Article(id=1322612334091162249, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322612332010787465, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.2020.06.20190594, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1567008000000, receivedDateStr=2019-08-29, revisedDate=1575820800000, revisedDateStr=2019-12-09, acceptedDate=null, acceptedDateStr=null, onlineDate=1793264953395, onlineDateStr=2026-10-29, pubDate=1592582400000, pubDateStr=2020-06-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1793264953395, onlineIssueDateStr=2026-10-29, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1793264953395, creator=13701087609, updateTime=1793264953395, updator=13701087609, issue=Issue{id=1322612332010787465, tenantId=1146029695717560320, journalId=1263187385517883426, year='2020', volume='48', issue='6', pageStart='787', pageEnd='938', issueExtLink='null', onlineDate='null', pubDate='1592582400000', pubDateStr='2020-06-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1793264952900, creator='13701087609', updateTime=1793277066146, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1322663138810516224, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322612332010787465, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1322663138810516225, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322612332010787465, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=925, endPage=930, ext={EN=ArticleExt(id=1322612334355403403, articleId=1322612334091162249, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Effects of Deposition Temperature and Pressure on Grain Size and Properties of CVDZnS, columnId=1322612334275711626, journalTitle=Journal of the Chinese Ceramic Society, columnName=Research Paper, runingTitle=null, highlight=null, articleAbstract=

CVDZnS samples were prepared by a chemical vapor deposition method at different deposition temperatures (i.e., (650±10), (670±10), (700±10) ℃ and pressures (i.e., (5 000±200), (7 000±200), (9 000±200) Pa as well as a H2S flowrate of (2±1) L/min and an argon flowrate of (35±2) L/min. The CVDZnS samples were analyzed by X-ray diffraction, metallographic microscopy and Fourier transform infrared spectroscopy, microscopic grain morphology and infrared transmittance measurement at 2-15 μm. Based on the XRD characterization, CVDZnS mainly exists in the form of cubic phase with a small amount of hexagonal phase and the preferential orientation of deposition growth is s(111). The metallographic analysis indicates that the average grain size increases with the increase of temperature when the deposition pressure is (5 000±200) and (7 000±200) Pa, and the maximum average longitudinal grain size is 15.5 μm. The bending strength test data show that the ratio of average longitudinal grain size to average transverse grain size is closer to "1", which is more advantageous to increase the bending strength of materials. In addition, the CVDZnS prepared at (670±10) ℃ and (7 000±200) Pa can effectively improve the average transmittance of 2-5 and 7-10 μm (i.e., 72.15%) and reduce the absorption at 6.0 μm.

, authors=Naiguang WEI, Li GUO, Hai YANG, Xiaohua LIU, Zhirui TIAN, Jiangming LI, Dongxu LI, Lipeng JIANG, Wenjiang LI, Yongtian ZHAO, Jianchun YANG, authorsList=Naiguang WEI, Li GUO, Hai YANG, Xiaohua LIU, Zhirui TIAN, Jiangming LI, Dongxu LI, Lipeng JIANG, Wenjiang LI, Yongtian ZHAO, Jianchun YANG, authorCompany=null, correspAuthors=Li GUO, authorNote=

WEI Naiguang (1980-), male, Professor-level senior Engineer. E-mail:

, correspAuthorsNote=
GUO Li (1991-), male, Engineer. E-mail:
, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1322612334636421772, articleId=1322612334091162249, tenantId=1146029695717560320, journalId=1263187385517883426, language=CN, title=沉积温度、压力对CVDZnS晶粒尺寸及性能的影响, columnId=1263922770220560512, journalTitle=硅酸盐学报, columnName=研究论文, runingTitle=null, highlight=null, articleAbstract=

通过控制H2S流量(2±1) L/min、氩气流量(35±2) L/min,在不同沉积温度[(650±10)、670±10)、700±10) ℃)]、不同沉积压力[(5 000±200)、7 000±200)、9 000±200)Pa)]工艺条件下采用化学气相沉积法制备出原生ZnS(CVDZnS)样品。利用X射线衍射、金相显微镜、Spectrμm100 Fourier红外变换光谱仪对CVDZnS样品分别进行了物相分析、微观晶粒形貌观察以及2~15 μm波段的红外透过率测试。结果表明:CVDZnS主要以立方相形式存在,有少量六方相,沉积生长的优先取向为s(111);金相分析表明在沉积压力为(5 000±200)和(7 000±200) Pa时,随着温度的升高平均晶粒尺寸有增大趋势,最大平均纵向晶粒尺寸值为15.5 μm。平均纵向晶粒尺寸和平均横向晶粒尺寸的比值越接近“1”,对于提高材料弯曲强度越有利。确定了在沉积温度为(670±10) ℃、沉积压力为(7 000±200) Pa工艺条件下,制备的CVDZnS可以有效提高2~5、7~10 μm的平均透过率(~72.15%),降低6.0 μm左右的吸收。

, authors=魏乃光, 郭立, 杨海, 刘晓华, 田智瑞, 黎建明, 李冬旭, 蒋立朋, 李文江, 赵永田, 杨建纯, authorsList=魏乃光, 郭立, 杨海, 刘晓华, 田智瑞, 黎建明, 李冬旭, 蒋立朋, 李文江, 赵永田, 杨建纯, authorCompany=null, correspAuthors=郭立, authorNote=

魏乃光(1980—),男,教授级高工。

, correspAuthorsNote=
郭立(1991—),男,工程师。
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WEI Naiguang (1980-), male, Professor-level senior Engineer. E-mail:

