Article(id=1322636185621610770, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322636152813768892, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20190674, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1570723200000, receivedDateStr=2019-10-11, revisedDate=1583078400000, revisedDateStr=2020-03-02, acceptedDate=null, acceptedDateStr=null, onlineDate=1793270640044, onlineDateStr=2026-10-29, pubDate=1597852800000, pubDateStr=2020-08-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1793270640044, onlineIssueDateStr=2026-10-29, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1793270640044, creator=13701087609, updateTime=1793270640044, updator=13701087609, issue=Issue{id=1322636152813768892, tenantId=1146029695717560320, journalId=1263187385517883426, year='2020', volume='48', issue='8', pageStart='1145', pageEnd='1352', issueExtLink='null', onlineDate='null', pubDate='1597852800000', pubDateStr='2020-08-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1793270632222, creator='13701087609', updateTime=1793277122165, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1322663373687337109, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322636152813768892, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1322663373687337110, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322636152813768892, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=1333, endPage=1340, ext={EN=ArticleExt(id=1322636185848103187, articleId=1322636185621610770, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Morphological Control and Polishing Behavior of Mesoporous Silica Particles, columnId=1263922769897599102, journalTitle=Journal of the Chinese Ceramic Society, columnName=Research Articles, runingTitle=null, highlight=null, articleAbstract=

Hexagonal mesoporous silica (H-mSiO2) particles were prepared via an alcohol/water mixed reaction system using cetyltrimethyl ammonium bromide as a template. The resultant products were characterized by scanning electron microscopy, transmission electron microscopy, X-ray diffraction, Fourier transform spectroscopy, thermogravimetric analysis-differential scanning calorimetry, and nitrogen adsorption/desorption measurements. As an alcohol/water volume ratio decreases slowly, the morphologies of samples change from spherical/ellipsoidal to spherical and then to necked or peanut-like. Based on the polishing tests over oxide films (about 208 nm), the developed H-mSiO2 abrasives contribute to the reductions of surface roughness and topographical variation, compared to non-porous sphere SiO2 (sSiO2) particles. The root-mean-square roughness of oxidized silicon wafers reduces from (1.27±0.15) nm to (0.25±0.01) nm after polishing with H-mSiO2 containing spherical and ellipsoidal particles. The maximum asperity height in sectional profiles decreases from 3.59 nm to 0.72 nm, and the maximum valley depth also reduces from 3.16 nm to 0.69 nm. Moreover, H-mSiO2 abrasives with uniform spherical shapes achieve a removal rate of (223±17) nm/min.

, authors=Wenjie CAI, Hailiang MU, Zhaoyu MU, Yang CHEN, authorsList=Wenjie CAI, Hailiang MU, Zhaoyu MU, Yang CHEN, authorCompany=null, correspAuthors=Yang CHEN, authorNote=

CAI Wenjie (1993-), male, Master candidate. E-mail:

, correspAuthorsNote=
CHEN Yang (1978-), male, Ph.D., Professor. E-mail:
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以十六烷基三甲基溴化铵为模板剂,通过醇/水体系反应制备了具有六边形孔道的介孔氧化硅(H-mSiO2)颗粒。用扫描电子显微镜、透射电子显微镜、X射线衍射、Fourier变换红外光谱仪、热重分析-差示扫描量热法和氮气吸脱附等手段对产物进行结构表征。结果表明:随醇/水体积比的缓慢降低,产物由混合形貌(球形+椭球)演变成单一规则球形,继而球形颗粒间又出现颈部相连现象。氧化物介电薄膜的抛光试验结果显示:与常规无孔球形SiO2(sSiO2)磨料(约208 nm)相比,尺寸相当的H-mSiO2磨料可有效降低加工表面粗糙度和轮廓波动范围;具有混合形貌(球形+椭球形)的H-mSiO2磨料使得工件表面粗糙度均方根值由(1.27±0.15) nm降至(0.25±0.01) nm,截面轮廓最大波峰高度和最低波谷深度分别由3.59 nm和3.16 nm降至0.72 nm和0.69 nm;规则球形H-mSiO2磨料则获得了(223±17)nm/min的抛光效率。

, authors=蔡文杰, 穆海亮, 穆兆宇, 陈杨, authorsList=蔡文杰, 穆海亮, 穆兆宇, 陈杨, authorCompany=null, correspAuthors=陈杨, authorNote=

蔡文杰(1993—),男,硕士研究生。

, correspAuthorsNote=
陈杨(1978—),男,博士,教授。
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蔡文杰(1993—),男,硕士研究生。

