Article(id=1315743677654348220, tenantId=1146029695717560320, journalId=1315121910733963395, issueId=1315743622176288781, articleNumber=null, orderNo=null, doi=10.3788/gzxb20265502.0222004, pmid=null, cstr=32255.14.gzxb20265502.0222004, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1756656000000, receivedDateStr=2025-09-01, revisedDate=null, revisedDateStr=null, acceptedDate=1758988800000, acceptedDateStr=2025-09-28, onlineDate=1791627338087, onlineDateStr=2026-10-10, pubDate=1771948800000, pubDateStr=2026-02-25, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1791627338087, onlineIssueDateStr=2026-10-10, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1791627338087, creator=13701087609, updateTime=1791627338087, updator=13701087609, issue=Issue{id=1315743622176288781, tenantId=1146029695717560320, journalId=1315121910733963395, year='2026', volume='55', issue='2', pageStart='1', pageEnd='326', issueExtLink='null', onlineDate='null', pubDate='1771948800000', pubDateStr='2026-02-25', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1791627324861, creator='13701087609', updateTime=1791627390701, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1315743898396381488, tenantId=1146029695717560320, journalId=1315121910733963395, issueId=1315743622176288781, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1315743898396381489, tenantId=1146029695717560320, journalId=1315121910733963395, issueId=1315743622176288781, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=97, endPage=112, ext={EN=ArticleExt(id=1315743677859869117, articleId=1315743677654348220, tenantId=1146029695717560320, journalId=1315121910733963395, language=EN, title=Simulation and Experimental Study on Thermal Field Control Rules for Surface Morphology of Metal Tin Polishing Pads, columnId=1315743623623332133, journalTitle=Acta Photonica Sinica, columnName=Optical Design and Fabrication, runingTitle=null, highlight=null, articleAbstract=

Large-aperture planar optical components are key parts of the optical systems in high-end equipment such as photolithography machines and laser fusion experimental devices. Full-aperture polishing， also known as continuous polishing， is an important processing method for large-aperture planar optical components. The surface conditioning of polishing pads has been a research focus for scholars both domestically and internationally. Existing research results indicate that effective conditioning is one of the primary factor to enhance the processing accuracy of optical components. For polishing pads with a meter-scale diameter， such as 1 200 mm， turning or grinding processes are typically employed to achieve surface conditioning. However， these methods are not only time-consuming but also struggle to achieve high-precision finishing on the pad surface. Efficient and high-precision conditioning of meter-scale polishing pad surfaces has long been a challenge in the optical component polishing process.

This paper proposes a method for surface topography conditioning of tin polishing pads through temperature field control. A composite polishing pad consisting of tin-aluminum-cast iron is constructed with three kinds of thin plates. A thermal field control system for the composite polishing pad is designed to investigate the internal temperature field distribution patterns of the pad under the influence of a controlled thermal field， and a gradient model of the internal temperature field within the composite polishing pad is established. Based on the bimetallic thermal deformation effect， five thermal stress distribution equations are established on the neutral surface of the three-layer composite polishing pad. By setting boundary conditions， a differential equation for thermal stress elastic deformation of the composite pad is established， and a mathematical model for surface thermal deformation of the tin polishing pad with parameter t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} as the variable is obtained through solving the equation.