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沉积温度、压力对CVDZnS晶粒尺寸及性能的影响
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魏乃光 , 郭立 , 杨海 , 刘晓华 , 田智瑞 , 黎建明 , 李冬旭 , 蒋立朋 , 李文江 , 赵永田 , 杨建纯
硅酸盐学报 | 研究论文 2020,48(6): 925-930
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硅酸盐学报 |研究论文 2020 , 48 (6) : 925 -930
沉积温度、压力对CVDZnS晶粒尺寸及性能的影响
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魏乃光 , 郭立 , 杨海, 刘晓华, 田智瑞, 黎建明, 李冬旭, 蒋立朋, 李文江, 赵永田, 杨建纯
作者信息
  • 北京有色金属研究总院有研国晶辉新材料有限公司,河北 三河 065201
通讯作者:
郭立(1991—),男,工程师。
作者简介:

魏乃光(1980—),男,教授级高工。

Effects of Deposition Temperature and Pressure on Grain Size and Properties of CVDZnS
Naiguang WEI , Li GUO , Hai YANG, Xiaohua LIU, Zhirui TIAN, Jiangming LI, Dongxu LI, Lipeng JIANG, Wenjiang LI, Yongtian ZHAO, Jianchun YANG
Affiliations
  • GRIRNM Guojing Advanbced Material Co., Ltd., Sanhe 065201, Hebei, China
  • Corresponding Author:
    GUO Li (1991-), male, Engineer. E-mail:

    WEI Naiguang (1980-), male, Professor-level senior Engineer. E-mail:

出版时间: 2020-06-20 doi: 10.14062/j.issn.0454-5648.2020.06.20190594
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通过控制H2S流量(2±1) L/min、氩气流量(35±2) L/min,在不同沉积温度[(650±10)、670±10)、700±10) ℃)]、不同沉积压力[(5 000±200)、7 000±200)、9 000±200)Pa)]工艺条件下采用化学气相沉积法制备出原生ZnS(CVDZnS)样品。利用X射线衍射、金相显微镜、Spectrμm100 Fourier红外变换光谱仪对CVDZnS样品分别进行了物相分析、微观晶粒形貌观察以及2~15 μm波段的红外透过率测试。结果表明:CVDZnS主要以立方相形式存在,有少量六方相,沉积生长的优先取向为s(111);金相分析表明在沉积压力为(5 000±200)和(7 000±200) Pa时,随着温度的升高平均晶粒尺寸有增大趋势,最大平均纵向晶粒尺寸值为15.5 μm。平均纵向晶粒尺寸和平均横向晶粒尺寸的比值越接近“1”,对于提高材料弯曲强度越有利。确定了在沉积温度为(670±10) ℃、沉积压力为(7 000±200) Pa工艺条件下,制备的CVDZnS可以有效提高2~5、7~10 μm的平均透过率(~72.15%),降低6.0 μm左右的吸收。

化学气相沉积硫化锌  /  沉积温度  /  沉积压力  /  光学性能  /  力学性能

CVDZnS samples were prepared by a chemical vapor deposition method at different deposition temperatures (i.e., (650±10), (670±10), (700±10) ℃ and pressures (i.e., (5 000±200), (7 000±200), (9 000±200) Pa as well as a H2S flowrate of (2±1) L/min and an argon flowrate of (35±2) L/min. The CVDZnS samples were analyzed by X-ray diffraction, metallographic microscopy and Fourier transform infrared spectroscopy, microscopic grain morphology and infrared transmittance measurement at 2-15 μm. Based on the XRD characterization, CVDZnS mainly exists in the form of cubic phase with a small amount of hexagonal phase and the preferential orientation of deposition growth is s(111). The metallographic analysis indicates that the average grain size increases with the increase of temperature when the deposition pressure is (5 000±200) and (7 000±200) Pa, and the maximum average longitudinal grain size is 15.5 μm. The bending strength test data show that the ratio of average longitudinal grain size to average transverse grain size is closer to "1", which is more advantageous to increase the bending strength of materials. In addition, the CVDZnS prepared at (670±10) ℃ and (7 000±200) Pa can effectively improve the average transmittance of 2-5 and 7-10 μm (i.e., 72.15%) and reduce the absorption at 6.0 μm.

chemical vapor deposition of zinc sulfide  /  deposition temperature  /  depositional pressure  /  optical properties  /  mechanical properties
魏乃光, 郭立, 杨海, 刘晓华, 田智瑞, 黎建明, 李冬旭, 蒋立朋, 李文江, 赵永田, 杨建纯. 沉积温度、压力对CVDZnS晶粒尺寸及性能的影响. 硅酸盐学报, 2020 , 48 (6) : 925 -930 . DOI: 10.14062/j.issn.0454-5648.2020.06.20190594
Naiguang WEI, Li GUO, Hai YANG, Xiaohua LIU, Zhirui TIAN, Jiangming LI, Dongxu LI, Lipeng JIANG, Wenjiang LI, Yongtian ZHAO, Jianchun YANG. Effects of Deposition Temperature and Pressure on Grain Size and Properties of CVDZnS[J]. Journal of the Chinese Ceramic Society, 2020 , 48 (6) : 925 -930 . DOI: 10.14062/j.issn.0454-5648.2020.06.20190594
  • 河北省科技重大专项(18041030Z)
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doi: 10.14062/j.issn.0454-5648.2020.06.20190594
  • 接收时间:2019-08-29
  • 首发时间:2026-10-29
  • 出版时间:2020-06-20
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  • 收稿日期:2019-08-29
  • 修回日期:2019-12-09
基金
河北省科技重大专项(18041030Z)
作者信息
    北京有色金属研究总院有研国晶辉新材料有限公司,河北 三河 065201

通讯作者:

郭立(1991—),男,工程师。
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2种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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