Article(id=1319222277363839018, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319222240177144549, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20220468, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1655049600000, receivedDateStr=2022-06-13, revisedDate=1657987200000, revisedDateStr=2022-07-17, acceptedDate=null, acceptedDateStr=null, onlineDate=1792456700888, onlineDateStr=2026-10-20, pubDate=1674144000000, pubDateStr=2023-01-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1792456700888, onlineIssueDateStr=2026-10-20, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1792456700888, creator=13701087609, updateTime=1792456700888, updator=13701087609, issue=Issue{id=1319222240177144549, tenantId=1146029695717560320, journalId=1263187385517883426, year='2023', volume='51', issue='1', pageStart='1', pageEnd='282', issueExtLink='null', onlineDate='null', pubDate='1674144000000', pubDateStr='2023-01-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=0, createTime=1792456692021, creator='13701087609', updateTime=1792456863865, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1319222960989262349, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319222240177144549, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1319222960989262350, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319222240177144549, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=145, endPage=151, ext={EN=ArticleExt(id=1319222277997178923, articleId=1319222277363839018, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Preparation and Photoelectric Properties of Nitrogen Doped Indium Oxide Films with Preferred Orientation, columnId=1263922769897599102, journalTitle=Journal of the Chinese Ceramic Society, columnName=Research Articles, runingTitle=null, highlight=null, articleAbstract=

In this work, for exploring the controlled growth strategy of indium-oxide-based semiconductor film with preferred orientation and investigating the effect of crystal orientation on the photoelectric property, nitrogen-doped indium oxide (In2O3:N) films with (222) and (440) preferred orientation were prepared on quartz (SiO2) substrate by magnetron sputtering, respectively. The crystal structure, surface morphology, elemental composition and optical bandgap of In2O3:N films were characterized by X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy and ultraviolet-visible spectrophotometer, respectively. The photoelectric properties of as-grown films with different preferred orientation were investigated. The results show that the nitrogen doping in In2O3:N films with different preferred orientation mainly is dominated by nitrogen substitutional oxygen. The band gap of indium oxide can be reduced to 2.89 eV by nitrogen doping. The In2O3:N film with (440) preferred orientation has a shorter photoresponse time than the (222) one.

, authors=Hui SUN1, Longhai SHEN1, Zitong LIU1, 2, Jianjin CHEN1, Ruixin ZHANG1, Jia CHENG1, Xinglai ZHANG2, authorsList=Hui SUN, Longhai SHEN, Zitong LIU, Jianjin CHEN, Ruixin ZHANG, Jia CHENG, Xinglai ZHANG, authorCompany=null, correspAuthors=Longhai SHEN, Xinglai ZHANG, authorNote=

SUN Hui (1997-), male, Master candidate. E-mail:

, correspAuthorsNote=
SHEN Longhai (1977-), male, Ph.D., Professor. E-mail:
ZHANG Xinglai (1984-), male, Ph.D., Associate Professor.
, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1319222278303363116, articleId=1319222277363839018, tenantId=1146029695717560320, journalId=1263187385517883426, language=CN, title=择优取向氮掺杂氧化铟薄膜的制备及其光电性能, columnId=1263922770220560512, journalTitle=硅酸盐学报, columnName=研究论文, runingTitle=null, highlight=null, articleAbstract=

为探索氧化铟基半导体薄膜择优取向的控制生长策略,并探究晶面取向对光电性能的影响,采用磁控溅射技术在石英(SiO2)衬底上分别制备了具有(222)和(440)晶面择优取向的氮掺杂氧化铟(In2O3:N)薄膜,利用X射线衍射仪、扫描电子显微镜、X射线光电子能谱仪、紫外-可见分光光度计对In2O3:N薄膜的晶体结构、表面形貌、元素组成、光学带隙进行了表征,并研究了不同择优取向薄膜的光电特性。结果表明:不同择优取向In2O3:N薄膜的氮掺杂均以替位式为主,氮掺杂会导致氧化铟的禁带宽度减小至2.89 eV。相比(222)晶面择优取向,(440)晶面择优取向的In2O3:N薄膜的光响应时间更短。

