Article(id=1319236715886260483, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319236705027207343, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20220173, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1647100800000, receivedDateStr=2022-03-13, revisedDate=1649692800000, revisedDateStr=2022-04-12, acceptedDate=null, acceptedDateStr=null, onlineDate=1792460143300, onlineDateStr=2026-10-20, pubDate=1666195200000, pubDateStr=2022-10-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1792460143300, onlineIssueDateStr=2026-10-20, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1792460143300, creator=13701087609, updateTime=1792460143300, updator=13701087609, issue=Issue{id=1319236705027207343, tenantId=1146029695717560320, journalId=1263187385517883426, year='2022', volume='50', issue='10', pageStart='2579', pageEnd='2808', issueExtLink='null', onlineDate='null', pubDate='1666195200000', pubDateStr='2022-10-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1792460140711, creator='13701087609', updateTime=1792460672919, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1319238937323884737, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319236705027207343, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1319238937323884738, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319236705027207343, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=2651, endPage=2656, ext={EN=ArticleExt(id=1319236716200833284, articleId=1319236715886260483, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Preparation, Microstructure and Mechanical Properties of Hydrogenated Tetrahedral Amorphous Carbon Films, columnId=1263922769897599102, journalTitle=Journal of the Chinese Ceramic Society, columnName=Research Articles, runingTitle=null, highlight=null, articleAbstract=

Preparation of hydrogenated tetrahedral amorphous carbon (ta-C:H) films with good mechanical properties by plasma-enhanced chemical vapor deposition (PECVD) is expected to meet requirement in industrial application. This paper reported the microstructure and mechanical properties of (ta-C:H) films prepared by a self-designed PECVD technique. As the bias voltage varies from -200 V to -500 V, the hardness and elastic modulus first decrease and then increase, reaching the maximum values of 34.0 GPa and 282.0 GPa respectively. The evolution of compressive stress with bias voltage shows a similar trend. In this case, the hardness and elastic modulus of films prepared by the self-designed PECVD technique both are improved, compared with those by the conventional PECVD methods. The mole fraction of sp3 hybridized bond is greater than 62.3% when the bias voltage changes from -200 V to -500 V. Carbon films were deposited using the self-designed PECVD technique, showing the typical characteristics of ta-C:H films. This can be attributed to the increased ion bombardment and ionization due to the incorporation of a water-cooled radio frequency double helix electrode and a plate electrode resulting in an enhanced sp3 content. This paper provides a promising technology to fabricate ta-C:H films with high hardness and elastic modulus for industrial applications.

, authors=Shipeng XU1, 2, Faqi ZHAN1, Yuehong ZHENG1, Weiqian CHEN1, 2, Peiqing LA1, authorsList=Shipeng XU, Faqi ZHAN, Yuehong ZHENG, Weiqian CHEN, Peiqing LA, authorCompany=null, correspAuthors=Peiqing LA, authorNote=

XU Shipeng (1987-), male, Doctoral candidate, Associate Professor. E-mail:

, correspAuthorsNote=
LA Peiqing (1971-), female, Ph.D., Professor. E-mail:
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采用化学气相沉积法制备具有优异力学性能的含氢四面体非晶碳膜有望满足工业应用的要求。通过自主设计的等离子体增强化学气相沉积实验系统制备含氢四面体非晶碳膜,并对其微观结构与力学性能进行研究。随着偏压从-200 V增加到-500 V,薄膜硬度和弹性模量先增加后减少,最大达到34.0 GPa和282.0 GPa。压应力随着偏压的变化表现出相同的变化趋势。与传统等离子体增强化学气相沉积方法相比,自主设计的等离子体增强化学气相沉积系统制备的碳膜硬度和弹性模量明显提升,碳膜sp3含量(摩尔分数)超过62.3%,制备出的碳膜具有典型的含氢四面体非晶碳膜特征,而非含氢碳膜,主要是由于水冷射频双螺旋电极与平板电极结合增强了粒子的轰击和离化率,提高了薄膜sp3含量。这为在工业中应用制备高硬度和弹性模量的含氢四面体非晶碳膜提供了可能。

, authors=许世鹏1, 2, 占发琦1, 郑月红1, 陈维铅1, 2, 喇培清1, authorsList=许世鹏, 占发琦, 郑月红, 陈维铅, 喇培清, authorCompany=null, correspAuthors=喇培清, authorNote=

许世鹏(1987—),男,博士研究生,副教授。

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喇培清(1971—),男,博士,教授。
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含氢四面体非晶碳膜的制备与结构及力学性能
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许世鹏 1, 2 , 占发琦 1 , 郑月红 1 , 陈维铅 1, 2 , 喇培清 1
硅酸盐学报 | 研究论文 2022,50(10): 2651-2656
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硅酸盐学报 |研究论文 2022 , 50 (10) : 2651 -2656
含氢四面体非晶碳膜的制备与结构及力学性能
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许世鹏1, 2 , 占发琦1, 郑月红1, 陈维铅1, 2, 喇培清1
作者信息
  • 1.有色金属先进加工与再利用国家重点实验室,兰州理工大学,兰州 730050
  • 2.甘肃省太阳能发电系统工程重点实验室,酒泉职业技术学院,甘肃 酒泉 735000
通讯作者:
喇培清(1971—),男,博士,教授。
作者简介:

