作利用片上超表面首次实现高阶庞加莱光束的生成和操控，为高容量通信开辟了道路。然而，上述工作主要针对光场的单一或少数自由度进行调控。Huang等^[41]提出了将对称破缺型qusai-BIC光子晶体的理念引入到片上超表面的设计中，在泄漏波超表面平台上首次实现对片上辐射场振幅、相位、偏振方位角和椭圆率的四个光学参量独立编码操控。如图5(d)所示，该平台成功实现了矢量光场全息成像和庞加莱光束聚焦。随后，Xu等^[56]利用类似的原理，在微波/毫米波频段构建了漏波超表面天线，实现了微波的全参量调控。文中报道的各片上超表面调控导模辐射场能力如表2所示，其中：ψ为偏振的取向角，χ为偏振的椭圆率，l为拓扑荷数。

5　多维复用技术

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上一节重点展示了片上超表面对导模辐射场光学性质的调控能力。为了进一步满足集成光学领域对多功能应用的需求，实现片上超表面的多功能复用已成为当前该研究领域的重要研究方向。超表面的复用维度，指在固定结构中实现多种功能时所依赖的物理量或参数维度。对于导波驱动的片上超表面，这些维度包括激励源的入射方位、频率、偏振及光场模式等。深入挖掘并融合多维度复用机制，对于提升片上超表面调控导模辐射光场的适应性与功能集成水平具有重要意义。

5.1　单一维度复用技术

片上光子集成系统较之于自由空间光学系统具有独特的优势，其多个方位端口光场激励能力尤为突出。Hsieh等^[66]提出在Si基波导上集成多晶硅纳米柱，通过控制导波的激发方向，实现辐射场的聚焦光斑在两个位置实现精准切换。这一突破性进展得益于片上超表面特有的迂回相位调控机理，该机理天然支持对两个正交入射方向辐射光场相位的独立调控。Yang等^[31]打破了两个相反方向导波传播的简并性，通过将每个人工微结构沿+x、−x及+y、−y方向的局部位置混合，创建新的编码自由度，实现了四个独立通道复用的全息图像显示。如图6(a)所示，该团队还创新地提出将入射方位角作为新的独立编码自由度，突破正交方向限制，实现了方位角选择的全息显示，为片上光学调控开辟了全新维度。通过结合模拟退火算法优化了各个方位对应的迂回相位，最终实现了多达六个具有独立编码自由度的复用通道^[67]。

除了上述提到的迂回相位，支持传输多种空间分布的光场是片上系统的另一大优势，这为复用技术提供了新的自由度。Xie等^[68]提出利用十字形构型的人工微结构可以独立调控不同传输模式的辐射光场。如图6(b)所示，他们通过精心裁剪十字形纳米柱的臂长，可独立控制横电基模(TE₀₀)和横磁基模(TM₀₀)的相位分布，从而实现基于模式操控的双焦点聚焦。

在复用手段中，偏振维度具备独特优势，即任意两个正交的偏振态之间互不串扰。Deng等^[69]在Ta₂O₅波导上设计了V形纳米天线，V形天线能同时支持电偶极子和磁偶极子的共振，可以独立调控两个正交偏振态辐射光场的相位。之后，Ji等^[53]提出在一个结构单元中排布4个硅柱的策略，并结合迂回相位、传播相位和几何相位的调控机制，打破了琼斯矩阵的对称性和幺正性，首次实现其4个元素的全部解耦及8个通道的独立操控。如图6(c)所示，他们在LiNbO₃平台上集成硅柱结构，成功展示了构成琼斯矩阵的4个元素所对应的4组纳米打印和全息图像投影。

在光与物质相互作用的过程中，色散关系是表征体系光学响应特性的核心物理量。影响色散关系的因素有很多，其中通过调整材料的结构参数是实现色散工程的有效手段之一。因此，通过改变人工微结构的几何参数，可以调节不同波长的提取效率。Li等^[70]开发了一种基于水凝胶波导的片上超表面光学平台，实现湿度驱动的动态多色全息显示。如图6(d)所示，水凝胶基纳米沟槽的形貌随湿度增加而变化，可以通过改变环境的湿度调控沟槽形貌实现不同波长的差异化提取效率，从而动态切换不同波长的全息图像显示，有望应用于下一代可穿戴式AR设备中。此外，该团队还提出了在波导上水平级联超表面的设计策略，通过筛选和优化不同几何尺寸的人工微结构，实现了不同波长导模的选择性提取，进而构建了波分复用系统。在实验中实现可切换的全彩色全息显示功能，有望应用于全彩色AR显示中^[71]。相关单一维度通道复用的器件性能如表3所示。

