Article(id=1319232574992536336, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319232566922695375, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20220073, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1643040000000, receivedDateStr=2022-01-25, revisedDate=1646236800000, revisedDateStr=2022-03-03, acceptedDate=null, acceptedDateStr=null, onlineDate=1792459156034, onlineDateStr=2026-10-20, pubDate=1658246400000, pubDateStr=2022-07-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1792459156034, onlineIssueDateStr=2026-10-20, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1792459156034, creator=13701087609, updateTime=1792459156034, updator=13701087609, issue=Issue{id=1319232566922695375, tenantId=1146029695717560320, journalId=1263187385517883426, year='2022', volume='50', issue='7', pageStart='1775', pageEnd='2066', issueExtLink='null', onlineDate='null', pubDate='1658246400000', pubDateStr='2022-07-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1792459154109, creator='13701087609', updateTime=1792460038980, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1319236278420357264, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319232566922695375, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1319236278420357265, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319232566922695375, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=1852, endPage=1864, ext={EN=ArticleExt(id=1319232575198057233, articleId=1319232574992536336, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Recent Development on High Thermal Conductivity Diamond Synthesized by Microwave Plasma Chemical Vapor Deposition and Its Devices Applications, columnId=1321891832468976209, journalTitle=Journal of the Chinese Ceramic Society, columnName=New Carbon Materials—Review, runingTitle=null, highlight=null, articleAbstract=

In the application of the third-generation semiconductors, the power density of electronic devices increases and the size is miniaturization. A problem of high temperature becomes more prominent. Diamond is one of the optimum heat dissipation materials because of its ultra-high thermal conductivity and stable properties. In this review, the design principle and development process of different microwave plasma chemical vapor deposition equipment were introduced. Recent developments on different thermal applications of single crystal, polycrystalline and nanocrystal diamond were represented. Some challenges in the industrialization process combined with the 3rd-generation-semiconductors and the development direction of "larger, purer and faster" were summarized. In addition, the future research direction of diamond heat dissipation application was also prospected.

, authors=Jiwen ZHAO1, Xiaobin HAO1, Kechen ZHAO1, Yicun LI1, Sen ZHANG1, Kang LIU1, Bing DAI1, Huaixin GUO2, Jiecai HAN1, Jiaqi ZHU1, 3, authorsList=Jiwen ZHAO, Xiaobin HAO, Kechen ZHAO, Yicun LI, Sen ZHANG, Kang LIU, Bing DAI, Huaixin GUO, Jiecai HAN, Jiaqi ZHU, authorCompany=null, correspAuthors=Jiaqi ZHU, authorNote=

ZHAO Jiwen (1994-), male, Doctoral candidate. E-mail:

, correspAuthorsNote=
ZHU Jiaqi (1974-), male, Professor. E-mail:
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随着第3代半导体的应用,电子器件向高功率、小型化发展,由此带来的“热”问题逐渐凸显,金刚石由于其超高的热导率及稳定的性质,被认为是最优的散热材料之一。简要介绍了微波等离子体化学气相沉积装备的原理及发展历程,对比分析了不同种类生长设备的差异,对单晶、多晶及纳米晶金刚石在器件散热应用中的现状进行总结,结合第3代半导体总结了金刚石增强散热产业化过程中将面临的性能与尺寸方面的瓶颈问题及金刚石材料“大、纯、快”的发展方向,并对散热应用的未来研究方向做出展望。

, authors=赵继文1, 郝晓斌1, 赵柯臣1, 李一村1, 张森1, 刘康1, 代兵1, 郭怀新2, 韩杰才1, 朱嘉琦1, 3, authorsList=赵继文, 郝晓斌, 赵柯臣, 李一村, 张森, 刘康, 代兵, 郭怀新, 韩杰才, 朱嘉琦, authorCompany=null, correspAuthors=朱嘉琦, authorNote=

赵继文(1994—),男,博士研究生。

, correspAuthorsNote=
朱嘉琦(1974—),男,教授。
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微波等离子体化学气相沉积法合成高导热金刚石材料及器件应用进展
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赵继文 1 , 郝晓斌 1 , 赵柯臣 1 , 李一村 1 , 张森 1 , 刘康 1 , 代兵 1 , 郭怀新 2 , 韩杰才 1 , 朱嘉琦 1, 3
硅酸盐学报 | 新型炭材料专题—综合评述 2022,50(7): 1852-1864
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硅酸盐学报 |新型炭材料专题—综合评述 2022 , 50 (7) : 1852 -1864
微波等离子体化学气相沉积法合成高导热金刚石材料及器件应用进展
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赵继文1 , 郝晓斌1, 赵柯臣1, 李一村1, 张森1, 刘康1, 代兵1, 郭怀新2, 韩杰才1, 朱嘉琦1, 3
作者信息
  • 1.哈尔滨工业大学,特种环境复合材料技术国家级重点实验室,哈尔滨 150080
  • 2.南京电子器件研究所,微波毫米波单片集成和模块电路重点实验室,南京 210006
  • 3.哈尔滨工业大学,微系统与微结构制造教育部重点实验室,哈尔滨 150080
通讯作者:
朱嘉琦(1974—),男,教授。
作者简介:

