硅酸盐学报

烧结助剂对氮化铝陶瓷性能影响的研究进展

PDF下载

李圆梦 ¹ , 田晓 ¹^,² , 王群 ³ , 纪铭悦 ¹ , 李雨欣 ¹ , 王棚 ¹ , 李沫函 ¹

硅酸盐学报 | 综合评述 2026,54(9): 3254-3263

收起

硅酸盐学报 |综合评述 2026 , 54 (9) : 3254 -3263

烧结助剂对氮化铝陶瓷性能影响的研究进展

全屏

李圆梦¹, 田晓¹^,², 王群³, 纪铭悦¹, 李雨欣¹, 王棚¹, 李沫函¹

作者信息

^1．内蒙古师范大学物理与电子信息学院，呼和浩特 010022

^2．内蒙古师范大学稀土功能新能源储能材料内蒙古自治区工程研究中心，呼和浩特 010022

^3．内蒙古盛和芯材科技有限责任公司，呼和浩特 011517

通讯作者:

田晓（1972—），女，博士，教授。

作者简介:

李圆梦（2002—），女，硕士研究生。

Research Progress on Effect of Sintering Aids on Properties of Aluminum Nitride Ceramics

Yuanmeng LI¹, Xiao TIAN¹^,², Qun WANG³, Mingyue JI¹, Yuxin LI¹, Peng WANG¹, Mohan LI¹

Affiliations

^1.School of Physics and Electronic Information, Inner Mongolia Normal University, Hohhot 010022, China

^2.Inner Mongolia Engineering and Research Center for Rare Earth Functional and New Energy Storage Materials, Inner Mongolia Normal University, Hohhot 010022, China

^3.Inner Mongolia Shenghe Core Technology Co., Ltd., Hohhot 011517, China

Corresponding Author:

{TIAN} Xiao (1972-), female, Ph.D., Professor. E-mail: nsdtx@126.com

LI Yuanmeng (2002-), female, Master candidate. E-mail: 3225584680@qq.com

出版时间: 2026-08-18 doi: 10.14062/j.issn.0454-5648.20250817

文章导航

摘要

收起

氮化铝（AlN）陶瓷因其具有优异的导热性、电绝缘性以及良好的机械性能，在电子封装、基板、散热等领域具有广阔的应用前景。然而，AlN固有的强共价键、低扩散性等使其难以致密化烧结，严重制约了其性能发挥与应用。添加烧结助剂是克服这一瓶颈、实现高性能AlN陶瓷制备的最有效途径之一。本文从烧结助剂的种类出发，主要梳理了近年来不同种类烧结助剂在优化AlN陶瓷性能方面的研究，分析其作用机理和对AlN陶瓷性能的影响，并对未来AlN陶瓷烧结助剂的研究进行了展望。

关键词

氮化铝陶瓷 / 烧结助剂 / 致密化 / 热导率

Abstract

收起

Aluminum nitride (AlN) ceramics have excellent thermal conductivity, good electrical insulation properties, thermal expansion coefficient matching with silicon materials, and high mechanical strength. AlN ceramics show a wide application potential in high-tech fields such as electronic packaging, circuit substrates, and heat dissipation components. Especially with the rapid development of microelectronic technology to high power and high density integration, AlN ceramics have attracted great attention as an ideal heat dissipation and packaging material. However, AlN as a covalent bond compound, its inherent strong covalent bond, low diffusivity and high melting point make it difficult to achieve densification under conventional sintering conditions, thus restricting the optimization of its microstructure and the improvement of its performance, as well as its application in a wider range of fields. To overcome this bottleneck, the introduction of sintering aids becomes one of the most feasible and effective ways to achieve high density and high performance AlN ceramics. In recent years, researchers have extensively explored different types of sintering aid systems, including oxides, fluorides, composite additives, and other types of sintering aids. Their effects on the sintering behavior, microstructure and properties of AlN ceramics are investigated, obtaining the remarkable results.

In this review, the sintering aids are divided into oxide sintering aids, fluoride sintering aids, composite sintering aids and other types of sintering aids according to the chemical composition. According to the different types of sintering aids, the performance optimization mechanism of AlN ceramics is analyzed. Rare-earth oxides (such as Y₂O₃, CeO₂, etc.) are the most widely used sintering aids. They can react with the inherent Al₂O₃ oxide layer on the surface of AlN particles to form rare-earth aluminate liquid phase. The liquid phase has a low viscosity and a good wettability at high temperatures, which can promote the rearrangement of AlN particles. The oxygen impurities in the AlN lattice are effectively fixed at the grain boundary in the form of grain boundary phase. The degree of oxygen solid solution in the AlN lattice is significantly reduced, and the phonon scattering in the lattice is reduced. The unique advantage of fluoride sintering aids (such as CaF₂, YF₃, etc.) is that they can form eutectic liquid phase or react with Al₂O₃ on the surface of AlN to form volatile fluorine-containing substances during sintering, thus promoting the rearrangement of AlN particles and filling the pores to achieve densification. There is no second phase residue at the grain boundary of AlN after sintering. The composite sintering additives can often reduce the lattice oxygen content through the synergistic effect of each component, i.e., one of which focuses on removing oxygen impurities and the another focuses on forming an effective liquid phase at a lower temperature to promote densification. AlN ceramics can form a liquid phase, which is more conducive to sintering at a lower temperature, and achieve more fine regulation of grain microstructure. Other types of sintering aids are mainly represented by carbides or rare-earth hydrides, which also promote densification via forming a low melting point liquid phase, and remove oxygen impurities from the AlN lattice and fix them to the grain boundaries through chemical reactions. The mechanical and thermal properties of AlN ceramics are improved to achieve the purpose of obtaining AlN ceramics with a high strength and a high thermal conductivity.

