硅酸盐学报

具有渐变折射率、可变截面三维光波导的激光直写技术

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蔺瑾雯 ¹ , 邱建荣 ¹ , 王宇莹 ¹ , 韩旭虎 ¹ , 钟理京 ²

硅酸盐学报 | 先进玻璃材料技术与产业发展专题—综合评述 2025,53(10): 2899-2911

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硅酸盐学报 |先进玻璃材料技术与产业发展专题—综合评述 2025 , 53 (10) : 2899 -2911

具有渐变折射率、可变截面三维光波导的激光直写技术

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蔺瑾雯¹, 邱建荣¹, 王宇莹¹, 韩旭虎¹, 钟理京²

作者信息

^1．浙江大学光电科学与工程学院，极端光学技术与仪器全国重点实验室，杭州 310027

^2．宁波大学信息科学与工程学院，光+X交叉科学与技术研究院，浙江宁波 315211

通讯作者:

邱建荣（1964—），男，博士，教授。

作者简介:

蔺瑾雯（2005—），女，本科生；

邱建荣（1964—），男，博士，教授。

Direct-Writing Technique of Three-Dimensional Optical Waveguides with Gradient Refractive Index and Arbitrarily Variable Cross-Sections

Jinwen LIN¹, Jianrong QIU¹, Yuying WANG¹, Xuhu HAN¹, Lijing ZHONG²

Affiliations

^1.State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China

^2.Institute of Light+X Science and Technology, College of Information Science and Engineering, Ningbo University, Ningbo 315211, Zhejiang, China

Corresponding Author:

QIU Jianrong (1964-), male, Ph. D., Professor. E-mail: qjr@zju.edu.cn

LIN Jinwen (2005-), female, Undergraduate student. E-mail: 3220101949@zju.edu.cn

QIU Jianrong (1964-), male, Ph.D., Professor.

出版时间: 2025-10-20 doi: 10.14062/j.issn.0454-5648.20250477

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摘要

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飞秒激光具有超短脉冲宽度与超高峰值功率的特点，可实现基于高度非线性效应的透明材料内部的高精度三维微纳加工，已成为集成光电子器件制备的重要工具。近年来，基于多次扫描策略的飞秒激光直写技术可以实现波导截面几何形貌、模场及折射率分布的精细调控，已成为微结构光波导制备方向的研究热点。本文系统阐述了飞秒激光多次扫描在透明材料内部直写光波导的最新研究进展，重点分析该技术通过三维可变截面波导结构设计在有源/无源光波导器件、集成化量子光学芯片及天文光子学系统等领域的创新应用。进一步从波导截面形貌的精确调控、低损耗弯曲波导结构优化、跨尺度纵深直写技术等维度探讨了三维集成光子回路面临的关键技术挑战，展望实现全玻璃基三维光子芯片的未来发展趋势。

关键词

三维光波导 / 飞秒激光直写 / 可变截面 / 光波导器件

Abstract

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With the rapid advancement of high-performance optical computing and high-speed optical communication, a demand for more efficient and compact photonic systems has driven the development of three-dimensional photonic integrated circuits (3D PICs). The existing approaches for the fabrication of 3D integrated waveguides primarily involve two methods, i.e., 3D stacking technique and femtosecond laser direct-writing technique. 3D stacked integrated waveguides suffer from limitations such as high cost and fabrication complexity. In contrast, femtosecond laser direct writing (FLDW) technique, which offers advantages in surpassing diffraction limit and providing flexible 3D processing capability, has emerged as a promising technique for high-precision 3D micro-nano fabrication of integrated 3D photonic optical circuits.

Femtosecond laser, characterized by ultrashort pulse width and extremely high peak power, can result in material modifications in focal regions of transparent materials. These modifications are typically categorized into two types, i.e., Type-I and Type-II, corresponding to positive and negative refractive index changes within the material, respectively. 3D optical waveguides can be fabricated in transparent materials by using the two types of modifications. However, despite these impressive capabilities, femtosecond laser direct-writing still faces some challenges like the difficulty of fabricating waveguides with controllable cross-sectional geometries and low propagation losses. These issues are due to spherical aberrations caused by refractive index mismatches between the waveguide and the surrounding air, as well as nonlinear effects that degrade the performance of waveguides. A conventional solution to these problems is beam shaping technologies, i.e., slit beam shaping, astigmatic beam shaping, astigmatic beam shaping and spatial light modulator beam shaping. However, these strategies have drawbacks of large energy loss, complex operation, high transmission loss, and low quality of generated light field, respectively. There is an ongoing need for innovative methods that can overcome these issues.

