硅酸盐学报

薄膜制备技术及其在固体氧化物电池技术发展中的应用

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陈光颖 ¹ , 王博 ² , 管晓敏 ¹ , 吴亮 ¹ , 姚海朝 ² , 陈楚 ² , 乐忠威 ² , 郭美婷 ² , 李智姗 ² , 蒋三平 ²

硅酸盐学报 | 综合评述 2026,54(4): 1466-1489

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硅酸盐学报 | 综合评述 2026, 54(4): 1466-1489

薄膜制备技术及其在固体氧化物电池技术发展中的应用

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陈光颖¹, 王博², 管晓敏¹, 吴亮¹, 姚海朝², 陈楚², 乐忠威², 郭美婷², 李智姗², 蒋三平²

作者信息

^1．上海氢器时代科技有限公司，上海 200245

^2．佛山仙湖实验室，广东佛山 528216

陈光颖（1992—），女，硕士，工程师。

CHEN Guangying (1992-), female, Master, Engineer. E-mail: chengy7@shanghai-electric.com

通讯作者:

王博（1997—），男，硕士，工程师

姚海朝（1997—），男，硕士，工程师

蒋三平（1957—），男，博士，教授。

Thin Film Fabrication Technologies and Applications for Solid Oxide Cells

Guangying CHEN¹, Bo WANG², Xiaomin GUAN¹, Liang WU¹, Haichao YAO², Chu CHEN², Zhongwei YUE², Meiting GUO², Zhishan LI², Sanping JIANG²

Affiliations

^1.Shanghai Bright-H Technology Co. Ltd., Shanghai 200003, China

^2.National Energy Key Laboratory for New Hydrogen-Ammonia Energy Technologies, Foshan Xianhu Laboratory, Foshan 528200, Guangdong, China

出版时间: 2026-03-12 doi: 10.14062/j.issn.0454-5648.20250664

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摘要

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固体氧化物电池（SOCs）是目前广泛认为的最高效且清洁的能源技术之一，在固体氧化物电解池（SOEC）模式下，它可将太阳能与风能产生的可再生能源转化为氢气等燃料的化学能；而在固体氧化物燃料电池（SOFC）模式下，则能将氢气和甲烷等蕴含的化学能转化为电能。SOCs是至少包括阳极、阴极、电解质以及互连体组成的多层结构，各层具有不同微观结构、电学及电化学性能。由于电解质层的离子电导率会随运行温度降低而大幅下降，尤其是当电解质层较厚时电池阻抗增加显著，所以早期SOCs的运行温度在900 ℃以上。降低SOCs运行温度可以大幅降低制造成本、材料成本和延缓性能衰退，但这也给电池制造带来了重大挑战，特别是制造具有高离子电导率的薄而致密的电解质薄膜。本文回顾和总结了近些年来SOCs薄膜制备相关工作对后续制备工艺研究的指导性意义，分类总结了SOCs的薄电解质膜、电极层及防护涂层的各种薄膜制备技术，讨论了各类薄膜制备技术的重要工艺参数和规模化生产适用性和经济可行性。

关键词

固体氧化物燃料电池 / 固体氧化物电解池 / 薄膜制备技术 / 电解质 / 保护层

Abstract

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Solid oxide cells (SOCs) are core technologies for sustainable energy transition, operating reversibly as solid oxide fuel cells (SOFCs) to convert chemical energy from fuels like hydrogen and methane into electricity, and as solid oxide electrolysis cells (SOECs) to store renewable energy via the valorization of carbon dioxide and water. Their performance depends on a multi-layer structure comprising anode, cathode, electrolyte, and interconnect. The conventional SOCs rely on high-temperature operation mainly due to the insufficient ionic conductivity of thick electrolyte layers at low temperatures, leading to excessive cell impedance. Reducing operating temperature is critical for cutting costs, via enabling the use of low-cost metal interconnects, and mitigating performance degradation, but this requires the fabrication of thin, dense electrolyte films to compensate for reduced conductivity and protective coatings for Cr-containing interconnects to prevent cathode poisoning. This review represents key thin-film fabrication technologies for SOCs (focusing on electrolytes and protective coatings), compares their strengths, limitations, and scalability, and outlines future research directions.

Thin-film technologies for SOCs are categorized into vapor deposition (i.e., chemical vapor deposition, CVD, and physical vapor deposition, PVD) and liquid precursor coating (i.e., sol-solution processes and colloid-slurry processes) based on phase transition pathways and energy input methods. Vapor deposition technologies mainly include chemical vapor deposition (CVD) and physical vapor deposition (PVD). CVD-based technologies form films through the reaction or decomposition of gaseous precursors, featuring good compositional uniformity and low-temperature film formation. Their derivative technologies realize the preparation of electrolyte films at medium and low temperatures, some of these technologies can prepare dense electrolytes but suffer from low growth efficiency, while others combining spray and flame synthesis can significantly optimize the electrode-electrolyte interface performance and reduce cell polarization impedance. Atomic Layer Deposition (ALD) achieves atomic-level thickness control through pulsed precursor supply, and when used for electrode modification or interlayer preparation, it can effectively enhance the performance of low-temperature batteries and improve stability. PVD-based technologies form films through physical processes in vacuum or low-pressure environments, and can prepare low-defect electrolyte films or interconnect protective coatings on low-temperature substrates, effectively solving the problem of chromium volatilization, some technologies can accurately deposit multi-component stoichiometric films, and the prepared batteries show excellent long-term stability. Plasma spraying technology can realize direct film formation without sintering, and the density of electrolytes can be significantly improved after optimization, but it is necessary to solve the defect problems during film formation.