, authors=孙辉1, 沈龙海1, 刘子童1, 2, 陈建金1, 张芮馨1, 程佳1, 张兴来2, authorsList=孙辉, 沈龙海, 刘子童, 陈建金, 张芮馨, 程佳, 张兴来, authorCompany=null, correspAuthors=沈龙海, 张兴来, authorNote=

孙辉(1997—),男,硕士研究生。

, correspAuthorsNote=
沈龙海(1977—),男,博士,教授;
张兴来(1984—),男,博士,副研究员。
, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=/YBrTHTAi1QzhGAG5mA+7w==, magXml=JPpLrmpJ+dRMT9U2xocA6g==, pdfUrl=null, pdf=l9qEIkQ/c1VipNKFICyk/w==, pdfFileSize=759038, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=1Fvj+SJQRetZO9Rw8ufIgw==, mapNumber=null, fund=null)}, authors=[Author(id=1322521458266456606, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=0, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=884131533@qq.com, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521458341954080, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458266456606, language=EN, stringName=Hui SUN, firstName=Hui, middleName=null, lastName=SUN, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio={"content":"

SUN Hui (1997-), male, Master candidate. E-mail:

"}, bioImg=null, bioContent=

SUN Hui (1997-), male, Master candidate. E-mail:

, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521458421645857, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458266456606, language=CN, stringName=孙辉, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio={"content":"