Using finite element simulation software， a simulation analysis was conducted on the thermal deformation of the composite material polishing pad's surface. The ambient temperature field was set to 20 ℃， with constraints and a controlled thermal field applied to the bottom surface of the composite polishing pad. When the parameter t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} of the controlled thermal field was set between 16 and 19 ℃， the thermal deformation of the polishing pad's surface was simulated， and the contour， peak value， and average value of the thermal deformation were analyzed. The simulation results indicated that when the controlled thermal field parameter t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} was set to 20 ℃， there was no temperature gradient change within the composite polishing pad， and no thermal deformation occurred on its surface. However， when t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} was less than 20 ℃， the composite material polishing pad exhibited an overall concave-shaped thermal deformation， and the magnitude of the thermal deformation became more pronounced as t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} decreased. Experiments were conducted to validate the regulation law of the thermal field on the surface of a tin polishing pad. Ensuring an ambient temperature of 20 ℃ in a constant-temperature workshop， measurement tools such as laser displacement sensors were used to measure the surface of the polishing pad. The deformation law of the polishing pad's surface was examined at parameter t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} values ranging from 16 to 19 ℃. Finally， through nine sets of processing experiments on optical components， the impact of the parameter t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} on the processing results was verified. The experimental and simulation results showed consistency in the trend of thermal deformation of the polishing pad's surface. Moreover， by adjusting the thermal field control parameter t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}， the surface accuracy of the processed optical components was optimized.

Through theoretical analysis， simulation， and experimental verification， the paper draws the following conclusions： 1） A controllable thermal deformation prediction mathematical model for the surface topography of the polishing pad was established based on the multi-metallic thermal deformation effect； 2） A finite element model for thermal field regulation of the polishing pad was developed and experimentally validated. Within the temperature range t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} of 16 ℃ to 19 ℃， the finite element analysis results of thermal deformation of the polishing pad were consistent with the experimental results in terms of their changing trends； 3） The thermal deformation generated by the polishing pad thermal field regulation system is the greatest at t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}=16 ℃， with a maximum deformation of 16.9 μm and an average deformation of 12.5 μm； it is the smallest at t=19 ℃， with a maximum deformation of 2.2 μm and an average deformation of 2 μm； 4） Adjusting the parameter t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}} can enhance the processing accuracy of the component surface. When t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}=18 ℃， the polishing accuracy of planar optical components is the highest. Compared to when t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}=20 ℃ and t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}=16 ℃， the surface accuracy PV value improves by an average of 20%， and the RMS value improves by an average of 15%； 5） According to the comparative analysis， the mathematical model of thermal deformation on the polishing pad surface and the simulation analysis cannot accurately predict specific values of the thermal deformation. Precise model analysis will be conducted in subsequent research.

, authors=Lingyu ZHAO¹, Zecun GAO¹, Huiying ZHAO², authorsList=Lingyu ZHAO, Zecun GAO, Huiying ZHAO, authorCompany=null, correspAuthors=Lingyu ZHAO, authorNote=null, correspAuthorsNote=null, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1315743682058367450, articleId=1315743677654348220, tenantId=1146029695717560320, journalId=1315121910733963395, language=CN, title=金属锡抛光垫表面形貌热场调控规律仿真及实验研究, columnId=1315743623807881511, journalTitle=光子学报, columnName=光学设计与制造, runingTitle=null, highlight=null, articleAbstract=

平面抛光是400 mm × 400 mm口径平面光学元件的重要加工工艺，抛光垫修整是提高连续抛光加工效果的重要手段。抛光垫表面轮廓的高效、高精度的修整一直是行业的一个重要的研究方向和难点。提出一种金属锡抛光垫表面形貌的热场调控方法，在双金属热变形效应的基础上，对三种材料组成的复合抛光盘内部温度场以及热应力进行了分析，构建了金属锡抛光垫的表面形貌热场调控数学模型。利用ANSYS仿真以及实验对金属锡抛光垫表面形貌热场调控进行了验证。研究结果表明，通过调节热场温度参数t_cont使得抛光垫表面形貌产生热变形，当t_cont等于16 ℃时，抛光垫表面形貌的热变形最大，为16.9 μm；当t_cont等于19 ℃时，抛光垫表面的热变形最小，为2.2 μm。最后，进行9组元件抛光工艺实验，当t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}等于18 ℃时，平面光学元件抛光精度最高，面形精度峰谷值平均提升20%，均方根值平均提升15%。