Liquid precursor coating technologies are divided into sol-solution coating processes and colloid-slurry forming processes, both of which have the characteristics of low equipment cost and simple operation. Sol-solution processes include spin coating, dip coating, spray pyrolysis, and electrostatic spray deposition. Dense electrolyte films can be prepared through multiple coatings and subsequent treatments, and the thickness of functional layers can be accurately controlled to effectively optimize the interface conduction performance of batteries. Among them, electrostatic spray deposition combines high-voltage electric field and pyrolysis, enabling film formation at lower temperatures and improving electrode polarization characteristics. Colloid-slurry processes, mainly screen printing and tape casting, are the mainstream technologies for large-scale production. Screen printing forms films via scraping slurry, and the preparation temperature of functional layers can be effectively reduced and the battery performance can be improved through process optimization. Tape casting technology and various derivative technologies can produce wide ceramic tapes, which realize the mass production of high-performance batteries and construct gradient porous structures to further optimize mass transfer and interface bonding inside batteries.

A comprehensive comparison of these technologies reveals clear trade-offs. Low-cost, scalable options such as screen printing, tape casting, spin coating, and dip coating are preferred for industrialization due to simple equipment and low material costs, but they require optimization of slurry formulations and sintering processes to minimize defects like cracks and pores. High-performance, high-cost technologies (i.e., ALD, PLD, and low-pressure plasma spraying) deliver superior film density and composition control, but they are constrained by slow deposition rates, high equipment investment, or complex parameter tuning, limiting their use to specialized applications like ultra-thin electrolytes. Emerging technologies such as 3D printing and laser-assisted manufacturing show a promising potential for fabricating complex structures and simplifying co-sintering, but they lack the technical maturity for large-scale SOC production.

Summary and Prospects

In summary, SOCs thin film preparation technologies can form a diversified system, but some common challenges remain. Although vapor-phase technologies have excellent performance, they generally face high equipment costs and great difficulty in scaling up. Liquid-phase technologies are prone to film cracks or pores due to drying and sintering stress. Future research should focus on three core directions, i.e., 1) promoting intermediate and low-temperature operation, further expanding the low-temperature application range of batteries through interface regulation and film formation process optimization; 2) pursuing high performance, developing three-dimensional structured films to expand reaction interfaces and improve mass transfer and catalytic efficiency; and 3) accelerating commercialization, optimizing low-cost preparation processes combined with intelligent manufacturing technologies, and breaking through the key technical bottlenecks of new film formation technologies. Thin film preparation technology will continue to be a core breakthrough to solve the high-temperature dependence and performance attenuation of SOCs, promoting their transition from laboratory research to commercial application.

Key words

solid oxide fuel cells / solid oxide electrolysis cells / thin film fabrication technologies / electrolyte / protective layer

引用本文

陈光颖, 王博, 管晓敏, 吴亮, 姚海朝, 陈楚, 乐忠威, 郭美婷, 李智姗, 蒋三平. 薄膜制备技术及其在固体氧化物电池技术发展中的应用. 硅酸盐学报, 2026 , 54 (4) : 1466 -1489 . DOI: 10.14062/j.issn.0454-5648.20250664

Guangying CHEN, Bo WANG, Xiaomin GUAN, Liang WU, Haichao YAO, Chu CHEN, Zhongwei YUE, Meiting GUO, Zhishan LI, Sanping JIANG. Thin Film Fabrication Technologies and Applications for Solid Oxide Cells[J]. Journal of the Chinese Ceramic Society, 2026 , 54 (4) : 1466 -1489 . DOI: 10.14062/j.issn.0454-5648.20250664

基金

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佛山市仙湖实验室重点课题开放基金(32XHS2024-001)
仙湖实验室青年学者计划(XHQN2023−002)
国家外国专家个人计划（S类）(S20240283)
仙湖实验室重大科研计划(XHD2024-31000000-06)

参考文献

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2026年第54卷第4期

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文章信息

doi: 10.14062/j.issn.0454-5648.20250664

接收时间：2025-09-08
首发时间：2026-05-20
出版时间：2026-03-12

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出版历史

收稿日期：2025-09-08
修回日期：2025-10-14

基金

佛山市仙湖实验室重点课题开放基金(32XHS2024-001)

仙湖实验室青年学者计划(XHQN2023−002)

国家外国专家个人计划（S类）(S20240283)

仙湖实验室重大科研计划(XHD2024-31000000-06)

作者信息

^1．上海氢器时代科技有限公司，上海 200245

^2．佛山仙湖实验室，广东佛山 528216

通讯作者:

王博（1997—），男，硕士，工程师

姚海朝（1997—），男，硕士，工程师

蒋三平（1957—），男，博士，教授。

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https://castjournals.cast.org.cn/joweb/gsyxb/CN/10.14062/j.issn.0454-5648.20250664

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2种不同金属材料的力学参数

科 Family	属数 Number of genus	种数 Number of species	占总种数比例 Percentage of total species (%)	属 Genus	种数 Number of species	占总种数比例 Percentage of total species (%)
鹅膏菌科Amanitaceae	2	11	5.26	鹅膏菌属 Amanita	10	4.78
小菇科 Mycenaceae	2	12	5.74	丝盖伞属 Inocybe	5	2.39
多孔菌科 Polyporaceae	8	14	6.70	蜡蘑属 Laccaria	5	2.39
红菇科 Russulaceae	3	23	11.00	小皮伞属 Marasmius	6	2.87
				小菇属 Mycena	11	5.26
				光柄菇属 Pluteus	5	2.39
				红菇属 Russula	17	8.13
				栓菌属 Trametes	5	2.39

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