电源学报

放电泵浦准分子激光充电电源工作模式分析和性能优化

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沈启辉 ¹^,² , 任嘉成 ¹^,² , 邵景珍 ¹ , 林颖 ¹ , 梁勖 ¹

电源学报 | 特种电源 2026,24(1): 321-329

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电源学报 |特种电源 2026 , 24 (1) : 321 -329

放电泵浦准分子激光充电电源工作模式分析和性能优化

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沈启辉¹^,², 任嘉成¹^,², 邵景珍¹, 林颖¹, 梁勖¹

作者信息

^1.中国科学院合肥物质科学研究院安徽光学精密机械研究所，合肥　230031

^2.中国科学技术大学研究生院科学岛分院，合肥　230026

通讯作者:

梁勖（1982—　），男，通信作者，博士，研究员。研究方向：准分子激光和光电子，高压和测控。E-mail：liangxu@aiofm.ac.cn。

作者简介:

沈启辉（1997—　），男，硕士。研究方向：准分子激光和光电子，高压。E-mail：qhshen@mail.ustc.edu.cn。

任嘉成（1998—　），男，硕士。研究方向：准分子激光和光电子，高压和测控。E-mail：jiachengren@yeah.net。

邵景珍（1979—　），女，博士，副研究员。研究方向：光电功能材料及其应用。E-mail：jzshao@aiofm.ac.cn。

林颖（1989—　），女，大专，实验师。研究方向：激光技术。E-mail：linying@aiofm.ac.cn。

Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply

Qihui SHEN¹^,², Jiacheng REN¹^,², Jingzhen SHAO¹, Ying LIN¹, Xu LIANG¹

Affiliations

^1.Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China

^2.Science Island Branch, Graduate School of University of Science and Technology of China, Hefei 230026, China

出版时间: 2026-01-30 doi: 10.13234/j.issn.2095-2805.2026.1.321

文章导航

摘要

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放电泵浦准分子激光在生物医疗领域存在一些独特的应用，但在工程化过程中，存在整机发热、电磁兼容等实际问题需要解决。介绍了准分子激光器的放电泵浦回路结构，分析了激光头与高压充电电源的电磁辐射、发热情况，比较了LC串联谐振式高压电容充电电源不同模式下的工作状态，并通过实验对比了不同工作模式下高压电容充电电源各部分的发热、电磁辐射情况。实验结果表明，回路开关管在开关频率f_s=f_r/2的工作模式下，对比f_s≥f_r的工作模式，IGBT结温下降16.8 ℃，IGBT损耗减少83.7 W（降低了82.8%），有效降低了高压充电电源温度，提升了整机电光转换效率；磁场强度峰值减少16.53 dB，电场强度峰值减少20.05 dB，有效抑制了电磁辐射干扰。

关键词

准分子激光 / 电容器充电电源 / LC串联谐振 / 软开关

Abstract

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Discharge-pumped excimer laser has some unique applications in the biomedical field. However, there still exist some practical problems to be solved in the process of engineering, such as machine heating and electromagnetic compatibility. The discharge-pumped circuit structure of excimer laser was introduced, the electromagnetic radiation and heat generation of the laser head and high-voltage charging power supply were analyzed, and the working states of an LC series resonant high-voltage capacitor charging power supply in different modes were compared. In addition, the heating and electromagnetic radiation of each part in the high-voltage capacitor charging power supply in different working modes were compared through experiments. Experimental results show that when the circuit switch tube worked in the mode of f_s=f_r/2, the IGBT junction temperature decreased by 16.8 ℃ compared with that in the mode of f_s≥f_r, and the IGBT loss was also reduced by 83.7 W (i.e., 82.8% in proportion) in the meantime, thus effectively reducing the temperature of the high-voltage charging power supply and improving the machine’s electro-optical conversion efficiency. Moreover, the peak value of magnetic field intensity was reduced by 16.53 dB, and the peak value of electric field intensity was reduced by 20.05 dB, effectively suppressing the electromagnetic radiation interference.

Key words

Excimer laser / capacitor charging power supply / LC series resonance / soft switching

引用本文

沈启辉, 任嘉成, 邵景珍, 林颖, 梁勖. 放电泵浦准分子激光充电电源工作模式分析和性能优化. 电源学报, 2026 , 24 (1) : 321 -329 . DOI: 10.13234/j.issn.2095-2805.2026.1.321

Qihui SHEN, Jiacheng REN, Jingzhen SHAO, Ying LIN, Xu LIANG. Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply[J]. Journal of Power Supply, 2026 , 24 (1) : 321 -329 . DOI: 10.13234/j.issn.2095-2805.2026.1.321

基金

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中国科学院科研仪器设备研制资助项目(YJKYYQ20210007)
基础加强计划重点基础研究资助项目(2021-JCJQ-ZD-051-00-05)
中国科学院青促会资助项目(2018481)

参考文献

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2026年第24卷第1期

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文章信息

doi: 10.13234/j.issn.2095-2805.2026.1.321

接收时间：2023-01-17
首发时间：2026-10-26
出版时间：2026-01-30

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出版历史

收稿日期：2023-01-17
修回日期：2023-07-10
录用日期：2023-07-27

基金

Research Equipment Development Project of Chinese Academy of Sciences(YJKYYQ20210007)

中国科学院科研仪器设备研制资助项目(YJKYYQ20210007)

Basic Strengthening Plan Key Basic Research Project(2021-JCJQ-ZD-051-00-05)

基础加强计划重点基础研究资助项目(2021-JCJQ-ZD-051-00-05)

Youth Innovation Promotion Association of Chinese Academy of Sciences(2018481)

中国科学院青促会资助项目(2018481)

作者信息

^1.中国科学院合肥物质科学研究院安徽光学精密机械研究所，合肥　230031

^2.中国科学技术大学研究生院科学岛分院，合肥　230026

通讯作者:

梁勖（1982—　），男，通信作者，博士，研究员。研究方向：准分子激光和光电子，高压和测控。E-mail：liangxu@aiofm.ac.cn。

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2种不同金属材料的力学参数

科 Family	属数 Number of genus	种数 Number of species	占总种数比例 Percentage of total species (%)	属 Genus	种数 Number of species	占总种数比例 Percentage of total species (%)
鹅膏菌科Amanitaceae	2	11	5.26	鹅膏菌属 Amanita	10	4.78
小菇科 Mycenaceae	2	12	5.74	丝盖伞属 Inocybe	5	2.39
多孔菌科 Polyporaceae	8	14	6.70	蜡蘑属 Laccaria	5	2.39
红菇科 Russulaceae	3	23	11.00	小皮伞属 Marasmius	6	2.87
				小菇属 Mycena	11	5.26
				光柄菇属 Pluteus	5	2.39
				红菇属 Russula	17	8.13
				栓菌属 Trametes	5	2.39

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