孙辉(1997—),男,硕士研究生。

"}, bioImg=null, bioContent=

孙辉(1997—),男,硕士研究生。

, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521458484560419, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=1, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=shenlonghai@163.com, emailSecond=null, emailThird=null, correspondingAuthor=1, authorType=1, ext={EN=AuthorExt(id=1322521458585223717, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458484560419, language=EN, stringName=Longhai SHEN, firstName=Longhai, middleName=null, lastName=SHEN, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521458648138278, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458484560419, language=CN, stringName=沈龙海, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521458715247144, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=2, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521458799133227, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458715247144, language=EN, stringName=Zitong LIU, firstName=Zitong, middleName=null, lastName=LIU, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, 2, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China
2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521458857853484, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458715247144, language=CN, stringName=刘子童, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, 2, address=1.沈阳理工大学理学院,沈阳 110159
2.中国科学院金属研究所,沈阳 110016, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)]), AuthorCompany(id=1322521458195153434, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=2., ext=[AuthorCompanyExt(id=1322521458203542043, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China), AuthorCompanyExt(id=1322521458211930652, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.中国科学院金属研究所,沈阳 110016)])]), Author(id=1322521458924962350, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=3, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521458996265520, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458924962350, language=EN, stringName=Jianjin CHEN, firstName=Jianjin, middleName=null, lastName=CHEN, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459071762993, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458924962350, language=CN, stringName=陈建金, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521459155649075, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=4, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521459214369333, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459155649075, language=EN, stringName=Ruixin ZHANG, firstName=Ruixin, middleName=null, lastName=ZHANG, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459281478198, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459155649075, language=CN, stringName=张芮馨, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521459348587064, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=5, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521459440861754, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459348587064, language=EN, stringName=Jia CHENG, firstName=Jia, middleName=null, lastName=CHENG, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459524747835, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459348587064, language=CN, stringName=程佳, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521459608633917, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=6, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=zhangxl@imr.ac.cn, emailSecond=null, emailThird=null, correspondingAuthor=1, authorType=1, ext={EN=AuthorExt(id=1322521459700908607, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459608633917, language=EN, stringName=Xinglai ZHANG, firstName=Xinglai, middleName=null, lastName=ZHANG, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=2, address=2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459780600384, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459608633917, language=CN, stringName=张兴来, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=2, address=2.中国科学院金属研究所,沈阳 110016, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458195153434, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=2., ext=[AuthorCompanyExt(id=1322521458203542043, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China), AuthorCompanyExt(id=1322521458211930652, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.中国科学院金属研究所,沈阳 110016)])])], keywords=[Keyword(id=1322521460019675713, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=EN, orderNo=1, keyword=nitrogen-doped indium oxide), Keyword(id=1322521460099367490, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=EN, orderNo=2, keyword=magnetron sputtering), Keyword(id=1322521460195836483, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=EN, orderNo=3, keyword=preferred orientation), Keyword(id=1322521460283916868, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=EN, orderNo=4, keyword=photoelectric detection), Keyword(id=1322521460363608645, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=CN, orderNo=1, keyword=氮掺杂氧化铟), Keyword(id=1322521460439106118, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=CN, orderNo=2, keyword=磁控溅射), Keyword(id=1322521460506214983, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=CN, orderNo=3, keyword=择优取向), Keyword(id=1322521462167159368, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, language=CN, orderNo=4, keyword=光电探测)], refs=null, funds=[Fund(id=1322521462313960009, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, awardId=12274304, language=CN, fundingSource=国家自然科学基金(12274304), fundOrder=null, country=null), Fund(id=1322521462402040394, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, awardId=202004, language=CN, fundingSource=超硬材料国家重点实验室开放课题(202004), fundOrder=null, country=null), Fund(id=1322521462481732171, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, awardId=2019197, language=CN, fundingSource=中国科学院青年创新促进会项目(2019197), fundOrder=null, country=null)], companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)]), AuthorCompany(id=1322521458195153434, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=2., ext=[AuthorCompanyExt(id=1322521458203542043, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China), AuthorCompanyExt(id=1322521458211930652, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.