Article(id=1319986893811470610, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319986871980118160, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20210537, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1625155200000, receivedDateStr=2021-07-02, revisedDate=1629820800000, revisedDateStr=2021-08-25, acceptedDate=null, acceptedDateStr=null, onlineDate=1792638999654, onlineDateStr=2026-10-22, pubDate=1652976000000, pubDateStr=2022-05-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1792638999654, onlineIssueDateStr=2026-10-22, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1792638999654, creator=13701087609, updateTime=1792638999654, updator=13701087609, issue=Issue{id=1319986871980118160, tenantId=1146029695717560320, journalId=1263187385517883426, year='2022', volume='50', issue='5', pageStart='1201', pageEnd='1454', issueExtLink='null', onlineDate='null', pubDate='1652976000000', pubDateStr='2022-05-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=0, createTime=1792638994450, creator='13701087609', updateTime=1792639285419, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1319988092451275233, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319986871980118160, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1319988092451275234, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1319986871980118160, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=1257, endPage=1262, ext={EN=ArticleExt(id=1319986894025380115, articleId=1319986893811470610, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Preparation of Cu2ZnSnS4 Thin Films Solar Cells Based on Magnetron Sputtering, columnId=1263922769897599102, journalTitle=Journal of the Chinese Ceramic Society, columnName=Research Articles, runingTitle=null, highlight=null, articleAbstract=

In order to solve a problem of Sn-loss and reduce the thickness of MoS2 during the sulfurization process, the oxygen containing Cu-Zn-Sn precursor thin films were prepared on Mo-coated soda lime glasses via magnetron sputtering ZnO/SnO2/Cu. The results show that the Sn-loss and the formation of MoS2 are well inhibited by the utilization of SnO2 and ZnO. The single-phase CZTS absorbed thin films with the smooth surface, dense grains and good crystal structure can be prepared at 590 ℃. Also, the CZTS solar cells from oxygen containing precursors annealed at 590 ℃ have an optimum power conversion efficiency (PCE) of 5.12% with an open circuit voltage of 590 mV, a short circuit current density of 22.09 mA/cm2 and a fill factor of 39.28%.

, authors=Xinyu LI, Daoyong ZHANG, Xiang LI, Qiulian LI, Xin LIU, Shurong WANG, authorsList=Xinyu LI, Daoyong ZHANG, Xiang LI, Qiulian LI, Xin LIU, Shurong WANG, authorCompany=null, correspAuthors=Shurong WANG, authorNote=

LI Xinyu (1995-), fermale, Master candidate. E-mail:

, correspAuthorsNote=
WANG Shurong (1968-), male, Ph.D., Professor. E-mail:
, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1319986894449004820, articleId=1319986893811470610, tenantId=1146029695717560320, journalId=1263187385517883426, language=CN, title=磁控溅射制备Cu2ZnSnS4薄膜太阳电池, columnId=1263922770220560512, journalTitle=硅酸盐学报, columnName=研究论文, runingTitle=null, highlight=null, articleAbstract=

为解决硫化过程中Sn元素损失的问题以及减少MoS2的厚度,采用磁控溅射技术,在基于钼的钠钙玻璃衬底上采用双周期溅射的方法,以ZnO/SnO2/Cu的顺序制备了含氧的Cu-Zn-Sn预制层。结果表明:SnO2以及ZnO的使用很好的抑制了Sn元素的损失以及MoS2层的形成,而且在590 ℃的硫化温度下能制备出表面平整、晶粒致密、晶体结构较好的单相Cu2ZnSnS4(CZTS)吸收层薄膜。最后,制备出结构完整的CZTS薄膜太阳电池,在590 ℃硫化制备的CZTS薄膜太阳电池效率最高,其开路电压为590 mV,短路电流密度为22.09 mA/cm2,填充因子为39.28%,光电转换效率达到5.12%,为今后制备高效CZTS薄膜太阳电池起到了推动作用。

, authors=李新毓, 张道永, 李祥, 李秋莲, 刘信, 王书荣, authorsList=李新毓, 张道永, 李祥, 李秋莲, 刘信, 王书荣, authorCompany=null, correspAuthors=王书荣, authorNote=