5.2　复合维度复用技术

随着单个维度的复用通道数目的增加，各个通道之间的串扰也会显著加剧，从而影响器件性能。单一维度的复用数量通常存在一个物理或技术上的上限，在需进一步提升通道容量和增加通道的抗干扰能力情况下，多维度复用技术显得尤为重要。多维度复用是指将上述介绍的几种复用手段结合起来，这样可以极大地增加总通道数，同时有效避免或减轻通道间的干扰问题。

Zhao等^[72]设计了偏振态敏感的十字形纳米天线片上超表面，能独立地调控波导中TE₀/TM₀模式辐射光场的传播相位。同时，结合导波在传播中产生的面内迂回相位，进一步拓展了复用通道数，最终实现了基于双端口(X和Y方向)和双模式(TE₀/TM₀)的四通道复用全息显示。如图7(a)所示，从X和Y向的两个端口分别激发TE₀和TM₀模式，经超表面调控后能生成4幅独立的全息图像。进一步地，Li等^[73]利用迂回相位的调控机理并结合梯度下降算法，实现了四个端口激励的多切面3D全息图像显示，该工作在实验中成功展示了16幅独立的全息图像。在此基础上，如图7(b)所示，Liu等^[74]还引入了不同波长的导波作为激励，最终能产生36张不同的全息图像。类似地，Li等^[54]也提出一种基于导波驱动的片上超表面方案，实现了片外空间的多色3D全息投影。值得注意的是，虽然前述研究均采用片内波导中的导波作为激励，但片上超表面系统同样具备响应自由空间光激励的能力。Shi等^[75]巧妙地结合迂回相位和几何相位的调控机制，首次在单一片上超表面平台实现了对两种不同激励方式的独立操控。如图7(c)所示，他们通过实验验证了具有独立编码自由度的三通道全息图像。随后，Li等^[60]运用类似的原理，实现了6个独立通道的纳米打印和全息图像显示。片上超表面的多维度复用技术不仅可以实现波前调控和全息图像显示，还能为光学信息加密提供有效的技术手段。Wan等^[76]提出了一种基于片上超表面实现多维度加密系统的方法，他们将导波的波长、激励方向及偏振态信息作为密钥，实现了8个通道AR全息投影的信息加密。进一步地，该团队通过解析不同衍射级次所需相位之间的数学关系，将衍射级次作为新的密钥引入加密系统^[32]。该工作拓展了迂回相位的衍射级次复用能力，首次实现了四维全息信息独立编码，在信息编码维度上超越前期工作。如图7(d)所示，Huang等^[77]结合迂回相位和几何相位调控机制，并通过控制人工微结构的色散关系，构建了涵盖波长、激励方向、偏振以及衍射级次四个光学维度的加密系统。最终，在实验中成功展示了16幅高清晰度、低串扰的多维加密全息图像。最近，该团队提出并实验验证了一种3D数据加密立方体存储的方案。该方案将实现菲涅尔衍射区域内的全息空间坐标作为加密密钥，实现了160个空间独立的全息通道，该工作显著增加了全息信息编码的独立通道数目，在3D全息显示、大规模数据加密和光通信安全等领域，均展现出广阔的应用前景。这种基于片上超表面的多维度光学信息加密能有效抑制零级衍射，有望成为下一代信息储存、信息安全及3D全息的可行性方案。文中报道的多通道复用器件性能如表4所示。

6　总结与展望

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本文系统地回顾了基于导模辐射场调控的片上超表面的最新研究进展。首先，阐述了导模从波导中辐射到自由空间的基本原理；接着，详细介绍了四种片上超表面的生成方案；最后汇总了近年来有关片上超表面对导模辐射场的多自由度调控及多维度复用技术的工作。这些研究加速了人们对光场调控的认识，也推动了集成光学和纳米光子学的发展与创新，具有广阔的应用价值前景。表5总结和对比了文中提到的四种集成类型片上超表面的代表性能。

