Article(id=1322942838232723854, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322942780003201932, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20200837, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1605456000000, receivedDateStr=2020-11-16, revisedDate=1615910400000, revisedDateStr=2021-03-17, acceptedDate=null, acceptedDateStr=null, onlineDate=1793343751723, onlineDateStr=2026-10-30, pubDate=1632067200000, pubDateStr=2021-09-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1793343751723, onlineIssueDateStr=2026-10-30, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1793343751723, creator=13701087609, updateTime=1793343751723, updator=13701087609, issue=Issue{id=1322942780003201932, tenantId=1146029695717560320, journalId=1263187385517883426, year='2021', volume='49', issue='9', pageStart='1785', pageEnd='2044', issueExtLink='null', onlineDate='null', pubDate='1632067200000', pubDateStr='2021-09-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1793343737841, creator='13701087609', updateTime=1793345873558, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1322951737916665918, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322942780003201932, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1322951737916665919, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322942780003201932, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=1970, endPage=1975, ext={EN=ArticleExt(id=1322942838480187791, articleId=1322942838232723854, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Growth and Optical Properties of In-rich Al_1-xIn_xN Films by Radio-Frequency Magnetron Sputtering, columnId=1319726165087077079, journalTitle=Journal of the Chinese Ceramic Society, columnName=Research Article, runingTitle=null, highlight=null, articleAbstract=

The In-rich Al_1-xIn_xN films were grown on Si and quartz substrates by radio-frequency magnetron sputtering. The structures, morphologies, and optical bandgap of as-grown Al_1-xIn_xN films were characterized by X-ray diffraction, scanning electron microscopy, and ultra-violate-visible-near infrared spectroscopy. The photoluminescence (PL) spectra of Al_1-xIn_xN films were measured at room temperature. The Al_1-xIn_xN films have single-phase wurtzite structures with (002) preferred orientation. The In content x was tuned in the range of 0.64-0.76. With increasing the In content x, the Al_1-xIn_xN films exhibit smoother surface morphology and the optical bandgap shows a red-shifted from 1.93 eV to 1.87 eV. The PL emission is dominated by the band edge emission at x = 0.64. The additional emission could be explained by the Burstein-Moss effect when the In content x was increased.

, authors=Jianjin CHEN, Dongli QI, Jun LIU, Xiang LI, Jianyu SONG, Longhai SHEN, authorsList=Jianjin CHEN, Dongli QI, Jun LIU, Xiang LI, Jianyu SONG, Longhai SHEN, authorCompany=null, correspAuthors=Longhai SHEN, authorNote=, correspAuthorsNote=, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1322942838874452369, articleId=1322942838232723854, tenantId=1146029695717560320, journalId=1263187385517883426, language=CN, title=射频磁控溅射制备高In组分Al_1-xIn_xN薄膜及其光学性能, columnId=1263922770220560512, journalTitle=硅酸盐学报, columnName=研究论文, runingTitle=null, highlight=null, articleAbstract=

采用射频磁控溅射法，在硅和石英衬底上生长了高In组分Al_1-xIn_xN薄膜。利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）和紫外-可见-红外分光光度计分别对Al_1-xIn_xN薄膜的结构、形貌和光学带隙进行表征，并在室温下测量Al_1-xIn_xN薄膜的光致发光（PL）谱。结果表明：Al_1-xIn_xN薄膜均呈（002）择优取向，具有单相纤锌矿结构，In组分为x = 0.64-0.76。随着In组分升高，薄膜表面更加光滑，光学带隙值由1.93 eV红移至1.87 eV。In组分x = 0.64，薄膜以本征发光为主，随着In组分增加，出现了附加的发光峰，这可归因于Moss-Burstein效应。

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CHEN Jianjin(1996-), male, Master candidate. E-mail: 1165502839@qq.com

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CHEN Jianjin(1996-), male, Master candidate. E-mail: 1165502839@qq.com

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陈建金（1996—），男，硕士研究生。

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陈建金（1996—），男，硕士研究生。

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