李新毓(1995—),女,硕士研究生。

, correspAuthorsNote=
王书荣(1968—),男,博士,教授。
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磁控溅射制备Cu2ZnSnS4薄膜太阳电池
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李新毓 , 张道永 , 李祥 , 李秋莲 , 刘信 , 王书荣
硅酸盐学报 | 研究论文 2022,50(5): 1257-1262
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硅酸盐学报 |研究论文 2022 , 50 (5) : 1257 -1262
磁控溅射制备Cu2ZnSnS4薄膜太阳电池
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李新毓 , 张道永, 李祥, 李秋莲, 刘信, 王书荣
作者信息
  • 云南师范大学,云南省农村能源工程重点实验室,昆明 650500
通讯作者:
王书荣(1968—),男,博士,教授。
作者简介:

李新毓(1995—),女,硕士研究生。

Preparation of Cu2ZnSnS4 Thin Films Solar Cells Based on Magnetron Sputtering
Xinyu LI , Daoyong ZHANG, Xiang LI, Qiulian LI, Xin LIU, Shurong WANG
Affiliations
  • Key Laboratory of Rural Energy Engineering in Yunnan Province, Yunnan Normal University, Kunming 650500, China
  • Corresponding Author:
    WANG Shurong (1968-), male, Ph.D., Professor. E-mail:

    LI Xinyu (1995-), fermale, Master candidate. E-mail:

出版时间: 2022-05-20 doi: 10.14062/j.issn.0454-5648.20210537
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为解决硫化过程中Sn元素损失的问题以及减少MoS2的厚度,采用磁控溅射技术,在基于钼的钠钙玻璃衬底上采用双周期溅射的方法,以ZnO/SnO2/Cu的顺序制备了含氧的Cu-Zn-Sn预制层。结果表明:SnO2以及ZnO的使用很好的抑制了Sn元素的损失以及MoS2层的形成,而且在590 ℃的硫化温度下能制备出表面平整、晶粒致密、晶体结构较好的单相Cu2ZnSnS4(CZTS)吸收层薄膜。最后,制备出结构完整的CZTS薄膜太阳电池,在590 ℃硫化制备的CZTS薄膜太阳电池效率最高,其开路电压为590 mV,短路电流密度为22.09 mA/cm2,填充因子为39.28%,光电转换效率达到5.12%,为今后制备高效CZTS薄膜太阳电池起到了推动作用。

铜锌锡硫  /  薄膜太阳电池  /  磁控溅射  /  二氧化锡靶  /  硫化工艺

In order to solve a problem of Sn-loss and reduce the thickness of MoS2 during the sulfurization process, the oxygen containing Cu-Zn-Sn precursor thin films were prepared on Mo-coated soda lime glasses via magnetron sputtering ZnO/SnO2/Cu. The results show that the Sn-loss and the formation of MoS2 are well inhibited by the utilization of SnO2 and ZnO. The single-phase CZTS absorbed thin films with the smooth surface, dense grains and good crystal structure can be prepared at 590 ℃. Also, the CZTS solar cells from oxygen containing precursors annealed at 590 ℃ have an optimum power conversion efficiency (PCE) of 5.12% with an open circuit voltage of 590 mV, a short circuit current density of 22.09 mA/cm2 and a fill factor of 39.28%.

copper-zinc-tin-sulfur  /  thin-film solar cells  /  magnetron sputtering  /  SnO2 target  /  sulfurization process
李新毓, 张道永, 李祥, 李秋莲, 刘信, 王书荣. 磁控溅射制备Cu2ZnSnS4薄膜太阳电池. 硅酸盐学报, 2022 , 50 (5) : 1257 -1262 . DOI: 10.14062/j.issn.0454-5648.20210537
Xinyu LI, Daoyong ZHANG, Xiang LI, Qiulian LI, Xin LIU, Shurong WANG. Preparation of Cu2ZnSnS4 Thin Films Solar Cells Based on Magnetron Sputtering[J]. Journal of the Chinese Ceramic Society, 2022 , 50 (5) : 1257 -1262 . DOI: 10.14062/j.issn.0454-5648.20210537
  • 国家自然科学基金(61941401)
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doi: 10.14062/j.issn.0454-5648.20210537
  • 接收时间:2021-07-02
  • 首发时间:2026-10-22
  • 出版时间:2022-05-20
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  • 收稿日期:2021-07-02
  • 修回日期:2021-08-25
基金
国家自然科学基金(61941401)
作者信息
    云南师范大学,云南省农村能源工程重点实验室,昆明 650500

通讯作者:

王书荣(1968—),男,博士,教授。
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鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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