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Thermochimica Acta， 2015， 614：52-58., articleTitle=On the thermal characterization of solids by photoacoustic calorimetry： thermal diffusivity and linear thermal expansion coefficient, refAbstract=null), Reference(id=1315743693492040252, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, doi=null, pmid=null, pmcid=null, year=2019, volume=112, issue=null, pageStart=30, pageEnd=38, url=null, language=null, rfNumber=22, rfOrder=22, authorNames=LI Y, DONG S, YAN X, journalName=Optics and Laser Technology, refType=null, unstructuredReference=LI Y， DONG S， YAN X， et al. Elimination of voids by laser remelting during laser cladding Ni based alloy on gray cast iron［J］. 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Nuclear Materials and Energy， 2018， 16：128-132., articleTitle=Surface morphology of Tungsten-F82H after high-heat flux testing using plasma-arc lamps, refAbstract=null)], funds=null, companyList=[AuthorCompany(id=1315743682301637083, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, xref=1, ext=[AuthorCompanyExt(id=1315743682330997212, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, companyId=1315743682301637083, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=¹Beijing Institute of Petrochemical Technology， School of Mechanical Engineering， Beijing 102627， China), AuthorCompanyExt(id=1315743682343580125, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, companyId=1315743682301637083, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, 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label=Fig.1, caption=Structural schematic diagram of polishing pad thermal field regulation system, figureFileSmall=NKgJVrwt8ZICBoi7Qj/ZQw==, figureFileBig=l6/EPwOdUE0yjw5U0ywTxg==, tableContent=null), ArticleFig(id=1315743685690634747, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图1, caption=抛光垫热场调控系统的结构简图, figureFileSmall=NKgJVrwt8ZICBoi7Qj/ZQw==, figureFileBig=l6/EPwOdUE0yjw5U0ywTxg==, tableContent=null), ArticleFig(id=1315743685891961340, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.2, caption=Principle model of thermal field regulation for of metal tin polishing pad surface, figureFileSmall=nE0JLrrUp7+zvW4D2hWYqA==, figureFileBig=52itNWCSfCkuFjS3ako0Dw==, tableContent=null), ArticleFig(id=1315743685959070205, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图2, caption=金属锡抛光垫表面轮廓热场调控原理模型, figureFileSmall=nE0JLrrUp7+zvW4D2hWYqA==, figureFileBig=52itNWCSfCkuFjS3ako0Dw==, tableContent=null), ArticleFig(id=1315743686026179070, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.3, caption=Two types of thermal stress models for composite pads, figureFileSmall=w4LErWrP+Re3cEQCmWxDVQ==, figureFileBig=q6aPHwbdo30YBfzWA0nrFA==, tableContent=null), ArticleFig(id=1315743686110065151, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图3, caption=复合盘两类热应力模型, figureFileSmall=w4LErWrP+Re3cEQCmWxDVQ==, figureFileBig=q6aPHwbdo30YBfzWA0nrFA==, tableContent=null), ArticleFig(id=1315743686181368320, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.4, caption=Simplified mechanical model of thermal deformation for composite pads. （a） Composite disk model；（b） Thermal deformation model, figureFileSmall=mn0sza1Dy/i5acJ0LbWQEQ==, figureFileBig=UFXoZmpSBY/x4K3sycIhDw==, tableContent=null), ArticleFig(id=1315743686261060097, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图4, caption=复合盘的热变形简化力学模型。