中国科学院金属研究所,沈阳 110016)])], figs=null, attaches=null, journal=Journal(id=1263186332462366751, delFlag=0, nameCn=硅酸盐学报, nameEn=Journal of the Chinese Ceramic Society, nameHistory1=null, nameHistory2=null, issn=0454-5648, eissn=null, cn=11-2310/TQ, coden=null, periodic=0, language=CN, oaType=null, ccby=null, superviseOffice=null, ownerOffice=null, pubOffice=null, editorOffice=null, officeType=null, aims=null, clcCode=null, officeProv=null, officeCity=null, officeAddr=null, officeZip=null, officeEmail=null, officePhone=null, editDirector=null, officeDirector=null, officeDirectorPhone=null, officeStaffNum=null, officeEmpNum=null, coverPicUrl=8Qg1+Is+LeRD1Lv6UJcXRg==, journalPrice=null, startedYear=null, abbrevIsoEn=Journal of the Chinese Ceramic Society, journalRemark=null, publicationField=null, createdTime=1779096690528, updatedTime=1788951192520, createdBy=18614031015, updatedBy=13041195026, firstLetterCn=G, firstLetterEn=G, subjectCode=Engineering, subjectName=null, subjectCodeEn=Engineering, subjectNameEn=null, picCn=8Qg1+Is+LeRD1Lv6UJcXRg==, picEn=AY9tl+TwuKtB81GF+w4WAg==, jcr=null, cjcr=null, exts=[JournalExt(id=1304519110767960749, language=CN, name=硅酸盐学报, nameHistory1=null, nameHistory2=null, managedBy=, sponsoredBy=, publishedBy=, editorOffice=, officeProv=null, officeCity=null, officeAddr=, officeZip=, editDirector=, officeDirector=null, officePhone=null, coverPicUrl=null, journalRemark=, submitArticleUrl=null, websiteUrl=, createdTime=1788951192800, updatedTime=1788951192800, createdBy=13041195026, updatedBy=13041195026, submissionGuidelinesUrl=, submissionAuthorUrl=https://gxyb.cbpt.cnki.net/index.aspx?t=1, submissionEditorUrl=https://gxyb.cbpt.cnki.net/index.aspx?t=3, submissionReviewUrl=https://gxyb.cbpt.cnki.net/index.aspx?t=2, submissionCeEditorUrl=, submissionAeEditorUrl=, option={"copyright":""}), JournalExt(id=1304519110839263918, language=EN, name=Journal of the Chinese Ceramic Society, nameHistory1=null, nameHistory2=null, managedBy=, sponsoredBy=, publishedBy=, editorOffice=, officeProv=null, officeCity=null, officeAddr=, officeZip=, editDirector=, officeDirector=null, officePhone=null, coverPicUrl=null, journalRemark=, submitArticleUrl=null, websiteUrl=, createdTime=1788951192817, updatedTime=1788951192817, createdBy=13041195026, updatedBy=13041195026, submissionGuidelinesUrl=, submissionAuthorUrl=https://gxyb.cbpt.cnki.net/index.aspx?t=1, submissionEditorUrl=https://gxyb.cbpt.cnki.net/index.aspx?t=3, submissionReviewUrl=https://gxyb.cbpt.cnki.net/index.aspx?t=2, submissionCeEditorUrl=, submissionAeEditorUrl=, option={"copyright":""})], databaseList=null, tenantJournalId=1263187385517883426, websiteList=[Website(id=1263188159895093557, webName=null, webTitle=null, webDomain=null, webCopyrigh=null, webIpcNo=null, seoTitle=null, seoKeywords=null, seoDescription=null, tenantJournalId=null, journalId=1263187385517883426, journalNameCn=null, journalNameEn=null, grayFlag=null, tenantId=1146029695717560320, platformId=null, journalGroupId=null, journalGroupNameCn=null, journalGroupNameEn=null, type=1, domain=https://castjournals.cast.org.cn/joweb/gsyxb/CN, language=CN, createTime=1779097126220, createBy=18614031015, updateTime=1779097837121, updateBy=18614031015, name=硅酸盐学报-中文, tplId=1146099689490845704, title=硅酸盐学报, delFlag=0, indexPage=/home, props=[WebsiteProps(id=1263191261578649862, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=articleTextType, value=kx, createTime=1779097865719, updateTime=1779097865719, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261545095427, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=banner, value=null, createTime=1779097865711, updateTime=1779097865711, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261599621385, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=grayFlag, value=0, createTime=1779097865724, updateTime=1779097865724, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261532512514, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=logo, value=https://castjournals.cast.org.cn/joweb/gsyxb/CN/file/pic?fileId=Oqq9gXZG0JiYeHvLNwX/eg==, createTime=1779097865708, updateTime=1779097865708, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261620592907, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=minRunFlag, value=0, createTime=1779097865729, updateTime=1779097865729, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261574455557, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=picServerUrl, value=https://castjournals.cast.org.cn/joweb/gsyxb/CN/file/pic, createTime=1779097865718, updateTime=1779097865718, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261616398602, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=silenceFlag, value=0, createTime=1779097865728, updateTime=1