许世鹏(1987—),男,博士研究生,副教授。

Preparation, Microstructure and Mechanical Properties of Hydrogenated Tetrahedral Amorphous Carbon Films
Shipeng XU1, 2 , Faqi ZHAN1, Yuehong ZHENG1, Weiqian CHEN1, 2, Peiqing LA1
Affiliations
  • 1.State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, Lanzhou University of Technology, Lanzhou 730050, China
  • 2.Key Laboratory of Solar Power System Engineering, Gansu Province, Jiuquan Vocational and Technical College, Jiuquan 735000, Gansu, China
  • Corresponding Author:
    LA Peiqing (1971-), female, Ph.D., Professor. E-mail:

    XU Shipeng (1987-), male, Doctoral candidate, Associate Professor. E-mail:

出版时间: 2022-10-20 doi: 10.14062/j.issn.0454-5648.20220173
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采用化学气相沉积法制备具有优异力学性能的含氢四面体非晶碳膜有望满足工业应用的要求。通过自主设计的等离子体增强化学气相沉积实验系统制备含氢四面体非晶碳膜,并对其微观结构与力学性能进行研究。随着偏压从-200 V增加到-500 V,薄膜硬度和弹性模量先增加后减少,最大达到34.0 GPa和282.0 GPa。压应力随着偏压的变化表现出相同的变化趋势。与传统等离子体增强化学气相沉积方法相比,自主设计的等离子体增强化学气相沉积系统制备的碳膜硬度和弹性模量明显提升,碳膜sp3含量(摩尔分数)超过62.3%,制备出的碳膜具有典型的含氢四面体非晶碳膜特征,而非含氢碳膜,主要是由于水冷射频双螺旋电极与平板电极结合增强了粒子的轰击和离化率,提高了薄膜sp3含量。这为在工业中应用制备高硬度和弹性模量的含氢四面体非晶碳膜提供了可能。

含氢四面体非晶碳膜  /  力学性能  /  等离子增强化学气相沉积  /  微观结构

Preparation of hydrogenated tetrahedral amorphous carbon (ta-C:H) films with good mechanical properties by plasma-enhanced chemical vapor deposition (PECVD) is expected to meet requirement in industrial application. This paper reported the microstructure and mechanical properties of (ta-C:H) films prepared by a self-designed PECVD technique. As the bias voltage varies from -200 V to -500 V, the hardness and elastic modulus first decrease and then increase, reaching the maximum values of 34.0 GPa and 282.0 GPa respectively. The evolution of compressive stress with bias voltage shows a similar trend. In this case, the hardness and elastic modulus of films prepared by the self-designed PECVD technique both are improved, compared with those by the conventional PECVD methods. The mole fraction of sp3 hybridized bond is greater than 62.3% when the bias voltage changes from -200 V to -500 V. Carbon films were deposited using the self-designed PECVD technique, showing the typical characteristics of ta-C:H films. This can be attributed to the increased ion bombardment and ionization due to the incorporation of a water-cooled radio frequency double helix electrode and a plate electrode resulting in an enhanced sp3 content. This paper provides a promising technology to fabricate ta-C:H films with high hardness and elastic modulus for industrial applications.

hydrogenated tetrahedral amorphous carbon films  /  mechanical properties  /  plasma-enhanced chemical vapor deposition  /  microstructure
许世鹏, 占发琦, 郑月红, 陈维铅, 喇培清. 含氢四面体非晶碳膜的制备与结构及力学性能. 硅酸盐学报, 2022 , 50 (10) : 2651 -2656 . DOI: 10.14062/j.issn.0454-5648.20220173
Shipeng XU, Faqi ZHAN, Yuehong ZHENG, Weiqian CHEN, Peiqing LA. Preparation, Microstructure and Mechanical Properties of Hydrogenated Tetrahedral Amorphous Carbon Films[J]. Journal of the Chinese Ceramic Society, 2022 , 50 (10) : 2651 -2656 . DOI: 10.14062/j.issn.0454-5648.20220173
  • 甘肃省科技计划项目(18YF1WA069)
  • 甘肃省高等学校创新能力提升项目(2020A-030; 2020A-286; 2022B-475)
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2022年第50卷第10期
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doi: 10.14062/j.issn.0454-5648.20220173
  • 接收时间:2022-03-13
  • 首发时间:2026-10-20
  • 出版时间:2022-10-20
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  • 收稿日期:2022-03-13
  • 修回日期:2022-04-12
基金
甘肃省科技计划项目(18YF1WA069)
甘肃省高等学校创新能力提升项目(2020A-030; 2020A-286; 2022B-475)
作者信息
    1.有色金属先进加工与再利用国家重点实验室,兰州理工大学,兰州 730050
    2.甘肃省太阳能发电系统工程重点实验室,酒泉职业技术学院,甘肃 酒泉 735000

通讯作者:

喇培清(1971—),男,博士,教授。
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2种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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