（a）复合盘模型；（b）热变形模型, figureFileSmall=mn0sza1Dy/i5acJ0LbWQEQ==, figureFileBig=UFXoZmpSBY/x4K3sycIhDw==, tableContent=null), ArticleFig(id=1315743686336557570, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.5, caption=Constraints of simulation model, figureFileSmall=4x/4RTgXOFRnaZ/Lgt9wQw==, figureFileBig=mYeNFB7TSCCiJyzzNgIKuQ==, tableContent=null), ArticleFig(id=1315743686403666435, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图5, caption=仿真模型的约束, figureFileSmall=4x/4RTgXOFRnaZ/Lgt9wQw==, figureFileBig=mYeNFB7TSCCiJyzzNgIKuQ==, tableContent=null), ArticleFig(id=1315743686479163908, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.6, caption=Simulation results of thermal deformation of composite pads, figureFileSmall=crofcMZLwDzlvBY3V5sUbQ==, figureFileBig=vp5HFRqdWMM8NA01NTjDwQ==, tableContent=null), ArticleFig(id=1315743686550467077, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图6, caption=复合盘热变形的仿真结果, figureFileSmall=crofcMZLwDzlvBY3V5sUbQ==, figureFileBig=vp5HFRqdWMM8NA01NTjDwQ==, tableContent=null), ArticleFig(id=1315743686630158854, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.7, caption=Measurement scheme of polishing pad surface, figureFileSmall=W34aNCRKD3KrqQfHlokppw==, figureFileBig=6Av4bFfUzsENbirDs8k4gw==, tableContent=null), ArticleFig(id=1315743686705656327, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图7, caption=抛光垫表面轮廓测量方案, figureFileSmall=W34aNCRKD3KrqQfHlokppw==, figureFileBig=6Av4bFfUzsENbirDs8k4gw==, tableContent=null), ArticleFig(id=1315743686785348104, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.8, caption=Calculation scheme of {\delta }_{ij}, figureFileSmall=odQN8MhV+G48fE+p4Yq8qQ==, figureFileBig=fCdZSfIQF0wJRmWcoJJ8QA==, tableContent=null), ArticleFig(id=1315743686852456969, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图8, caption= {\delta }_{ij}的计算方案, figureFileSmall=odQN8MhV+G48fE+p4Yq8qQ==, figureFileBig=fCdZSfIQF0wJRmWcoJJ8QA==, tableContent=null), ArticleFig(id=1315743686923760138, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.9, caption=Calculation scheme of {\eta }_{ij}. （a） Calculation principle of {\eta }_{ij}；（b） Measurement method of {\alpha }_j, figureFileSmall=3oNFPs7vHgYTRf4z/R0nXw==, figureFileBig=eKIMqE5nJxg8rNog4sO27A==, tableContent=null), ArticleFig(id=1315743687007646219, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图9, caption= {\eta }_{ij}的计算方案。（a） {\eta }_{ij}计算原理；（b） {\alpha }_j的测量方法, figureFileSmall=3oNFPs7vHgYTRf4z/R0nXw==, figureFileBig=eKIMqE5nJxg8rNog4sO27A==, tableContent=null), ArticleFig(id=1315743687091532300, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.10, caption=Experimental scheme for thermal deformation of composite polishing pad surface, figureFileSmall=EpCjkAEQywsf1s6u3u6D7g==, figureFileBig=xYKDelUNzgeK6rPD74Qkmw==, tableContent=null), ArticleFig(id=1315743687162835469, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图10, caption=复合抛光盘表面热变形实验方案, 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figureFileSmall=pFkDVb8/x8eTJTReY1GVVQ==, figureFileBig=2CRJ2Rzd5ZPfmCGynyB2Mg==, tableContent=null), ArticleFig(id=1315743689247404564, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Fig.14, caption=Processing results of 9 groups of experiments, figureFileSmall=1fzYObpciTZhyvE5tw5u7Q==, figureFileBig=LWBSgYitm4rVsMcWdxfjtQ==, tableContent=null), ArticleFig(id=1315743689322902037, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=图14, caption=9组实验的加工结果, figureFileSmall=1fzYObpciTZhyvE5tw5u7Q==, figureFileBig=LWBSgYitm4rVsMcWdxfjtQ==, tableContent=null), ArticleFig(id=1315743689390010902, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 1, caption=