赵继文(1994—),男,博士研究生。

Recent Development on High Thermal Conductivity Diamond Synthesized by Microwave Plasma Chemical Vapor Deposition and Its Devices Applications
Jiwen ZHAO1 , Xiaobin HAO1, Kechen ZHAO1, Yicun LI1, Sen ZHANG1, Kang LIU1, Bing DAI1, Huaixin GUO2, Jiecai HAN1, Jiaqi ZHU1, 3
Affiliations
  • 1.National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
  • 2.Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing 210016, China
  • 3.Key Laboratory of Micro-Systems and Micro-Structures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin 150080, China
  • Corresponding Author:
    ZHU Jiaqi (1974-), male, Professor. E-mail:

    ZHAO Jiwen (1994-), male, Doctoral candidate. E-mail:

出版时间: 2022-07-20 doi: 10.14062/j.issn.0454-5648.20220073
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随着第3代半导体的应用,电子器件向高功率、小型化发展,由此带来的“热”问题逐渐凸显,金刚石由于其超高的热导率及稳定的性质,被认为是最优的散热材料之一。简要介绍了微波等离子体化学气相沉积装备的原理及发展历程,对比分析了不同种类生长设备的差异,对单晶、多晶及纳米晶金刚石在器件散热应用中的现状进行总结,结合第3代半导体总结了金刚石增强散热产业化过程中将面临的性能与尺寸方面的瓶颈问题及金刚石材料“大、纯、快”的发展方向,并对散热应用的未来研究方向做出展望。

金刚石  /  微波等离子体化学气相沉积  /  散热  /  氮化镓器件

In the application of the third-generation semiconductors, the power density of electronic devices increases and the size is miniaturization. A problem of high temperature becomes more prominent. Diamond is one of the optimum heat dissipation materials because of its ultra-high thermal conductivity and stable properties. In this review, the design principle and development process of different microwave plasma chemical vapor deposition equipment were introduced. Recent developments on different thermal applications of single crystal, polycrystalline and nanocrystal diamond were represented. Some challenges in the industrialization process combined with the 3rd-generation-semiconductors and the development direction of "larger, purer and faster" were summarized. In addition, the future research direction of diamond heat dissipation application was also prospected.

diamond  /  microwave plasma chemical vapor deposition  /  heat dissipation  /  gallium nitride devices
赵继文, 郝晓斌, 赵柯臣, 李一村, 张森, 刘康, 代兵, 郭怀新, 韩杰才, 朱嘉琦. 微波等离子体化学气相沉积法合成高导热金刚石材料及器件应用进展. 硅酸盐学报, 2022 , 50 (7) : 1852 -1864 . DOI: 10.14062/j.issn.0454-5648.20220073
Jiwen ZHAO, Xiaobin HAO, Kechen ZHAO, Yicun LI, Sen ZHANG, Kang LIU, Bing DAI, Huaixin GUO, Jiecai HAN, Jiaqi ZHU. Recent Development on High Thermal Conductivity Diamond Synthesized by Microwave Plasma Chemical Vapor Deposition and Its Devices Applications[J]. Journal of the Chinese Ceramic Society, 2022 , 50 (7) : 1852 -1864 . DOI: 10.14062/j.issn.0454-5648.20220073
  • 国家重点研发计划(2020YFA0709700)
  • 国家自然科学基金面上项目(52072087)
  • 广东省重点领域研发计划(2020B010169002)
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2022年第50卷第7期
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doi: 10.14062/j.issn.0454-5648.20220073
  • 接收时间:2022-01-25
  • 首发时间:2026-10-20
  • 出版时间:2022-07-20
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  • 收稿日期:2022-01-25
  • 修回日期:2022-03-03
基金
国家重点研发计划(2020YFA0709700)
国家自然科学基金面上项目(52072087)
广东省重点领域研发计划(2020B010169002)
作者信息
    1.哈尔滨工业大学,特种环境复合材料技术国家级重点实验室,哈尔滨 150080
    2.南京电子器件研究所,微波毫米波单片集成和模块电路重点实验室,南京 210006
    3.哈尔滨工业大学,微系统与微结构制造教育部重点实验室,哈尔滨 150080

通讯作者:

朱嘉琦(1974—),男,教授。
参考文献
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2种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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