779097865728, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261566066948, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=staticResourcePath, value=https://castjournals.cast.org.cn/joweb/cast_kjdb_cn_619/, createTime=1779097865716, updateTime=1779097865716, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261587038471, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=themeColor, value=null, createTime=1779097865721, updateTime=1779097865721, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191261591232776, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188159895093557, code=themeStyle, value=null, createTime=1779097865722, updateTime=1779097865722, creator=18614031015, updator=18614031015)]), Website(id=1263188160188694841, webName=null, webTitle=null, webDomain=null, webCopyrigh=null, webIpcNo=null, seoTitle=null, seoKeywords=null, seoDescription=null, tenantJournalId=null, journalId=1263187385517883426, journalNameCn=null, journalNameEn=null, grayFlag=null, tenantId=1146029695717560320, platformId=null, journalGroupId=null, journalGroupNameCn=null, journalGroupNameEn=null, type=1, domain=https://castjournals.cast.org.cn/joweb/gsyxb/EN, language=EN, createTime=1779097126348, createBy=18614031015, updateTime=1779097825280, updateBy=18614031015, name=硅酸盐学报-英文, tplId=1146101810881728533, title=Journal of the Chinese Ceramic Society, delFlag=0, indexPage=/home, props=[WebsiteProps(id=1263191231102836987, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=articleTextType, value=kx, createTime=1779097858453, updateTime=1779097858453, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231052505336, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=banner, value=null, createTime=1779097858441, updateTime=1779097858441, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231186723070, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=grayFlag, value=0, createTime=1779097858473, updateTime=1779097858473, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231039922423, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=logo, value=https://castjournals.cast.org.cn/joweb/gsyxb/EN/file/pic?fileId=Oqq9gXZG0JiYeHvLNwX/eg==, createTime=1779097858438, updateTime=1779097858438, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231358689536, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=minRunFlag, value=0, createTime=1779097858514, updateTime=1779097858514, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231094448378, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=picServerUrl, value=https://castjournals.cast.org.cn/joweb/gsyxb/EN/file/pic, createTime=1779097858451, updateTime=1779097858451, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231195111679, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=silenceFlag, value=0, createTime=1779097858475, updateTime=1779097858475, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231086059769, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=staticResourcePath, value=https://castjournals.cast.org.cn/joweb/cast_kjdb_en_623/, createTime=1779097858449, updateTime=1779097858449, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231111225596, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=themeColor, value=null, createTime=1779097858455, updateTime=1779097858455, creator=18614031015, updator=18614031015), WebsiteProps(id=1263191231144780029, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1263188160188694841, code=themeStyle, value=null, createTime=1779097858463, updateTime=1779097858463, creator=18614031015, updator=18614031015)])], journalTitle=硅酸盐学报, weixinUrl=null, journalUrl=https://jccsoc.cbpt.cnki.net/, iacademicId=null, status=1, seqNo=null, journalTitleEn=Journal of the Chinese Ceramic Society, journalPhotoCn=8Qg1+Is+LeRD1Lv6UJcXRg==, journalPhotoEn=AY9tl+TwuKtB81GF+w4WAg==, journalFirstLetter=G, journalRecommend=null, journalNew=null, journalCollection=null, jcrJf=null, cjcrJf=null, jcrJfStr=null, cjcrJfStr=null, submissionFirstDecision=null, sciSubjectClassification=null, casSubjectClassification=null, citeScore=null, totalCitationFrequency=null, icpCode=null, psCode=null, advertisingLicenseCode=null, copyrightInformation=null, country=null, option=, provinceCode=null, provinceName=null, collectFlag=false, interPubPlatform=, interPubPlatformUrl=null), detailUrlCn=https://castjournals.cast.org.cn/joweb/gsyxb/CN/10.14062/j.issn.0454-5648.20220468, detailUrlEn=https://castjournals.cast.org.cn/joweb/gsyxb/EN/10.14062/j.issn.0454-5648.20220468, pdfUrlCn=https://castjournals.cast.org.cn/joweb/gsyxb/CN/PDF/10.14062/j.issn.0454-5648.20220468, pdfUrlEn=https://castjournals.cast.org.cn/joweb/gsyxb/EN/PDF/10.14062/j.issn.0454-5648.20220468, aliStartDate=0, aliEndDate=0, collectionFlag=false, citedCount=null, citedUrl=null, previewStatus=0, delFlag=0, hasFullText=0, orderTime=1674144000000, fullTextJson=null, articleText=null, reference=null)
收藏切换
择优取向氮掺杂氧化铟薄膜的制备及其光电性能
收藏切换
PDF下载
孙辉 1 , 沈龙海 1 , 刘子童 1, 2 , 陈建金 1 , 张芮馨 1 , 程佳 1 , 张兴来 2
硅酸盐学报 | 研究论文 2023,51(1): 145-151
收起
收藏切换
硅酸盐学报 |研究论文 2023 , 51 (1) : 145 -151
择优取向氮掺杂氧化铟薄膜的制备及其光电性能
全屏
[Author(id=1322521458266456606, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=0, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=884131533@qq.com, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521458341954080, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458266456606, language=EN, stringName=Hui SUN, firstName=Hui, middleName=null, lastName=SUN, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio={"content":"