To address the challenges above, multi-scan laser direct-writing technology gradually becomes a research hotspot in the field of microstructure optical waveguide fabrication. In this approach, the laser trajectory with full positive refractive index is carefully controlled in three-dimensional space, allowing for a more refined modification of the refractive index. The multi-scan method facilitates a precise control over the cross-sectional geometry, refractive index profile, and mode field distribution of waveguides via adjusting parameters such as the offset distance between laser scans and the scanning time.

This review first systematically describes the latest research progress on direct-written optical waveguides inside transparent materials by femtosecond laser multiple scanning. General methods for fabricating waveguides with precisely controlled refractive index profiles and well-defined cross-sectional geometries in glass and crystal substrates using the multi-scan strategy are described in details. This review also focuses on the innovative applications of this technique. The multi-scan technique can be used to fabricate active optical waveguide devices, such as variable cross-section waveguide amplifiers with high gain. It is also utilized to prepare passive optical waveguide devices, including optical beam splitters, 3D mode conversion devices, and photonic lanterns, which can pave a way for applications in the field of integrated quantum optics and astronomical photonics. In addition, this review discusses the key technical challenges currently faced by the 3D integrated photonic circuits from the dimensions of precise control of waveguide cross-sectional morphology, optimization of low-loss curved waveguide structures, and cross-large-depth direct-writing technology, and looks forward to the development trend of realizing all-glass-based three-dimensional photonic chips.

Summary and Prospects

Optical waveguides in transparent materials based on the multi-scan laser direct-writing technique are widely employed in the fabrication of three-dimensional integrated devices. The multi-scan laser direct-writing technique enables a precise control over the geometric symmetry of the waveguide cross-sections through the spatial superposition effect of laser-induced refractive index changes. Also, it simultaneously allows for submicron spatial modulation of the refractive index distributions and suppression of transmission losses, thus providing a novel approach for the design of on-chip mode conversion devices. Although the multi-scan laser direct-writing technique has significant advancements in recent years, several core challenges still remain in its practical application and ongoing industrialization. These challenges include a) minimizing losses in submillimeter-scale curved structures, b) maintaining consistent direct writing effects across millimeter-scale depths, and c) enabling the fabrication of dynamically reconfigurable photonic devices. To address these issues, a future research should focus on the development of a next-generation femtosecond laser processing system with adaptive compensation and multi-parameter coordinated control. Such innovations will be critical in overcoming the engineering barriers currently restricting the production of fully glassed, three-dimensional, monolithic integrated photonic chips.

Key words

three-dimensional optical waveguide / femtosecond laser direct-writing / variable cross-section / optical waveguide device

引用本文

蔺瑾雯, 邱建荣, 王宇莹, 韩旭虎, 钟理京. 具有渐变折射率、可变截面三维光波导的激光直写技术. 硅酸盐学报, 2025 , 53 (10) : 2899 -2911 . DOI: 10.14062/j.issn.0454-5648.20250477

Jinwen LIN, Jianrong QIU, Yuying WANG, Xuhu HAN, Lijing ZHONG. Direct-Writing Technique of Three-Dimensional Optical Waveguides with Gradient Refractive Index and Arbitrarily Variable Cross-Sections[J]. Journal of the Chinese Ceramic Society, 2025 , 53 (10) : 2899 -2911 . DOI: 10.14062/j.issn.0454-5648.20250477

基金

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国家自然科学基金(52432001)

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2025年第53卷第10期

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文章信息

doi: 10.14062/j.issn.0454-5648.20250477

接收时间：2025-04-15
首发时间：2026-10-21
出版时间：2025-10-20

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出版历史

收稿日期：2025-04-15
修回日期：2025-05-21

基金

国家自然科学基金(52432001)

作者信息

^1．浙江大学光电科学与工程学院，极端光学技术与仪器全国重点实验室，杭州 310027

^2．宁波大学信息科学与工程学院，光+X交叉科学与技术研究院，浙江宁波 315211

通讯作者:

邱建荣（1964—），男，博士，教授。

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https://castjournals.cast.org.cn/joweb/gsyxb/CN/10.14062/j.issn.0454-5648.20250477

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2种不同金属材料的力学参数

科 Family	属数 Number of genus	种数 Number of species	占总种数比例 Percentage of total species (%)	属 Genus	种数 Number of species	占总种数比例 Percentage of total species (%)
鹅膏菌科Amanitaceae	2	11	5.26	鹅膏菌属 Amanita	10	4.78
小菇科 Mycenaceae	2	12	5.74	丝盖伞属 Inocybe	5	2.39
多孔菌科 Polyporaceae	8	14	6.70	蜡蘑属 Laccaria	5	2.39
红菇科 Russulaceae	3	23	11.00	小皮伞属 Marasmius	6	2.87
				小菇属 Mycena	11	5.26
				光柄菇属 Pluteus	5	2.39
				红菇属 Russula	17	8.13
				栓菌属 Trametes	5	2.39

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