Material properties of parts

, figureFileSmall=null, figureFileBig=null, tableContent=

Name	Material	Coefficient of thermal expansion/K-1
Aluminum disk	Aluminium alloy	23.0 × 10-6［21］
Cast iron disk	HT300	10.0 × 10-6［22］
Cooling water chamber	HT300	10.0 × 10-6［22］

), ArticleFig(id=1315743689465508375, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表1, caption=

主要零件所用材料

, figureFileSmall=null, figureFileBig=null, tableContent=

Name	Material	Coefficient of thermal expansion/K-1
Aluminum disk	Aluminium alloy	23.0 × 10-6［21］
Cast iron disk	HT300	10.0 × 10-6［22］
Cooling water chamber	HT300	10.0 × 10-6［22］

), ArticleFig(id=1315743689528422936, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 2, caption=

Relationship between temperature parameters and thermal deformation of composite disks

, figureFileSmall=null, figureFileBig=null, tableContent=

t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}	Minimum deformation	Maximum deformation	Average deformation
16 ℃	0	24.8 μm	7.4 μm
17 ℃	0	10.7 μm	3.9 μm
18 ℃	0	7.2 μm	2.6 μm
19 ℃	0	3.6 μm	1.3 μm

), ArticleFig(id=1315743689603920409, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表2, caption=

热场温度参数与复合盘热变形关系

, figureFileSmall=null, figureFileBig=null, tableContent=

t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}	Minimum deformation	Maximum deformation	Average deformation
16 ℃	0	24.8 μm	7.4 μm
17 ℃	0	10.7 μm	3.9 μm
18 ℃	0	7.2 μm	2.6 μm
19 ℃	0	3.6 μm	1.3 μm

), ArticleFig(id=1315743689692000794, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 3, caption=

Parameter setting of polishing pad measurement

, figureFileSmall=null, figureFileBig=null, tableContent=

Type	Repetition accuracy/μm	Movement speed/（mm·min-1）	Number of measurements	Sampling frequency/Hz
LK-H020，KEYENCE	0.02	300	1	250

), ArticleFig(id=1315743689784275483, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表3, caption=

抛光垫测量的基本参数设定

, figureFileSmall=null, figureFileBig=null, tableContent=

Type	Repetition accuracy/μm	Movement speed/（mm·min-1）	Number of measurements	Sampling frequency/Hz
LK-H020，KEYENCE	0.02	300	1	250

), ArticleFig(id=1315743689863967260, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 4, caption=

Experimental parameters for thermal deformation of polishing pads

, figureFileSmall=null, figureFileBig=null, tableContent=

t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}/℃	t_{\mathrm{i}\mathrm{n}\mathrm{t}\mathrm{e}\mathrm{r}}/℃	Thermal deformation of polishing pad surface/μm
16	20	\mathrm{\Delta }{Z}_i(t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}})=Z_i(t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}})-Z_i， FPV， FRMS
17
18
19

), ArticleFig(id=1315743689943659037, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表4, caption=

热光垫热变形实验参数

, figureFileSmall=null, figureFileBig=null, tableContent=

t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}/℃	t_{\mathrm{i}\mathrm{n}\mathrm{t}\mathrm{e}\mathrm{r}}/℃	Thermal deformation of polishing pad surface/μm
16	20	\mathrm{\Delta }{Z}_i(t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}})=Z_i(t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}})-Z_i， FPV， FRMS
17
18
19

), ArticleFig(id=1315743690019156510, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 5, caption=

Processing parameters of planar optical elements

, figureFileSmall=null, figureFileBig=null, tableContent=

Component material	Diameter/mm	Polishing pad	Rotating speed of turntable/（r·min-1）	Rotating speed of workpiece/（r·min-1）	Slurry
Fused quartz	120	Metal tin plate	10	9.9	Al2O3

), ArticleFig(id=1315743690103042591, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表5, caption=