SUN Hui (1997-), male, Master candidate. E-mail:

"}, bioImg=null, bioContent=

SUN Hui (1997-), male, Master candidate. E-mail:

, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521458421645857, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458266456606, language=CN, stringName=孙辉, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio={"content":"

孙辉(1997—),男,硕士研究生。

"}, bioImg=null, bioContent=

孙辉(1997—),男,硕士研究生。

, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521458484560419, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=1, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=shenlonghai@163.com, emailSecond=null, emailThird=null, correspondingAuthor=1, authorType=1, ext={EN=AuthorExt(id=1322521458585223717, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458484560419, language=EN, stringName=Longhai SHEN, firstName=Longhai, middleName=null, lastName=SHEN, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521458648138278, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458484560419, language=CN, stringName=沈龙海, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521458715247144, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=2, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521458799133227, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458715247144, language=EN, stringName=Zitong LIU, firstName=Zitong, middleName=null, lastName=LIU, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, 2, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China
2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521458857853484, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458715247144, language=CN, stringName=刘子童, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, 2, address=1.沈阳理工大学理学院,沈阳 110159
2.中国科学院金属研究所,沈阳 110016, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)]), AuthorCompany(id=1322521458195153434, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=2., ext=[AuthorCompanyExt(id=1322521458203542043, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China), AuthorCompanyExt(id=1322521458211930652, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.中国科学院金属研究所,沈阳 110016)])]), Author(id=1322521458924962350, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=3, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521458996265520, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458924962350, language=EN, stringName=Jianjin CHEN, firstName=Jianjin, middleName=null, lastName=CHEN, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459071762993, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521458924962350, language=CN, stringName=陈建金, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521459155649075, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=4, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521459214369333, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459155649075, language=EN, stringName=Ruixin ZHANG, firstName=Ruixin, middleName=null, lastName=ZHANG, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459281478198, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459155649075, language=CN, stringName=张芮馨, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521459348587064, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=5, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=null, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322521459440861754, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459348587064, language=EN, stringName=Jia CHENG, firstName=Jia, middleName=null, lastName=CHENG, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.School of Science, Shenyang Ligong University, Shenyang 110159, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459524747835, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459348587064, language=CN, stringName=程佳, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=1, address=1.沈阳理工大学理学院,沈阳 110159, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458111267351, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=1., ext=[AuthorCompanyExt(id=1322521458123850264, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.School of Science, Shenyang Ligong University, Shenyang 110159, China), AuthorCompanyExt(id=1322521458132238873, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458111267351, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1.沈阳理工大学理学院,沈阳 110159)])]), Author(id=1322521459608633917, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, orderNo=6, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=zhangxl@imr.ac.cn, emailSecond=null, emailThird=null, correspondingAuthor=1, authorType=1, ext={EN=AuthorExt(id=1322521459700908607, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459608633917, language=EN, stringName=Xinglai ZHANG, firstName=Xinglai, middleName=null, lastName=ZHANG, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=2, address=2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=1322521459780600384, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, authorId=1322521459608633917, language=CN, stringName=张兴来, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=2, address=2.中国科学院金属研究所,沈阳 110016, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=[AuthorCompany(id=1322521458195153434, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, xref=2., ext=[AuthorCompanyExt(id=1322521458203542043, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China), AuthorCompanyExt(id=1322521458211930652, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222277363839018, companyId=1322521458195153434, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=2.中国科学院金属研究所,沈阳 110016)])])]
孙辉1 , 沈龙海1 , 刘子童1, 2, 陈建金1, 张芮馨1, 程佳1, 张兴来2
作者信息
  • 1.沈阳理工大学理学院,沈阳 110159
  • 2.中国科学院金属研究所,沈阳 110016
通讯作者:
沈龙海(1977—),男,博士,教授;
张兴来(1984—),男,博士,副研究员。
作者简介:

孙辉(1997—),男,硕士研究生。

Preparation and Photoelectric Properties of Nitrogen Doped Indium Oxide Films with Preferred Orientation
Hui SUN1 , Longhai SHEN1 , Zitong LIU1, 2, Jianjin CHEN1, Ruixin ZHANG1, Jia CHENG1, Xinglai ZHANG2
Affiliations
  • 1.School of Science, Shenyang Ligong University, Shenyang 110159, China
  • 2.Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China
  • Corresponding Author:
    SHEN Longhai (1977-), male, Ph.D., Professor. E-mail:
    ZHANG Xinglai (1984-), male, Ph.D., Associate Professor.

