硅酸盐学报

TiO₂/Au复合薄膜的制备及其在平板电极的应用

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梅玉盈 ¹^,² , 雷兵 ¹^,² , 潘瑶 ¹^,² , 罗一鸣 ¹^,² , 杨开勇 ¹^,² , 贾永雷 ¹^,²

硅酸盐学报 | 研究论文 2024,52(10): 3263-3272

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硅酸盐学报 |研究论文 2024 , 52 (10) : 3263 -3272

TiO₂/Au复合薄膜的制备及其在平板电极的应用

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梅玉盈¹^,², 雷兵¹^,², 潘瑶¹^,², 罗一鸣¹^,², 杨开勇¹^,², 贾永雷¹^,²

作者信息

^1．国防科技大学前沿交叉学科学院，长沙 410073

^2．国防科技大学南湖之光实验室，长沙 410073

通讯作者:

贾永雷（1987—），男，博士，讲师。

作者简介:

梅玉盈（1999—），女，硕士研究生。

Preparation of TiO₂/Au Composite Films for Planar Electrode

Yuying MEI¹^,², Bing LEI¹^,², Yao PAN¹^,², Yiming LUO¹^,², Kaiyong YANG¹^,², Yonglei JIA¹^,²

Affiliations

^1.College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha 410073, China

^2.Nanhu Laser Laboratory, National University of Defense Technology, Changsha 410073, China

Corresponding Author:

JIA Yonglei (1987-), male, Ph.D., Lecturer. E-mail: jiayonglei17@nudt.edu.cn

MEI Yuying (1999-), female, Master candidate. E-mail: 873527614@qq.com

出版时间: 2024-10-20 doi: 10.14062/j.issn.0454-5648.20240293

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摘要

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针对当前半球谐振陀螺平板电极表面吸附有机杂质问题，利用TiO₂薄膜的光催化性质，设计了一种TiO₂/Au复合薄膜结构以减弱平板电极表面有机物的存在，提高平板电极表面薄膜质量。通过射频磁控溅射法在熔融石英衬底上制备了不同厚度（80~327 nm）的TiO₂薄膜，利用表征手段对TiO₂薄膜的晶体结构、晶粒大小、表面形貌、吸光特性和光催化性能进行研究，结果表明：厚度为240 nm的TiO₂薄膜具有较好的结晶度，合适的晶粒尺寸，最小的禁带宽度，从而具有最佳光催化活性。最后通过实验验证TiO₂/Au复合薄膜结构的平板电极的力学性能和光催化性，结果表明：TiO₂/Au复合薄膜满足平板电极表面膜层结合力要求，有助于提升表面膜层的耐摩擦性能，同时具有优异的降解有机物的性能，能够减小有机杂质对电容均匀性的影响，为高精度谐振陀螺的研制提供技术支撑。

关键词

谐振陀螺 / 平板电极 / 二氧化钛薄膜 / 光催化 / 自清洁

Abstract

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Introduction

The gyroscope operation relies on the electrostatic actuation and capacitance detection between the resonator and the planar electrode, with a typical gap ranging from 20-150 µm. When organic impurities adhere to planar electrode's surface, gap's capacitance changes, leading to fluctuations in the excitation detection signal and thereby affecting the accuracy and reliability of the gyroscope. TiO₂ thin film can effectively degrade organic pollutants through photocatalytic reactions. However, little research on its application on the surface of high-precision devices has been reported yet. The thickness of the TiO₂ thin film affects the generation and effective separation of photo-generated electron-hole pairs, thereby influencing the photocatalytic performance of the TiO₂ thin film. It is thus necessary to determine the thickness of the TiO₂ thin film on the surface of the planar electrode through experiments. In this paper, a TiO₂/Au composite thin film was designed to reduce the adsorption of organic substances on the surface of planar electrode and improve the thin film quality on the planar electrode surface.

Methods

TiO₂ thin films with different thicknesses were prepared on fused quartz substrates via radio frequency magnetron sputtering. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), UV-visible spectrophotometry (UV-Vis), and photocatalytic reaction analysis. The crystalline structure, grain size, surface morphology, and optical absorption characteristics of the TiO₂ thin films were analyzed to assess their impacts on the photocatalytic performance. The optimal thickness of the TiO₂ thin film suitable for the surface of the planar electrode was determined to be 240 nm. Finally, the planar electrode with a TiO₂/Au composite thin film was fabricated. The surface film layer of the planar electrode was characterized by nanoindentation, nano-scratching, and photocatalytic reaction equipment. The exceptional performance of the TiO₂-coated planar electrode in terms of adhesion, friction resistance, and photocatalytic self-cleaning properties was validated. The final step involved assembling the prepared flat electrode with a hemispherical resonator and using a capacitance meter to validate the superior performance of the TiO₂/Au composite film structured planar electrode for reducing the impact of organic impurities on the gap capacitance between the resonator and the planar electrode.