然而，该领域仍然存在一些待解决的问题：1) 导模辐射效率有待提高。目前，片上波导集成介质型人工微结构的设计，从本质上而言可以有效避免欧姆损耗，但其整体辐射效率偏低仍是制约片上光子器件性能进一步提升的重要瓶颈之一。因此，后续工作亟须探索新型辐射增强机理以实现更高效的能量转换效率，如基于共振耦合的能量增强方案，引入多层复合结构等。2) 受微纳加工水平限制调控精度不足。受限于现有微纳制造工艺水平，片上超表面结构大多采用单层设计。单层结构难以充分实现对光场的振幅、相位、偏振等自由度的独立调控，限制了器件在复杂光场操控中的适用性。未来发展方向应包括多层堆叠式超表面、三维纳米结构设计与高精度多材料协同加工工艺的创新，进一步扩展片上超表面的调控尺度和维度。3) 动态调控能力仍存在提升空间。在传统设计中，片上超表面所采用的人工微结构均为固定几何构型，难以对外界信号刺激(如温度、光强、电场等参数)作出实时自适应响应，这种静态结构特性在一定程度限制了器件在动态光场调控、多场景复用等领域的应用拓展。近年来相关领域的研究已取得初步进展：例如，Shi等^[64]通过集成片上超表面和液晶器件，成功开发出动态可调的矢量全息显示系统，为动态偏振与相位调控提供了可行的方案。Liu等^[78]则成功构建出像素化纳米光机电光栅，通过微机电驱动实现片上散射光谱的定制化动态调节。为进一步突破现有技术瓶颈，未来可在借鉴上述进展的基础上，深化功能材料与超表面结构的融合设计，例如：引进相变材料实现非挥发性动态重构，利用二维材料的光电特性构建快速响应调控单元，或者结合光致色变效应拓展调节维度。通过这类多机制协同设计，有望推动片上超表面实现更高效、更灵活的片上辐射光场动态可编程调控。4) 系统级功能开发不足。到目前为止，片上系统往往仅承担了光源的角色，而核心的光场调控功能主要依赖于超表面本身。这种功能分配使得对于光子芯片本身的功能开发相对单一，尚未实现与超表面的深度集成和协同优化。未来研究可朝着实现片上自主光学反馈、自适应调控的方向发展，通过把片上光源、调控、反馈和超表面等多模块集成一体化，最终打造一个具备自主感知与调控能力的高度智能化光场调控系统，进而构建真正集成化、智能化的光场调控系统。

综上所述，基于导模辐射调控的片上超表面展现出了广阔的研究前景。当前，相关研究已经取得了一系列的理论及实验方面的进展。随着纳米制造工艺的成熟，以及新材料的不断涌现，这些理论成果有望从理论验证过渡到工程应用，如：激光雷达、增强现实、光学通信、智能传感和量子计算等领域。未来，片上超表面调控光场技术将成为新一代推动光学信息以及量子通信领域的关键支撑手段。

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2026年第53卷第2期

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doi: 10.12086/oee.2026.250230

接收时间：2025-08-04
首发时间：2026-10-22
出版时间：2026-02-25

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收稿日期：2025-08-04
修回日期：2025-10-02
录用日期：2025-10-09

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上海科技大学信息科学与技术学院，上海 201210

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邹毅，zouyi@shanghaitech.edu.cn

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2种不同金属材料的力学参数

科 Family	属数 Number of genus	种数 Number of species	占总种数比例 Percentage of total species (%)	属 Genus	种数 Number of species	占总种数比例 Percentage of total species (%)
鹅膏菌科Amanitaceae	2	11	5.26	鹅膏菌属 Amanita	10	4.78
小菇科 Mycenaceae	2	12	5.74	丝盖伞属 Inocybe	5	2.39
多孔菌科 Polyporaceae	8	14	6.70	蜡蘑属 Laccaria	5	2.39
红菇科 Russulaceae	3	23	11.00	小皮伞属 Marasmius	6	2.87
				小菇属 Mycena	11	5.26
				光柄菇属 Pluteus	5	2.39
				红菇属 Russula	17	8.13
				栓菌属 Trametes	5	2.39

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Ref.	Variable	Optical parameter controlled	Mechanism	Function
[40]	L	φ_xLP	Resonant	One-dimension beam deflection and focusing, orbital angular momentum lasing
[49]	L, W	φ_xLP	Resonant	Two-dimension focusing and hologram generation
[50]	θ	φ_xLCP or φ_xRCP	Geometric	Fousing, vortex beams, and hologram generation
[59]	L, d, θ	φ_xLCP and φ_xRCP	Topological, geometric	Decoupling of orthogonally circularly polarized radiation field and hologram generation
[31]	δ_x, δ_y	φ_xLP, φ_yLP, φ_-xLP, φ_-yLP	Detour	Four holograms generation, including 3D holography and dynamical holography
[53]	δ_x	A_xLP, A_yLP	Detour	High-resolution grayscale image display

Ref.