    SUN Hui (1997-), male, Master candidate. E-mail:

出版时间: 2023-01-20 doi: 10.14062/j.issn.0454-5648.20220468
文章导航
收藏切换

为探索氧化铟基半导体薄膜择优取向的控制生长策略,并探究晶面取向对光电性能的影响,采用磁控溅射技术在石英(SiO2)衬底上分别制备了具有(222)和(440)晶面择优取向的氮掺杂氧化铟(In2O3:N)薄膜,利用X射线衍射仪、扫描电子显微镜、X射线光电子能谱仪、紫外-可见分光光度计对In2O3:N薄膜的晶体结构、表面形貌、元素组成、光学带隙进行了表征,并研究了不同择优取向薄膜的光电特性。结果表明:不同择优取向In2O3:N薄膜的氮掺杂均以替位式为主,氮掺杂会导致氧化铟的禁带宽度减小至2.89 eV。相比(222)晶面择优取向,(440)晶面择优取向的In2O3:N薄膜的光响应时间更短。

氮掺杂氧化铟  /  磁控溅射  /  择优取向  /  光电探测

In this work, for exploring the controlled growth strategy of indium-oxide-based semiconductor film with preferred orientation and investigating the effect of crystal orientation on the photoelectric property, nitrogen-doped indium oxide (In2O3:N) films with (222) and (440) preferred orientation were prepared on quartz (SiO2) substrate by magnetron sputtering, respectively. The crystal structure, surface morphology, elemental composition and optical bandgap of In2O3:N films were characterized by X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy and ultraviolet-visible spectrophotometer, respectively. The photoelectric properties of as-grown films with different preferred orientation were investigated. The results show that the nitrogen doping in In2O3:N films with different preferred orientation mainly is dominated by nitrogen substitutional oxygen. The band gap of indium oxide can be reduced to 2.89 eV by nitrogen doping. The In2O3:N film with (440) preferred orientation has a shorter photoresponse time than the (222) one.

nitrogen-doped indium oxide  /  magnetron sputtering  /  preferred orientation  /  photoelectric detection
孙辉, 沈龙海, 刘子童, 陈建金, 张芮馨, 程佳, 张兴来. 择优取向氮掺杂氧化铟薄膜的制备及其光电性能. 硅酸盐学报, 2023 , 51 (1) : 145 -151 . DOI: 10.14062/j.issn.0454-5648.20220468
Hui SUN, Longhai SHEN, Zitong LIU, Jianjin CHEN, Ruixin ZHANG, Jia CHENG, Xinglai ZHANG. Preparation and Photoelectric Properties of Nitrogen Doped Indium Oxide Films with Preferred Orientation[J]. Journal of the Chinese Ceramic Society, 2023 , 51 (1) : 145 -151 . DOI: 10.14062/j.issn.0454-5648.20220468
  • 国家自然科学基金(12274304)
  • 超硬材料国家重点实验室开放课题(202004)
  • 中国科学院青年创新促进会项目(2019197)
参考文献 引证文献
排序方式:
2023年第51卷第1期
PDF下载
51
8
引用本文
BibTeX
文章信息
doi: 10.14062/j.issn.0454-5648.20220468
  • 接收时间:2022-06-13
  • 首发时间:2026-10-20
  • 出版时间:2023-01-20
补充材料
相关文章
文章信息
作者
出版历史
  • 收稿日期:2022-06-13
  • 修回日期:2022-07-17
基金
国家自然科学基金(12274304)
超硬材料国家重点实验室开放课题(202004)
中国科学院青年创新促进会项目(2019197)
作者信息
    1.沈阳理工大学理学院,沈阳 110159
    2.中国科学院金属研究所,沈阳 110016

通讯作者:

沈龙海(1977—),男,博士,教授;
张兴来(1984—),男,博士,副研究员。
参考文献
分享链接
https://castjournals.cast.org.cn/joweb/gsyxb/CN/10.14062/j.issn.0454-5648.20220468
分享至
全文二维码

扫描看全文

引用本文
BibTeX
本文的引用情况
2种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
关闭全屏