Article(id=1322944444349153686, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322943149844345666, articleNumber=null, orderNo=null, doi=10.14062/j.issn.0454-5648.20210086, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1611849600000, receivedDateStr=2021-01-29, revisedDate=1618416000000, revisedDateStr=2021-04-15, acceptedDate=null, acceptedDateStr=null, onlineDate=1793344134652, onlineDateStr=2026-10-30, pubDate=1639929600000, pubDateStr=2021-12-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1793344134652, onlineIssueDateStr=2026-10-30, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1793344134652, creator=13701087609, updateTime=1793344134652, updator=13701087609, issue=Issue{id=1322943149844345666, tenantId=1146029695717560320, journalId=1263187385517883426, year='2021', volume='49', issue='12', pageStart='2549', pageEnd='2816', issueExtLink='null', onlineDate='null', pubDate='1639929600000', pubDateStr='2021-12-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1793343826018, creator='13701087609', updateTime=1793345974749, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1322952162350859029, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322943149844345666, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1322952162350859030, tenantId=1146029695717560320, journalId=1263187385517883426, issueId=1322943149844345666, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=2644, endPage=2651, ext={EN=ArticleExt(id=1322944446811210135, articleId=1322944444349153686, tenantId=1146029695717560320, journalId=1263187385517883426, language=EN, title=Effects of Scratch Speed and Crystal Orientation on Scratch Characteristics of 6H-SiC Wafer, columnId=1319726165087077079, journalTitle=Journal of the Chinese Ceramic Society, columnName=Research Article, runingTitle=null, highlight=null, articleAbstract=

Scratch tests were conducted on 6H-SiC single crystal wafers at different speeds and crystal orientations by a micron-/nano-sacle mechanical test system to analyze the friction coefficient, scratch depth of cut and surface three-dimensional morphology of the scratches. The results show that when the static load is 4 N or 6 N and the scratch speed is 0.2-1.6 mm/min, the scratch friction coefficient, scratch cutting depth and scratch width increase with the increases of load and scratch speed, and the plastic deformation area of SiC single crystal sheet increases and the surface becomes rougher. The friction coefficient is lower for low-speed scratching, thus reducing the wear rate of diamond head to some degree. The accumulation and pit degree of scratch materials at different crystal orientations are different. When the scratch crystal orientations are and , the friction coefficient, peak height and valley depth of scratch morphology are smaller, while the scratches along the and crystal orientations are larger. The former is easier to realize plastic removal than the latter.

, authors=Yinxia ZHANG, Pengju HUANG, Wei GAO, authorsList=Yinxia ZHANG, Pengju HUANG, Wei GAO, authorCompany=null, correspAuthors=Wei GAO, authorNote=, correspAuthorsNote=, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1322944456588132778, articleId=1322944444349153686, tenantId=1146029695717560320, journalId=1263187385517883426, language=CN, title=划痕速率和晶向对6H-SiC单晶片划痕特征的影响, columnId=1263922770220560512, journalTitle=硅酸盐学报, columnName=研究论文, runingTitle=null, highlight=null, articleAbstract=

采用微纳米力学测试系统对6H-SiC单晶片开展了不同速率和不同晶向的划痕试验，对划痕的摩擦系数、划痕切削深度以及表面三维形貌进行分析，进而研究划痕速率和晶向对6H-SiC单晶片划痕特征的影响。结果表明：当静载荷4 N和6 N、划痕速率从0.2 mm/min到1.6 mm/min时，随着载荷及划痕速率增大，划痕摩擦系数、划痕切削深度和划痕宽度等增大，SiC单晶片塑性变形区域增大，表面更粗糙。低速时摩擦系数较小，在一定程度上会减小划头的磨损速率。不同晶向的划痕材料堆积和凹坑程度不同，沿和晶向划痕的摩擦系数、划痕峰高和谷深较小，而沿和晶向划痕时较大，前者比后者较易实现塑性域加工。

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ZHANG Yinxia (1974-), female, Ph.D., Associate Professor. E-mail: zhangyinxia@zzu.edu.cn

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ZHANG Yinxia (1974-), female, Ph.D., Associate Professor. E-mail: zhangyinxia@zzu.edu.cn

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张银霞（1974—），女，博士，副教授。

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张银霞（1974—），女，博士，副教授。

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