Article(id=1322942893526233975, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322942849381183980, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20210220, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1617206400000, receivedDateStr=2021-04-01, revisedDate=1623513600000, revisedDateStr=2021-06-13, acceptedDate=null, acceptedDateStr=null, onlineDate=1793343764907, onlineDateStr=2026-10-30, pubDate=1634659200000, pubDateStr=2021-10-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1793343764907, onlineIssueDateStr=2026-10-30, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1793343764907, creator=13701087609, updateTime=1793343764907, updator=13701087609, issue=Issue{id=1322942849381183980, tenantId=1146029695717560320, journalId=1263187385517883426, year='2021', volume='49', issue='10', pageStart='2045', pageEnd='2312', issueExtLink='null', onlineDate='null', pubDate='1634659200000', pubDateStr='2021-10-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1793343754382, creator='13701087609', updateTime=1793345931656, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1322951981580562527, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322942849381183980, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1322951981584756832, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322942849381183980, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=2154, endPage=2163, ext={EN=ArticleExt(id=1322942893849195384, articleId=1322942893526233975, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Preparation and Tribological Properties of Diamond-Like-Carbon/CN_x Multilayer Films With Symmetrical Nitrogen-Content Gradient, columnId=null, journalTitle=Journal of the Chinese Ceramic Society, columnName=null, runingTitle=null, highlight=null, articleAbstract=

Diamond-like-carbon (DLC)/N-gradient CN_x nano-multilayer films with different thicknesses of nitrogen-content gradient CN_x layers were prepared on silicon substrate via direct-current magnetron sputtering, in which the nitrogen-content gradient appears in an inverted "U" shape. The microstructure, surface morphology, mechanical and tribological properties in vacuum and air were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, scratch testing and ball-on-disk wear tests. The results show that the surface of the multilayer films is smooth and all of them are amorphous. The hardness, elastic modulus, and adhesion of the multilayer films gradually decrease, and the surface roughness and wear rate increase with the increase of N-content gradient CN_x layer thickness. The wear resistance of the multilayer films is better in vacuum rather than in air. The multilayer film with a CN_x layer thickness of less than 30 nm exhibits a hardness in the range of 21.9-23.1 GPa, an interface adhesion in the range of 54.2-54.3 N, a friction coefficient of approximately 0.19 in air and 0.18 in vacuum, and a wear rate in the range of (0.98-1.16)×10^-16 m³/(N·m) in air and (0.83-0.88)×10^-16 m³/(N·m) in vacuum.

, authors=Fanger YANG¹, Manbin GAO¹, Ji ZHANG², Xiaohua ZHENG¹, authorsList=Fanger YANG, Manbin GAO, Ji ZHANG, Xiaohua ZHENG, authorCompany=null, correspAuthors=Xiaohua ZHENG, authorNote=, correspAuthorsNote=, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1322942894268625785, articleId=1322942893526233975, tenantId=1146029695717560320, journalId=1263187385517883426, language=CN, title=类金刚石/对称N-梯度CN_x多层膜的制备及摩擦性能, columnId=0, journalTitle=硅酸盐学报, columnName=, runingTitle=null, highlight=null, articleAbstract=

采用直流磁控溅射技术在Si基底上制备了不同CN_x层厚度的类金刚石（DLC）/N-梯度CN_x纳米多层膜（N含量梯度呈对称的倒“U”形）。利用X射线衍射仪、扫描电子显微镜、原子力显微镜、Raman光谱仪、X射线光电子能谱仪、划痕仪、球盘式摩擦磨损试验机等对多层膜的微观结构、力学性能以及真空和大气中的摩擦学特性等进行了表征。结果表明：多层膜表面平整光滑，均为非晶结构。随着对称N-梯度CN_x层厚度的增加，多层膜的表面粗糙度增大，硬度、弹性模量和膜基结合力逐渐降低，磨损率增加。多层膜在真空中的耐磨性比大气中的好。N-梯度CN_x层厚度小于30 nm的多层膜的硬度可达21.9~23.1 GPa，膜基结合力为54.2~54.3 N；在大气中的摩擦因数约为0.19，磨损率为（0.98~1.16）×10^-16 m³/（N·m），在真空中的摩擦因数约为0.18，磨损率为（0.83~0.88）×10^-16 m³/（N·m）。

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YANG Fanger (1962-), female, Professor. E-mail: yfe1230@163.com

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杨芳儿（1962—），女，教授级高工。

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杨芳儿（1962—），女，教授级高工。

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