Article(id=1319222717543461377, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319222716851405704, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20230015, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1673366400000, receivedDateStr=2023-01-11, revisedDate=1675872000000, revisedDateStr=2023-02-09, acceptedDate=null, acceptedDateStr=null, onlineDate=1792456805835, onlineDateStr=2026-10-20, pubDate=1687190400000, pubDateStr=2023-06-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1792456805835, onlineIssueDateStr=2026-10-20, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1792456805835, creator=13701087609, updateTime=1792456805835, updator=13701087609, issue=Issue{id=1319222716851405704, tenantId=1146029695717560320, journalId=1263187385517883426, year='2023', volume='51', issue='6', pageStart='1373', pageEnd='1648', issueExtLink='null', onlineDate='null', pubDate='1687190400000', pubDateStr='2023-06-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=0, createTime=1792456805669, creator='13701087609', updateTime=1792456995739, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1319223514108903801, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319222716851405704, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1319223514108903802, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319222716851405704, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=1381, endPage=1389, ext={EN=ArticleExt(id=1319222717748982274, articleId=1319222717543461377, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Dynamic Evolution Behavior and Kinematic Characteristics of Each Pits on (111) Crystal Face of CaF₂ Crystals, columnId=1321890965510538116, journalTitle=Journal of the Chinese Ceramic Society, columnName=Special Topics Progress of Fundamental Research of Crystal Structures and Defects—Research Articles, runingTitle=null, highlight=null, articleAbstract=

The application of CaF₂ crystal in photolithographic machine becomes a hot research topic. However, differentdefects in the crystal seriously restrict its actual performance. In this paper, the morphological and spatial extension characteristics of etch pits formed by the crystal face (111) of CaF₂ crystal were observed, and the corresponding defect characteristics of various etch pits were analyzed, which is aprerequisite for the accurate characterization and control of crystal defects. The results show that the etch pits on the crystal face (111) of CaF₂ have three types, i.e., triangular conical pit, cone-flat bottom pit and flat bottom pit. Triangular conical pits and cone-flat bottom pits have directional movement characteristics, indicating that the corresponding defects of these pits are related to the dislocations of the materials. However, there is no spatial extension in the flat bottom pit, which is formed after the defects are completely corroded, and the corresponding defects may be the remains of local defects such as impurities, vacancies and small dislocation rings. The physical parameters of the formation process of the etch pit are obtained, and the kinematic model of the etch pit is establishedby tracking the evolution process of the etch pit in real time. This work provides a basis for further studiesonthe corrosion theory of crystal materials.

, authors=Gang TANG^{1, 2, 3}, Bo Zhang³, Mengjun LI^{3, 4}, Yongzhe WANG³, Huamin KOU³, Jingya WANG³, Zhonghan ZHANG³, Dapeng JIANG³, Liangbi SU^{1, 2, 3}, authorsList=Gang TANG, Bo Zhang, Mengjun LI, Yongzhe WANG, Huamin KOU, Jingya WANG, Zhonghan ZHANG, Dapeng JIANG, Liangbi SU, authorCompany=null, correspAuthors=Bo Zhang, Liangbi SU, authorNote=, correspAuthorsNote=, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1319222718063555075, articleId=1319222717543461377, tenantId=1146029695717560320, journalId=1263187385517883426, language=CN, title=CaF₂晶体(111)晶面腐蚀坑的动态演变行为与运动学特性, columnId=1321890966106129285, journalTitle=硅酸盐学报, columnName=晶体结构与缺陷相关基础研究进展专题—研究论文, runingTitle=null, highlight=null, articleAbstract=

CaF₂晶体在光刻机中应用成为国内外研究的热点，而晶体中存在各种缺陷严重制约其实际性能。本文跟踪观察了CaF₂晶体（111）晶面形成的腐蚀坑的形貌特征和空间延伸特性，并分析了各种腐蚀坑所对应的缺陷特性，是实现对晶体缺陷精确表征与控制的前提。研究表明：CaF₂晶体（111）晶面的腐蚀坑具有三角锥形坑、锥形-平底坑、平底坑3种类型。三角锥形坑与锥形-平底坑具有定向移动特性，这表明这类腐蚀坑所对应的缺陷与材料的位错相关，其中：三角锥形坑的坑尖又有3种不同的精细结构，因此所对应的位错至少有3种晶体学走向；而平底坑没有观测到具有空间延伸特性，是缺陷被完全腐蚀后留下的尸体残余，其所对应的缺陷可能是杂质、空位、小的位错环等。通过实时追踪腐蚀坑的演化过程，获得腐蚀坑形成过程的物理参数，建立蚀坑的运动学模型，这也为进一步研究晶体材料的腐蚀理论提供基础。

, authors=汤港^{1, 2, 3}, 张博³, 李梦君^{3, 4}, 王墉哲³, 寇华敏³, 王静雅³, 张中晗³, 姜大朋³, 苏良碧^{1, 2, 3}, authorsList=汤港, 张博, 李梦君, 王墉哲, 寇华敏, 王静雅, 张中晗, 姜大朋, 苏良碧, authorCompany=null, correspAuthors=张博, 苏良碧, authorNote=, correspAuthorsNote=, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=I2uVaqeSG6JbuELtvjn8gA==, magXml=dC1Ozc0bErjA2cQa+M2Wdg==, pdfUrl=null, pdf=BMyFadriSRA+XLKI0UfaLA==, pdfFileSize=1090468, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=QGkrT8iBfJCXnw5iXhZbMg==, mapNumber=null, fund=null)}, authors=[Author(id=1322532621876314934, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222717543461377, orderNo=0, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=0, email=2509628022@qq.com, emailSecond=null, emailThird=null, correspondingAuthor=0, authorType=1, ext={EN=AuthorExt(id=1322532621968589626, tenantId=1146029695717560320, journalId=1263187385517883426, articleId=1319222717543461377, authorId=1322532621876314934, language=EN, stringName=Gang TANG, firstName=Gang, middleName=null, lastName=TANG, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=^{1, 2, 3}, address=^1.School of Physics and Materials, Nanchang University, Nanchang 330031, China
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TANG Gang (1997-), male, Master candidate. E-mail: 2509628022@qq.com

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TANG Gang (1997-), male, Master candidate. E-mail: 2509628022@qq.com

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