Results and discussion

The XRD patterns show that the crystalline integrity and grain size of the film gradually increase as the thickness of TiO₂ thin film increases. The SEM and AFM images reveal that the surface roughness increases with the enlargement of grains as the film thickness increases. Based on the analysis of the properties of the TiO₂ thin film, TiO₂ thin film with a thickness of 240 nm exhibits the smallest bandgap width and the optimal photocatalytic performance. For the mechanical properties of the surface film layer on the planar electrode, the abrasion resistance of the planar electrode coated with the TiO₂ thin film is higher than that of the electrode uncoated with the thin film. Also, the adhesion between TiO₂ thin film and Au film on the surface of the planar electrode is comparable to the adhesion between Au film on the surface of the uncoated planar electrode and the substrate. The planar electrode undergoes photocatalytic self-cleaning experiments, TiO₂/Au composite film structured flat electrode can reduce the impact of organic impurities on the capacitance uniformity between the resonator and the flat electrode, thereby contributing to the enhanceed performance of the hemispherical resonant gyroscope.

Conclusions

The crystallinity, grain size, and surface roughness of the TiO₂ thin film increased with increasing TiO₂ film thickness. The TiO₂ thin film with a thickness of 240 nm exhibited the smallest bandgap width and appropriate grain size, thus demonstrating the optimal photocatalytic activity. The experimental verification of mechanical, photocatalytic, and capacitive performance of planar electrodes coated with TiO₂/Au composite films revealed that the adhesion of the TiO₂ thin film on the planar electrode met practical application requirements. Leveraging the excellent hardness and elastic modulus of the TiO₂ thin film significantly enhanced the abrasion resistance of the surface film layer on the planar electrode. Also, the efficiency of photocatalytic degradation of organic impurities on the planar electrodes coated with TiO₂ thin films was 1.6 times higher than that of the electrodes uncoated with the thin film. For assembling the prepared flat electrode with a hemispherical resonator and conducting capacitance meter testing, the TiO₂/Au composite film structured flat electrode could degrade organic impurities and reduce their impact on the gap capacitance between the resonator and the flat electrode under UV light exposure. It was evident that the TiO₂/Au composite film could have a promising practical application in the fabrication of resonant gyroscope flat electrodes.

Key words

resonant gyroscope / planar electrode / titanium dioxide thin film / photocatalysis / self-cleaning

引用本文

梅玉盈, 雷兵, 潘瑶, 罗一鸣, 杨开勇, 贾永雷. TiO₂/Au复合薄膜的制备及其在平板电极的应用. 硅酸盐学报, 2024 , 52 (10) : 3263 -3272 . DOI: 10.14062/j.issn.0454-5648.20240293

Yuying MEI, Bing LEI, Yao PAN, Yiming LUO, Kaiyong YANG, Yonglei JIA. Preparation of TiO₂/Au Composite Films for Planar Electrode[J]. Journal of the Chinese Ceramic Society, 2024 , 52 (10) : 3263 -3272 . DOI: 10.14062/j.issn.0454-5648.20240293

基金

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国家自然科学基金(62103423)
湖南省自然科学基金(2023JJ30638)

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2024年第52卷第10期

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文章信息

doi: 10.14062/j.issn.0454-5648.20240293

接收时间：2024-04-26
首发时间：2026-10-22
出版时间：2024-10-20

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收稿日期：2024-04-26
修回日期：2024-05-26

基金

国家自然科学基金(62103423)

湖南省自然科学基金(2023JJ30638)

作者信息

^1．国防科技大学前沿交叉学科学院，长沙 410073

^2．国防科技大学南湖之光实验室，长沙 410073

通讯作者:

贾永雷（1987—），男，博士，讲师。

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https://castjournals.cast.org.cn/joweb/gsyxb/CN/10.14062/j.issn.0454-5648.20240293

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2种不同金属材料的力学参数

科 Family	属数 Number of genus	种数 Number of species	占总种数比例 Percentage of total species (%)	属 Genus	种数 Number of species	占总种数比例 Percentage of total species (%)
鹅膏菌科Amanitaceae	2	11	5.26	鹅膏菌属 Amanita	10	4.78
小菇科 Mycenaceae	2	12	5.74	丝盖伞属 Inocybe	5	2.39
多孔菌科 Polyporaceae	8	14	6.70	蜡蘑属 Laccaria	5	2.39
红菇科 Russulaceae	3	23	11.00	小皮伞属 Marasmius	6	2.87
				小菇属 Mycena	11	5.26
				光柄菇属 Pluteus	5	2.39
				红菇属 Russula	17	8.13
				栓菌属 Trametes	5	2.39

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