平面光学元件加工参数

, figureFileSmall=null, figureFileBig=null, tableContent=

Component material	Diameter/mm	Polishing pad	Rotating speed of turntable/（r·min-1）	Rotating speed of workpiece/（r·min-1）	Slurry
Fused quartz	120	Metal tin plate	10	9.9	Al2O3

), ArticleFig(id=1315743690178540064, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 6, caption=

Nine experimental schemes for planar optical elements

, figureFileSmall=null, figureFileBig=null, tableContent=

Number	t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}/℃	Surface accuracy（PV）/\lambda	Surface accuracy（RMS）/\lambda
1	16	1.03	0.20
2	16	0.83	0.18
3	16	0.90	0.20
4	18	0.75	0.16
5	18	0.68	0.15
6	18	0.80	0.18
7	20	0.83	0.19
8	20	0.84	0.19
9	20	0.78	0.16

), ArticleFig(id=1315743690266620449, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表6, caption=

平面光学元件9组加工实验的方案

, figureFileSmall=null, figureFileBig=null, tableContent=

Number	t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}/℃	Surface accuracy（PV）/\lambda	Surface accuracy（RMS）/\lambda
1	16	1.03	0.20
2	16	0.83	0.18
3	16	0.90	0.20
4	18	0.75	0.16
5	18	0.68	0.15
6	18	0.80	0.18
7	20	0.83	0.19
8	20	0.84	0.19
9	20	0.78	0.16

), ArticleFig(id=1315743690333729314, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 7, caption=

Maximum and average values of thermal deformation on the surface of the thermal pad

, figureFileSmall=null, figureFileBig=null, tableContent=

t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}	Minimum deformation	Maximum deformation	Average deformation
16 ℃	0	16.9 μm	12.5 μm
17 ℃	0	11.1 μm	8.8 μm
18 ℃	0	6.2 μm	5.0 μm
19 ℃	0	2.2 μm	2.0 μm

), ArticleFig(id=1315743690400838179, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表7, caption=

热光垫表面热变形的最大值和平均值

, figureFileSmall=null, figureFileBig=null, tableContent=

t_{\mathrm{c}\mathrm{o}\mathrm{n}\mathrm{t}}	Minimum deformation	Maximum deformation	Average deformation
16 ℃	0	16.9 μm	12.5 μm
17 ℃	0	11.1 μm	8.8 μm
18 ℃	0	6.2 μm	5.0 μm
19 ℃	0	2.2 μm	2.0 μm

), ArticleFig(id=1315743690467947044, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=EN, label=Table 8, caption=

Nine experimental results of planar optical elements

, figureFileSmall=null, figureFileBig=null, tableContent=

Number	Temperature of water cooler/℃	Surface accuracy（PV）/\lambda	Surface accuracy（RMS）/\lambda	Average value（PV）/\lambda	Average value（RMS）/\lambda
1	16	1.03	0.20	0.92	0.19
2	16	0.83	0.18
3	16	0.90	0.20
4	18	0.75	0.16	0.74	0.16
5	18	0.68	0.15
6	18	0.80	0.18
7	20	0.83	0.19	0.81	0.18
8	20	0.84	0.19
9	20	0.78	0.16

), ArticleFig(id=1315743690543444517, tenantId=1146029695717560320, journalId=1315121910733963395, articleId=1315743677654348220, language=CN, label=表8, caption=

平面光学元件9组加工实验的结果

, figureFileSmall=null, figureFileBig=null, tableContent=

Number	Temperature of water cooler/℃	Surface accuracy（PV）/\lambda	Surface accuracy（RMS）/\lambda	Average value（PV）/\lambda	Average value（RMS）/\lambda
1	16	1.03	0.20	0.92	0.19
2	16	0.83	0.18
3	16	0.90	0.20
4	18	0.75	0.16	0.74	0.16
5	18	0.68	0.15
6	18	0.80	0.18
7	20	0.83	0.19	0.81	0.18
8	20	0.84	0.19
9	20	0.78	0.16

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