Variable

Optical parameter
controlled

Mechanism

Function

[40]

φ_xLP

Resonant

One-dimension beam deflection and focusing, orbital angular momentum lasing

[49]

L, W

φ_xLP

Resonant

Two-dimension focusing and hologram generation

[50]

φ_xLCP or φ_xRCP

Geometric

Fousing, vortex beams, and hologram generation

[59]

L, d, θ

φ_xLCP and φ_xRCP

Topological, geometric

Decoupling of orthogonally circularly polarized radiation field and hologram generation

[31]

δ_x, δ_y

φ_xLP, φ_yLP, φ_-xLP, φ_-yLP

Detour

Four holograms generation, including 3D holography and dynamical holography

[53]

δ_x

A_xLP, A_yLP

Detour

High-resolution grayscale image display

Ref.	Variable	Optical parameter controlled	Optical degrees of freedom	Function
[54]	δ_x, δ_y	A, φ	2	Semi-transparent screen display and AR holographic display
[55]	δ_x, θ	φ, ψ, χ	3	Nine hologram generation and dynamical holography
[30]	θ	l, φ, ψ, χ	4	Higher-order Poincaré sphere beam generation
[41]	L, W, θ	A, φ, ψ, χ	4	Vortex beams and Poincaré sphere beam generation, also including a four-image hologram display

Ref.

Variable

Optical parameter controlled

Optical degrees of freedom

Function

[54]

δ_x, δ_y

A, φ

Semi-transparent screen display and AR holographic display

[55]

δ_x, θ

φ, ψ, χ

Nine hologram generation and dynamical holography

[30]

l, φ, ψ, χ

Higher-order Poincaré sphere beam generation

[41]

L, W, θ

A, φ, ψ, χ

Vortex beams and Poincaré sphere beam generation,
also including a four-image hologram display

Ref.	Variable	Multiplexing dimension	Function channel number	Function
[57]	r	Direction	2	Two focal points (two dimension)
[59]	L, W	Mode	2	Two focal points (one dimension)
[61]	L, H	Wavelength	3	Full-color holography and dynamic holography
[60]	θ	Direction	4	Fousing and vortex beam generation
[58]	δ_x, δ_y	Direction	6	Six holographic images display
[45]	L, W, θ, δ_x, δ_y	Direction	8	Four nano-printing and four holographic images

Ref.

Variable

Multiplexing dimension

Function channel number

Function

[57]

Direction

Two focal points (two dimension)

[59]

L, W

Mode

Two focal points (one dimension)

[61]

L, H

Wavelength

Full-color holography and dynamic holography

[60]

Direction

Fousing and vortex beam generation

[58]

δ_x, δ_y

Direction

Six holographic images display

[45]

L, W, θ, δ_x, δ_y

Direction

Four nano-printing and four holographic images

Ref.	Variable	Multiplexing dimension	Function channel number	Function
[66]	θ, δ_x, δ_y	Wavelength, direction, polarization	3	Three RGB-coloring AR holograms
[63]	L, W, δ_x, δ_y	Direction, mode	4	Four holographic images display, including 3D holography
[67]	θ, δ_x, δ_y	Wavelength, direction, polarization	8	Eight-channel multidimensional encrypted holograms
[32]	θ, δ_x, δ_y	Wavelength, direction, polarization, diffraction order	16	Sixteen-channel multidimensional encrypted holograms
[65]	δ_x, δ_y	Wavelength, direction	36	Thirty-six distinct holograms generation
[68]	δ_x, δ_y	Spatial coordinate	160	One hundred and sixty-channel multidimensional encrypted holograms

Ref.

Variable

Multiplexing dimension

Function channel number

Function

[66]

θ, δ_x, δ_y

Wavelength, direction, polarization

Three RGB-coloring AR holograms

[63]

L, W, δ_x, δ_y

Direction, mode

Four holographic images display, including 3D holography

[67]

θ, δ_x, δ_y

Wavelength, direction, polarization

Eight-channel multidimensional encrypted holograms

[32]

θ, δ_x, δ_y

Wavelength, direction,
polarization, diffraction order

Sixteen-channel multidimensional encrypted holograms

[65]

δ_x, δ_y

Wavelength, direction

Thirty-six distinct holograms generation

[68]

δ_x, δ_y

Spatial coordinate

160

One hundred and sixty-channel multidimensional encrypted holograms

Ref.	Combination method	Advantages	Disadvantages	Optical parameter controlled (optimum)
[44]	Metasurface integrated above the grating coupler	Simple design	Narrow bandwidth, single polarization, and low SEM	φ
[47]	Joint design of metasurface and grating coupler	Large surface emission aperture, compact form	Low radiation efficiency	φ
[55]	Metasurface integrated above the waveguide	Flexible control	Low radiation efficiency and low SEM	φ, ψ, χ
[41]	Joint design of metasurface and waveguide	Flexible control, compact form, and large surface emission aperture	Difficult design	A, φ, ψ, χ

Ref.

Combination method

Advantages

Disadvantages

Optical parameter
controlled (optimum)

[44]

Metasurface integrated above
the grating coupler

Simple design

Narrow bandwidth, single
polarization, and low SEM

[47]

Joint design of metasurface
and grating coupler

Large surface emission
aperture, compact form