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介孔氧化硅颗粒的形貌调控和抛光性能
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蔡文杰 , 穆海亮 , 穆兆宇 , 陈杨
硅酸盐学报 | 研究论文 2020,48(8): 1333-1340
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硅酸盐学报 |研究论文 2020 , 48 (8) : 1333 -1340
介孔氧化硅颗粒的形貌调控和抛光性能
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蔡文杰 , 穆海亮, 穆兆宇, 陈杨
作者信息
  • 常州大学材料科学与工程学院,江苏 常州 213164
通讯作者:
陈杨(1978—),男,博士,教授。
作者简介:

蔡文杰(1993—),男,硕士研究生。

Morphological Control and Polishing Behavior of Mesoporous Silica Particles
Wenjie CAI , Hailiang MU, Zhaoyu MU, Yang CHEN
Affiliations
  • School of Materials Science and Engineering, Changzhou University, Changzhou 213164, Jiangsu, China
  • Corresponding Author:
    CHEN Yang (1978-), male, Ph.D., Professor. E-mail:

    CAI Wenjie (1993-), male, Master candidate. E-mail:

出版时间: 2020-08-20 doi: 10.14062/j.issn.0454-5648.20190674
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以十六烷基三甲基溴化铵为模板剂,通过醇/水体系反应制备了具有六边形孔道的介孔氧化硅(H-mSiO2)颗粒。用扫描电子显微镜、透射电子显微镜、X射线衍射、Fourier变换红外光谱仪、热重分析-差示扫描量热法和氮气吸脱附等手段对产物进行结构表征。结果表明:随醇/水体积比的缓慢降低,产物由混合形貌(球形+椭球)演变成单一规则球形,继而球形颗粒间又出现颈部相连现象。氧化物介电薄膜的抛光试验结果显示:与常规无孔球形SiO2(sSiO2)磨料(约208 nm)相比,尺寸相当的H-mSiO2磨料可有效降低加工表面粗糙度和轮廓波动范围;具有混合形貌(球形+椭球形)的H-mSiO2磨料使得工件表面粗糙度均方根值由(1.27±0.15) nm降至(0.25±0.01) nm,截面轮廓最大波峰高度和最低波谷深度分别由3.59 nm和3.16 nm降至0.72 nm和0.69 nm;规则球形H-mSiO2磨料则获得了(223±17)nm/min的抛光效率。

介孔氧化硅  /  形貌调控  /  磨料颗粒  /  抛光

Hexagonal mesoporous silica (H-mSiO2) particles were prepared via an alcohol/water mixed reaction system using cetyltrimethyl ammonium bromide as a template. The resultant products were characterized by scanning electron microscopy, transmission electron microscopy, X-ray diffraction, Fourier transform spectroscopy, thermogravimetric analysis-differential scanning calorimetry, and nitrogen adsorption/desorption measurements. As an alcohol/water volume ratio decreases slowly, the morphologies of samples change from spherical/ellipsoidal to spherical and then to necked or peanut-like. Based on the polishing tests over oxide films (about 208 nm), the developed H-mSiO2 abrasives contribute to the reductions of surface roughness and topographical variation, compared to non-porous sphere SiO2 (sSiO2) particles. The root-mean-square roughness of oxidized silicon wafers reduces from (1.27±0.15) nm to (0.25±0.01) nm after polishing with H-mSiO2 containing spherical and ellipsoidal particles. The maximum asperity height in sectional profiles decreases from 3.59 nm to 0.72 nm, and the maximum valley depth also reduces from 3.16 nm to 0.69 nm. Moreover, H-mSiO2 abrasives with uniform spherical shapes achieve a removal rate of (223±17) nm/min.

mesoporous silica  /  morphology control  /  abrasive particle  /  polishing
蔡文杰, 穆海亮, 穆兆宇, 陈杨. 介孔氧化硅颗粒的形貌调控和抛光性能. 硅酸盐学报, 2020 , 48 (8) : 1333 -1340 . DOI: 10.14062/j.issn.0454-5648.20190674
Wenjie CAI, Hailiang MU, Zhaoyu MU, Yang CHEN. Morphological Control and Polishing Behavior of Mesoporous Silica Particles[J]. Journal of the Chinese Ceramic Society, 2020 , 48 (8) : 1333 -1340 . DOI: 10.14062/j.issn.0454-5648.20190674
  • 国家自然科学基金资助项目(51405038; 51575058; 51875052)
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2020年第48卷第8期
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doi: 10.14062/j.issn.0454-5648.20190674
  • 接收时间:2019-10-11
  • 首发时间:2026-10-29
  • 出版时间:2020-08-20
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  • 收稿日期:2019-10-11
  • 修回日期:2020-03-02
基金
国家自然科学基金资助项目(51405038; 51575058; 51875052)
作者信息
    常州大学材料科学与工程学院,江苏 常州 213164

通讯作者:

陈杨(1978—),男,博士,教授。
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2种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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