Summary and Prospects

The comparison of the effect of different sintering aids on the properties of aluminum nitride ceramics indicates that the oxide sintering aid has the most significant effect on the improvement of thermal conductivity and the most mature application technology. However, the sintering temperature required is relatively high, and the second phase of grain boundary generates, affecting the high-temperature performance. It is more suitable for high performance electronic packaging substrate materials. Fluoride sintering aids can significantly reduce the sintering temperature and directly deoxygenate through gas phase volatilization. There is no residual second phase in the grain boundary, but the high temperature volatiles will corrode the sintering equipment, and the sintering process is difficult to control, which is not suitable for industrial production. The composite sintering aid can further reduce the sintering temperature or optimize the grain boundary phase through the synergistic effect, but the formula design is more complicated, and the mechanism of action still needs to be further explored, which is suitable for the pursuit of extreme performance or specific functions. The application cost of other sintering aids is low, but the research is less, the universality is low, and it is still in the experimental research stage.

In the future, advanced characterization techniques can be used to reveal the mechanism of sintering additives, the migration path of oxygen impurities and the dynamic evolution process of grain boundary phase in the sintering process, which can provide a theoretical support for the design of sintering additive system. Nano- or submicron-sized sintering aids are obtained via optimizing the preparation process of sintering aids. Therefore, the utilization efficiency of sintering aids is improved, which is helpful to achieve densification at a lower addition amount. In addition, it can also be devoted to the development of new sintering additives, such as low rare-earth, no rare-earth or no residual sintering additive system, which can effectively reduce the residual impurities at the grain boundary and purify the grain boundary structure. A new type of nitrogen oxide grain boundary phase is constructed via accurately controlling the sintering atmosphere and the proportion of elements in the sintering aid. It can react with Al₂O₃ to form a rare-earth aluminum nitrogen oxide with a higher thermal conductivity and a better electrical insulation or JEM phase and other crystalline phases to replace the low thermal conductivity aluminate glass phase.

Key words

aluminum nitride ceramics / sintering aids / densification / thermal conductivity

引用本文

李圆梦, 田晓, 王群, 纪铭悦, 李雨欣, 王棚, 李沫函. 烧结助剂对氮化铝陶瓷性能影响的研究进展. 硅酸盐学报, 2026 , 54 (9) : 3254 -3263 . DOI: 10.14062/j.issn.0454-5648.20250817

Yuanmeng LI, Xiao TIAN, Qun WANG, Mingyue JI, Yuxin LI, Peng WANG, Mohan LI. Research Progress on Effect of Sintering Aids on Properties of Aluminum Nitride Ceramics[J]. Journal of the Chinese Ceramic Society, 2026 , 54 (9) : 3254 -3263 . DOI: 10.14062/j.issn.0454-5648.20250817

基金

收起

内蒙古自治区自然科学基金(2024MS05017)

参考文献

收起

文献

收起

参考文献引证文献

排序方式：

2026年第54卷第9期

PDF下载

137

引用本文

BibTeX

文章信息

doi: 10.14062/j.issn.0454-5648.20250817

接收时间：2025-11-07
首发时间：2026-10-22
出版时间：2026-08-18

补充材料

相关文章

文章信息

作者

出版历史

收稿日期：2025-11-07
修回日期：2025-11-24

基金

内蒙古自治区自然科学基金(2024MS05017)

作者信息

^1．内蒙古师范大学物理与电子信息学院，呼和浩特 010022

^2．内蒙古师范大学稀土功能新能源储能材料内蒙古自治区工程研究中心，呼和浩特 010022

^3．内蒙古盛和芯材科技有限责任公司，呼和浩特 011517

通讯作者:

田晓（1972—），女，博士，教授。

参考文献

分享链接

https://castjournals.cast.org.cn/joweb/gsyxb/CN/10.14062/j.issn.0454-5648.20250817

分享至

全文二维码

扫描看全文

引用本文

BibTeX

本文的引用情况

2种不同金属材料的力学参数

科 Family	属数 Number of genus	种数 Number of species	占总种数比例 Percentage of total species (%)	属 Genus	种数 Number of species	占总种数比例 Percentage of total species (%)
鹅膏菌科Amanitaceae	2	11	5.26	鹅膏菌属 Amanita	10	4.78
小菇科 Mycenaceae	2	12	5.74	丝盖伞属 Inocybe	5	2.39
多孔菌科 Polyporaceae	8	14	6.70	蜡蘑属 Laccaria	5	2.39
红菇科 Russulaceae	3	23	11.00	小皮伞属 Marasmius	6	2.87
				小菇属 Mycena	11	5.26
				光柄菇属 Pluteus	5	2.39
				红菇属 Russula	17	8.13
				栓菌属 Trametes	5	2.39

关闭全屏

BibTeX
EndNote
RefWorks
TxT